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arXiv 1106.0754cond-mat.mtrl-scicond-mat.mes-hallphysics.optics
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中红外laser显微镜的光束诱导散射模式:一种研究体半导体近表面和近界面区域缺陷的方法

Optical beam-induced scattering mode of mid-IR laser microscopy: a method for defect investigation in near-surface and near-interface regions of bulk semiconductors

O. V. Astafiev, V. P. Kalinushkin, V. A. Yuryev

摘要:

本文提出了一种新的中红外激光光束诱导散射技术,它是近年来发展起来的中红外激光扫描显微术的一种特殊模式。该技术在其目前的形式是专为调查大规模的复合活性缺陷在近表面和近界面区域的半导体晶片。然而,它可以很容易地修改为晶体中的缺陷调查。在许多方面类似于EBIC,本技术具有一些无可争议的优势,这使得其应用于非破坏性的实验室调查和质量监测的行业。

英文摘要:

This paper presents a new technique of optical beam-induced scattering of mid-IR-laser radiation, which is a special mode of the recently developed scanning mid-IR-laser microscopy. The technique in its present form is designed for investigation of large-scale recombination-active defects in near-surface and near-interface regions of semiconductor wafers. However, it can be easily modified for the defect investigations in the crystal bulk. Being in many respects analogous to EBIC, the present technique has some indisputable advantages, which enable its application for both non-destructive laboratory investigations and quality monitoring in the industry.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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