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arXiv 0907.5029cond-mat.mes-hallcond-mat.mtrl-sci
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氩气辅助生长碳化硅衬底上外延石墨烯的形貌和载流子迁移率的改善

Improvement of Morphology and Free Carrier Mobility through Argon-Assisted Growth of Epitaxial Graphene on Silicon Carbide

Joseph L. Tedesco, Brenda L. VanMil, Rachael L. Myers-Ward, James C. Culbertson, Glenn G. Jernigan, Paul M. Campbell, Joseph M. McCrate, Stephen A. Kitt, Charle… 展开作者

Joseph L. Tedesco, Brenda L. VanMil, Rachael L. Myers-Ward, James C. Culbertson, Glenn G. Jernigan, Paul M. Campbell, Joseph M. McCrate, Stephen A. Kitt, Charles R. Eddy,, D. Kurt Gaskill

摘要:

在氩气气氛和高真空条件下,在4 H-和6 H-SiC(0001)的C-和Si-面上外延生长石墨烯。生长后,样品进行了成像与Nomarski干涉衬度和原子力显微镜,它被发现,在氩气下生长导致改善的C面膜的形貌,但Si面膜没有显着的影响。自由载流子输运的研究进行了通过霍尔效应测量,和载流子迁移率被发现增加和片载流子密度被发现降低在氩气下生长的薄膜相比,高真空条件。改进的迁移率和同时减少片载流子密度表明减少在氩气下生长的薄膜中的散射。

英文摘要:

Graphene was epitaxially grown on both the C- and Si-faces of 4H- and 6H-SiC(0001) under an argon atmosphere and under high vacuum conditions. Following growth, samples were imaged with Nomarski interference contrast and atomic force microscopies and it was found that growth under argon led to improved morphologies on the C-face films but the Si-face films were not significantly affected. Free carrier transport studies were conducted through Hall effect measurements, and carrier mobilities were found to increase and sheet carrier densities were found to decrease for those films grown under argon as compared to high vacuum conditions. The improved mobilities and concurrent decreases in sheet carrier densities suggest a decrease in scattering in the films grown under argon.

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