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arXiv 0904.2617cond-mat.mes-hallcond-mat.mtrl-sci
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硅中单个杂质的单电子电容谱

Single-Electron Capacitance Spectroscopy of Individual Dopants in Silicon

M. Gasseller, R. Loo, J. F. Harrison, M. Caymax, S. Rogge, S. H. Tessmer

摘要:

最近的运输实验和拟议的原子级半导体器件的动机,我们提出的测量,扩展扫描探针方法的范围,以辨别硅样品的表面下几十纳米的单个掺杂剂的属性。使用基于电容的方法,我们既有空间分辨的单个次表面硼受体,又有光谱检测的单个空穴进入和离开这些微小的原子系统。被确定为B+状态的共振示出从受体到受体的能量转移。我们研究这种行为与最近邻距离。通过直接测量量子能级和测试掺杂剂-掺杂剂相互作用的影响,这种方法代表了未来原子级半导体器件开发的有价值的工具。

英文摘要:

Motivated by recent transport experiments and proposed atomic-scale semiconductor devices, we present measurements that extend the reach of scanned-probe methods to discern the properties of individual dopants tens of nanometers below the surface of a silicon sample. Using a capacitance-based approach, we have both spatially-resolved individual subsurface boron acceptors and detected spectroscopically single holes entering and leaving these minute systems of atoms. A resonance identified as the B+ state is shown to shift in energy from acceptor to acceptor. We examine this behavior with respect to nearest-neighbor distances. By directly measuring the quantum levels and testing the effect of dopant-dopant interactions, this method represents a valuable tool for the development of future atomic-scale semiconductor devices.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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