旋涂多层氧化铜薄膜及其结构特性
Spin Coated Multilayered Cupric Oxide Thin Films and their structural properties
摘要：
采用溶胶-凝胶旋涂技术在1500 rpm、2200 rpm和2400 rpm下合成CuO薄膜30秒，随后在150-550°C下退火1小时。制备了3层和5层CuO薄膜。利用XRD、FTIR和偏光显微镜对这些薄膜进行表征。XRD和FTIR分析证实了在350 °C以上退火的薄膜中CuO相的结晶，并且观察到相应的微晶尺寸随着退火温度的增加而增加。对CuO薄膜的X射线衍射图的（111）和（112）峰采用Scherrer公式。由峰值数据可知，随着退火温度从350 ℃升高到500 ℃，平均晶粒尺寸从0.801增加到55.20。
英文摘要：
Sol-gel spin coating technique was employed to synthesize CuO thin films at 1500 rpm, 2200 rpm and 2400 rpm for 30 seconds, and subsequently annealed at 150-550°C for 1 hour. Multi-layered CuO thin films with 3 and 5 layers were prepared. These thin films were characterized using XRD, FTIR and polarizing light microscopy. The XRD and FTIR analysis confirmed the crystallization of CuO phase in thin films annealed above 350 °C, and corresponding crystallite sizes were observed to be increasing with the annealing temperature. The Scherrer formula was applied for (111) and peaks of XRD patterns of CuO thin films. According to the data of peak, average crystallite size increased from 0.801 to 55.2 0A as annealing temperature was increased from 350 to 500 0C.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
