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arXiv 1202.0777cond-mat.mtrl-sciphysics.optics
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硅衬底上旋涂掺铒SiO_2溶胶-凝胶薄膜

Spin-Coated Erbium-Doped Silica Sol-Gel Films on Silicon

Sufian Abedrabbo, Bashar Lahlouh, Sudhakar Shet, Anthony Fiory, Nuggehalli Ravindra

摘要:

这项工作报告的光学功能,以及所产生的薄膜涂层。采用溶胶-凝胶工艺,用氧化铒和正硅酸乙酯(TEOS)的前体活性成分配制,用于旋涂薄(~130 nm)掺铒(~6 at. %)在单晶硅上的二氧化硅膜。退火后的薄膜会从薄膜中的铒离子产生1.5微米波段的红外辐射,同时也会大大增强底层硅的带隙辐射(~ 100倍)。这两种模式的光学活动的明显不同的机制解释的光发射理论和建模,光电子应用的前景进行了讨论。

英文摘要:

This work reports optical functionality contained in, as well as and produced by, thin film coatings. A sol-gel process, formulated with precursor active ingredients of erbium oxide and tetraethylorthosilicate (TEOS), was used for spin-coating thin (~130 nm) erbium-doped (~6 at. %) silica films on single-crystal silicon. Annealed films produce infrared emission in the 1.5-micron band from erbium ions in the film, as well as greatly enhancing (~100X) band-gap emission from the underlying silicon. The distinctly different mechanisms for the two modes of optical activities are interpreted in terms of optical emission theory and modeling; prospects for opto-electronic applications are discussed.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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