单层六方氮化硼中三角形纳米孔的原子级工程：一种解耦的成核与生长方法
Atomic Engineering of Triangular Nanopores in Monolayer hBN: A Decoupled Seeding and Growth Approach
AI总结：
本研究针对二维纳米孔难以兼顾高精度与高产量的制备难题，提出解耦成核与生长法，可在单层hBN上可控制备尺寸均匀的三角形纳米孔，还提供热退火生长路线以适配大面积制备，助力下一代膜器件发展。
摘要：
二维材料中的纳米孔在面向离子和分子传感与分离的先进膜技术领域备受关注。这些应用要求二维纳米孔具备精确的尺寸与形状，且数量充足。然而，传统制备技术往往难以同时实现高精度与高产量。本研究提出了一种解耦的成核与生长方法，旨在克服这一局限。该方法可实现尺寸分布窄的纳米孔集合的可控制备，并已在自支撑单层六方氮化硼（hexagonal boron nitride, hBN）上得到验证。我们首先利用轻离子辐照产生空位缺陷成核点，随后在透射电子显微镜中通过宽束电子辐照，借助元素特异性的优先原子去除过程，将这些成核点扩展为三角形纳米孔。纳米孔的密度和尺寸分别由离子辐照剂量与电子辐照剂量控制。在电子辐照步骤中，高分辨率成像可实时追踪纳米孔的形成过程，从而实现最高水平的控制。研究还提出了另一种工艺路线，采用空气中热退火完成纳米孔生长步骤，为大面积纳米孔制备提供了最灵活的平台，其显著优势是可同时去除表面碳氢化合物污染，减少孔堵塞和变形。本研究为研究人员提供了一种制备尺寸和几何形状可控、设计精细的纳米孔集合的新方法，将推动对高精度、高产量纳米孔制备流程有需求的下一代膜器件的发展。
英文摘要：
Nanopores in 2D materials are of significant interest in advanced membrane technologies aimed at the sensing and separation of ions and molecules. These applications necessitate 2D nanopores that are precise in size and shape, and abundant in number. However, conventional fabrication techniques often struggle to achieve both high precision and throughput. In this study, we introduce a decoupled seeding and growth approach designed to overcome this limitation. The method allows the controlled fabrication of ensembles of nanopores with narrow size distribution and is demonstrated for free-standing monolayer hexagonal boron nitride. Using light ion showering, we first create vacancy defect seeds. These seeds are then expanded into triangular nanopores through element-specific preferential atom removal under broad-beam electron irradiation in a transmission electron microscope. Nanopore density and size are controlled by the ion and electron irradiation doses, respectively. During the electron irradiation step, high-resolution imaging allows real-time tracking of the nanopore formation process, enabling the highest level of control. An additional workflow is introduced using thermal annealing in air for the nanopore growth step, delivering the most flexible platform for nanopore fabrication over larger areas with the significant benefit of concurrently removing surface hydrocarbon contamination to mitigate pore clogging and distortion. This study provides researchers with a novel approach to create ensembles of meticulously designed nanopores with well-controlled size and geometry, facilitating the development of next-generation membrane devices that will demand high precision and high throughput nanopore fabrication pipelines.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
