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arXiv 1802.07013cond-mat.mes-hall
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硅一维准弹道结纳米线场效应晶体管中的量子干涉

Quantum Interference in Silicon 1D Quasi-Ballistic Junctionless Nanowire Field Effect Transistors

Felix J. Schupp, Muhammad M. Mirza, Donald A. MacLaren, G. Andrew D. Briggs, Douglas J. Paul, Jan A. Mol

摘要:

我们研究了8 nm直径的Si无结纳米线场效应晶体管的低温输运与一个环绕式栅极和两个不同的激活掺杂浓度的自顶向下技术制造。首先,我们从器件中提取器件几何形状的本征栅极电容,该器件在13 mK下显示出库仑阻塞,在6 V的栅极电压范围内具有超过500个库仑峰,表明在整个纳米线沟道中形成了单个岛。在另外两个器件中,掺杂Si:P $4\times10^{19}\,\text{cm}^{-3}$和$2\times10^{20}\,\text{cm}^{-3}$,我们观察到量子干涉,并使用提取的栅极耦合来确定主导能量尺度和相应的平均自由路径。对于较高掺杂的器件,分析产生$4\pm2\,\text{nm}$的平均自由程,其在平均掺杂剂间距的量级上,并且表明在未活化或活化的掺杂剂上的散射。对于具有$4\times10^{19}\,\text{cm}^{-3}$的活化掺杂剂密度的器件,量子干涉效应表明$10\pm2\,\text{nm}$的平均自由程,其与纳米线宽度相当,因此是准弹道输运。通用电导波动的温度依赖性分析表明,在低于1.9 K的温度下,纳米线长度以上的相干长度,以及在更高温度下,来自1D电子-电子相互作用的退相干。的迁移率是有限的散射杂质,而不是预期的表面粗糙度散射的纳米线直径更大或可比的费米波长。因此,我们的测量提供了洞察的性能限制,从占主导地位的散射和退相机制,在技术相关的硅器件的几何形状。

英文摘要:

We investigate the low temperature transport in 8 nm diameter Si junctionless nanowire field effect transistors fabricated by top down techniques with a wrap-around gate and two different activated doping densities. First we extract the intrinsic gate capacitance of the device geometry from a device that shows Coulomb blockade at 13 mK with over 500 Coulomb peaks across a gate voltage range of 6 V indicating the formation of a single island in the entire nanowire channel. In two other devices, doped Si:P $4\times10^{19}\,\text{cm}^{-3}$ and $2\times10^{20}\,\text{cm}^{-3}$, we observe quantum interference and use the extracted gate coupling to determine the dominant energy scale and the corresponding mean-free paths. For the higher doped device the analysis yields a mean free path of $4\pm2\,\text{nm}$, which is on the order of the average dopant spacing and suggests scattering on unactivated or activated dopants. For the device with an activated dopant density of $4\times10^{19}\,\text{cm}^{-3}$ the quantum interference effects suggest a mean free path of $10\pm2\,\text{nm}$, which is comparable to the nanowire width, and thus quasi-ballistic transport. A temperature dependent analysis of Universal Conductance Fluctuations suggests a coherence length above the nanowire length for temperatures below 1.9 K and decoherence from 1D electron-electron interactions for higher temperatures. The mobility is limited by scattering on impurities rather than the expected surface roughness scattering for nanowires with diameters larger or comparable to the Fermi wavelength. Our measurements therefore provide insight into the performance limitations from dominant scattering and dephasing mechanisms in technologically relevant silicon device geometries.

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