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arXiv 1502.04181cond-mat.mes-hall
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新型高温静电掺杂平面场效应晶体管

Novel Electrostatically Doped Planar Field-Effect Transistor for High Temperature Applications

Tillmann Krauss, Frank Wessely, Udo Schwalke

摘要:

在本文中,我们提出了一个静电掺杂,因此电压可编程,平面,CMOS兼容的场效应晶体管(FET)结构的实验结果和模拟数据。这种平面器件是基于我们以前发表的硅纳米线(SiNW)技术。肖特基势垒源极/漏极(S/D)接触和绝缘体上硅(SOI)技术平台是这种双栅但单沟道通用FET的关键特征。两个电独立栅极的组合,一个用于S/D肖特基势垒调制以及沟道形成以建立肖特基势垒FET(SBFET)操作,一个前栅极形成用于实际电流控制的无结FET(JFET),显著增加了器件的温度鲁棒性。

英文摘要:

In this paper, we present experimental results and simulation data of an electrostatically doped and therefore voltage-programmable, planar, CMOS-compatible field-effect transistor (FET) structure. This planar device is based on our previously published Si-nanowire (SiNW) technology. Schottky barrier source/drain (S/D) contacts and a silicon-on-insulator (SOI) technology platform are the key features of this dual-gated but single channel universal FET. The combination of two electrically independent gates, one back-gate for S/D Schottky barrier modulation as well as channel formation to establish Schottky barrier FET (SBFET) operation and one front-gate forming a junctionless FET (JLFET) for actual current control, significantly increases the temperature robustness of the device.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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