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arXiv 0912.4341cond-mat.mtrl-scicond-mat.str-el
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单晶外延SrTiO3薄膜晶体管

A Single-Crystalline, Epitaxial SrTiO3 Thin-Film Transistor

Kosuke Uchida, Akira Yoshikawa, Kunihito Koumoto, Takeharu Kato, Yuichi Ikuhara, Hiromichi Ohta

摘要:

我们在此报告的制造和表征的薄膜晶体管(TFT),使用单晶,外延SrTiO 3膜,这是生长的脉冲激光沉积技术,然后在氧气气氛中的热退火处理。虽然多晶外延SrTiO 3薄膜上的TFT(沉积态)表现出差的晶体管特性,退火的单晶SrTiO 3 TFT表现出与体单晶SrTiO 3 FET的晶体管特性相当的晶体管特性:开/关电流比>10^5,亚阈值摆幅~2.1 V/十倍,场效应迁移率约为0.8 cm^2/Vs。这表明了适当的热退火处理外延SrTiO 3薄膜的有效性。

英文摘要:

We report herein fabrication and characterization of a thin-film transistor (TFT) using single-crystalline, epitaxial SrTiO3 film, which was grown by a pulsed laser deposition technique followed by the thermal annealing treatment in an oxygen atmosphere. Although TFTs on the polycrystalline epitaxial SrTiO3 films (as-deposited) exhibited poor transistor characteristics, the annealed single-crystalline SrTiO3 TFT exhibits transistor characteristics comparable with those of bulk single-crystal SrTiO3 FET: an on/off current ratio >10^5, sub-threshold swing ~2.1 V/decade, and field-effect mobility ~0.8 cm^2/Vs. This demonstrates the effectiveness of the appropriate thermal annealing treatment of epitaxial SrTiO3 films.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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