arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2302.04095physics.opticscond-mat.mtrl-sciphysics.ins-det
收藏

用于多材料应变映射的扫描反射各向异性显微技术

Scanning Reflectance Anisotropy Microscopy for Multi-Material Strain Mapping

Joan Sendra, Fabian Haake, Micha Calvo, Henning Galinski, Ralph Spolenak

AI总结:

本文提出一种宽带扫描反射各向异性显微镜,通过弹光效应实现多材料亚微米级应变映射,为可穿戴电子和光学半导体器件的无损力学表征开辟了新途径。

摘要:

材料的应变工程涉及显著的弹性变形,导致晶格对称性破缺,进而引发光学各向异性。然而,目前通过光学显微技术对局部应变场进行成像和映射的能力仅局限于特定材料。在此,我们引入了一种宽带扫描反射各向异性显微镜,作为用于应变映射的相位敏感型多材料光学平台。该显微镜生成的超光谱图像具有衍射极限的亚微米分辨率,可反映样品近正入射椭偏响应,该响应通过弹光效应与弹性应变相关联。我们利用超表面、半导体和金属等多种材料展示了前沿的应变灵敏度。该方法通过简单的反射测量研究晶格对称性破缺的多功能性,为可穿戴电子设备和光学半导体器件等多材料组件进行无损力学表征开辟了可能。

英文摘要:

Strain-engineering of materials encompasses significant elastic deformation and leads to breaking of the lattice symmetry and as a consequence to the emergence of optical anisotropy. However, the capability to image and map local strain fields by optical microscopy is currently limited to specific materials. Here, we introduce a broadband scanning reflectance anisotropy microscope as a phase-sensitive multi-material optical platform for strain mapping. The microscope produces hyperspectral images with diffraction-limited sub-micron resolution of the near-normal incidence ellipsometric response of the sample, which is related to elastic strain by means of the elasto-optic effect. We demonstrate cutting edge strain sensitivity using a variety of materials, such as metasurfaces, semiconductors and metals. The versatility of the method to study the breaking of the lattice symmetry by simple reflectance measurements opens up the possibility to carry out non-destructive mechanical characterization of multi-material components, such as wearable electronics and optical semiconductor devices.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

↑