Correlated and in-situ electrical transmission electron microscopy studies and related membrane fabrication
Maria Spies, Zahra Sadre-Momtaz, Jonas Lähnemann, Minh Anh Luong, Bruno Fernandez, Thierry Fournier, Eva Monroy, Martien I. den Hertog
备注：
This is an author-created, un-copyedited version of a topical review published in Nanotechnology. IOP Publishing Ltd. is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.1088/1361-6528/ab99f0
Understanding the interplay between the structure, composition and opto-electronic properties of semiconductor nano-objects requires combining transmission electron microscopy (TEM) based techniques with electrical and optical measurements on the very same specimen. Recent developments in TEM technologies allow not only the identification and in-situ electrical characterization of a particular object, but also the direct visualization of its modification in-situ by techniques such as Joule heating. Over the past years, we have carried out a number of studies in these fields that are reviewed in this contribution. In particular, we discuss here i) correlated studies where the same unique object is characterized electro-optically and by TEM, ii) in-situ Joule heating studies where a solid-state metal-semiconductor reaction is monitored in the TEM, and iii) in-situ biasing studies to better understand the electrical properties of contacted single nanowires. In addition, we provide detailed fabrication steps for the silicon nitride membranes crucial to these correlated and in-situ measurements.
This work proposes new chemical and mechanical materials and techniques for III-V semiconductor NW/silicone membrane formation and optoelectronic device fabrication. Molecular beam epitaxy (MBE)-synthesized n-, p- and i-GaP NWs were encapsulated by introduced G-coating method into synthesized polydimethylsiloxane-graft-polystyrene and released from the Si growth substrate. The fabricated membranes were contacted with different materials including single-walled carbon nanotubes or ferrocenyl-containing polymethylhydrosiloxane with and without multi-walled carbon nanotubes doping. The electrical…
A micro-pressure sensor with an isosceles trapezoidal beam-membrane (ITBM) is proposed in this paper, consisting of a square silicon membrane, four isosceles trapezoidal beams and four piezoresistors.To investigate how the elastic silicon membrane affects pressure sensitive characteristics, a simulation models based on ANSYS 15.0 software were used to analyze the effect of structural dimension on characteristics of pressure sensor. According to that, the chips of micro-pressure sensors were fabricated by micro-electro-mechanical system (MEMS) technology on a silicon wafer with <100> orientatio…
The progress of membrane technology with the development of membranes with controlled parameters led to porous membranes. These membranes can be formed using different methods and have numerous applications in science and technology. Anodization of aluminum in this aspect is an electro-synthetic process that changes the surface of the metal through oxidation to deliver an anodic oxide layer. This process results in a self-coordinated, exceptional cluster of round and hollow formed pores with controllable pore widths, periodicity, and thickness. After the initial introduction, the paper proceed…
In this paper we present and verify the non-linear simulation of an aspherical adaptive lens based on a piezo-glass sandwich membrane with combined bending and buckling actuation. To predict the full non-linear piezoelectric behavior, we measured the non-linear charge coefficient, hysteresis and creep effects of the piezo material and inserted them into the FEM model using a virtual electric field. We further included and discussed the fabrication parameters -- glue layers and thermal stress -- and their variations. To verify our simulations, we fabricated and measured a set of lenses with dif…
Beware of the water: Hidden hydrogenation of perovskite membranes made by the water-soluble sacrificial layer method
Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and BIST（加泰罗尼亚纳米科学和纳米技术研究所（ICN2，CSIC和BIST））；Universitat Autònoma de Barcelona（巴塞罗那自治大学）；Institute of Materials Science of Barcelona (ICMAB-CSIC)（巴塞罗那材料科学研究所（ICMAB-CSIC））；ICREA - Institució Catalana de Recerca i Estudis Avançats（加泰罗尼亚研究与高等学府协会（ICREA））
Advancement of diamond based photonic circuitry requires robust fabrication protocols of key components, including diamond resonators and cavities. Here, we present 1D (nanobeam) photonic crystal cavities generated from single crystal diamond membranes utilising a metallic tungsten layer as a restraining, conductive and removable hard mask. The use of tungsten instead of a more conventional silicon oxide layer enables good repeatability and reliability of the fabrication procedures. The process yields high quality diamond cavities with quality factors (Q factors) approaching 10$^$4. Finally, w…
Electron beams can acquire designed phase modulations by passing through nanostructured material phase plates. These phase modulations enable electron wavefront shaping and benefit electron microscopy, spectroscopy, lithography, and interferometry. However, in the fabrication of electron phase plates, the typically used focused-ion-beam-milling method limits the fabrication throughput and hence the active area of the phase plates. Here, we fabricated large-area electron phase plates with electron-beam lithography and reactive-ion-etching. The phase plates are characterized by electron diffract…
Wetting of the membrane to displace air or conditioning liquids is important to exploit the complex porosity of a filtration membrane. This study reveals the details of wetting in multibore membrane-based filtration modules. Using magnetic resonance imaging (MRI), we quantify the fluid distribution patterns during initial membrane wetting in dead-end permeation mode. The spatio-temporal evolution of aqueous copper sulfate solution wetting the membrane fibers was investigated as a function of the applied flux, packing density, and position along the membrane module length. Three initial wetting…
Charged porous polymer membranes (CPMs) emerging as a multifunctional platform for diverse applications in chemistry, materials science, and biomedicine have been attracting widespread attention. Fabrication of CPMs in a controllable manner is of particular significance for optimizing their function and maximizing practical values. Herein, we report the fabrication of CPMs exclusively from poly(ionic liquid)s (PILs), and their pore size and wettability were precisely tailored by rational choice of the counteranions. Specifically, stepwise subtle increase in hydrophobicity of the counteranions …
Strain engineering has been a ubiquitous paradigm to tailor the electronic band structure and harness the associated new or enhanced fundamental properties in semiconductors. In this regard, semiconductor membranes emerged as a versatile class of nanoscale materials to control lattice strain and engineer complex heterostructures leading to the development of a variety of innovative applications. Herein we exploit this quasi-two-dimensional platform to tune simultaneously the lattice parameter and bandgap energy in group IV GeSn semiconductor alloys. As Sn content is increased to reach a direct…
Mechanical properties of a nanomechanical resonator have a significant impact on the performance of a resonant Nano-electromechanical system (NEMS) device. Here we study the mechanical properties of suspended membranes fabricated out of low-pressure chemical vapor deposited silicon nitride thin films. Doubly-clamped membranes of silicon nitride with thickness less than 50 nm and length varying from 5 um to 60 um were fabricated. The elastic modulus and stress in the suspended membranes were measured using Atomic Force Microscope (AFM)-based nanomechanical spectroscopy. The elastic modulus of t…
Fabrication of comb-drive actuators for straining nanostructured suspended graphene
我们报告的制造和表征的一个优化的梳状驱动致动器设计的应变相关的运输测量悬浮石墨烯。我们制造的设备，从高p型掺杂的硅使用深反应离子蚀刻与铬掩模。至关重要的是，我们实现了一个金层，以减少设备电阻从$\approx51.6$ k $\mathrmΩ$到$\approx236$ $\mathrmΩ$在室温下，以允许应变相关的传输测量。石墨烯通过使用聚甲基丙烯酸甲酯膜将其直接机械转移到致动器上来集成。重要的是，集成的石墨烯可以在之后进行纳米结构化，以优化器件功能。结构化悬浮石墨烯的最小特征尺寸为30 nm，这允许有趣的器件概念，例如机械可调纳米收缩。最后，我们通过测量拉曼光谱以及集成石墨烯片在不同应变值下的机械共振频率来表征所制造的器件。
