arXivDaily arXiv每日学术速递 周一至周五更新
arXiv周末暂无论文更新,休息一下吧,周末愉快~~
arXiv 1104.2848cond-mat.mtrl-sci
收藏

Si(001)表面Ge量子点阵列的成核、形貌和CMOS相容性

Ge quantum dot arrays grown by ultrahigh vacuum molecular beam epitaxy on the Si(001) surface: nucleation, morphology and CMOS compatibility

Vladimir A. Yuryev, Larisa V. Arapkina

摘要:

本文研究了用双真空分子束外延技术在Si(001)表面生长Ge团簇阵列的形貌、成核和生长问题。在低(<600 ℃)和高(>600 ℃)Ge沉积期间量子点成核的差异。C)温度的高分辨率扫描隧道显微镜研究。本文提出了两种锗壳--金字塔形和楔形--生长的原子模型。探索了Ge量子点阵列在低温下的生长周期。讨论了降低阵列形成温度的问题,重点讨论了整个工艺的CMOS兼容性,特别关注了降低Si(001)表面预生长清洗处理温度的方法,这是Ge/Si(001)量子点密集阵列形成工艺的关键和最高温度阶段。Si清洁表面制备的温度(其最终高温步骤通常在结构沉积之前直接在MBE室中进行)决定了基于Ge-QD阵列的器件的形成工艺与CMOS制造周期的兼容性。提出了在预清洗过程中硅表面湿化学腐蚀的最后阶段进行氢化处理,以有效降低硅晶片生长前退火温度的可能途径。

英文摘要:

Issues of morphology, nucleation and growth of Ge cluster arrays deposited by ultrahigh vacuum molecular beam epitaxy on the Si(001) surface are considered. Difference in nucleation of quantum dots during Ge deposition at low (<600 deg C) and high (>600 deg. C) temperatures is studied by high resolution scanning tunneling microscopy. The atomic models of growth of both species of Ge huts---pyramids and wedges---are proposed. The growth cycle of Ge QD arrays at low temperatures is explored. A problem of lowering of the array formation temperature is discussed with the focus on CMOS compatibility of the entire process; a special attention is paid upon approaches to reduction of treatment temperature during the Si(001) surface pre-growth cleaning, which is at once a key and the highest-temperature phase of the Ge/Si(001) quantum dot dense array formation process. The temperature of the Si clean surface preparation, the final high-temperature step of which is, as a rule, carried out directly in the MBE chamber just before the structure deposition, determines the compatibility of formation process of Ge-QD-array based devices with the CMOS manufacturing cycle. Silicon surface hydrogenation at the final stage of its wet chemical etching during the preliminary cleaning is proposed as a possible way of efficient reduction of the Si wafer pre-growth annealing temperature.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

↑