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arXiv 2408.06951cond-mat.mtrl-scicond-mat.mes-hall
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硅掺杂铝氮化物薄膜中的声学与光学声子频率及声学声子速度

Acoustic and Optical Phonon Frequencies and Acoustic Phonon Velocities in Silicon-Doped Aluminum Nitride Thin Films

University of California, Los Angeles(加州大学洛杉矶分校);California NanoSystems Institute, University of California, Los Angeles(加州大学洛杉矶分校加利福尼亚纳米系统研究所);Arizona State University(亚利桑那州立大学);Auburn University(奥本大学)

Dylan Wright, Dinusha Herath Mudiyanselage, Erick Guzman, Xuke Fu, Jordan Teeter, Bingcheng Da, Fariborz Kargar, Houqiang Fu, Alexander A. Balandin

AI总结:

研究硅掺杂铝氮化物薄膜中声学与光学声子频率及声学声子速度,通过布拉格-曼德尔施塔姆和拉曼光散射谱学测量声学与光学声子频率,揭示掺杂硅对薄膜应变和位错密度的影响,优化超宽禁带半导体异质结及高功率器件热阻。

摘要:

我们报告了通过金属有机化学气相沉积在蓝宝石基板上生长的硅掺杂AlN薄膜中声学和光学声子的研究结果。布拉格-曼德尔施塔姆和拉曼光散射光谱学用于测量接近布里渊区中心的声学和光学声子频率。光学声子频率显示出非单调变化,反映了掺杂硅原子对薄膜应变和位错密度的变化。声学声子速度随着硅掺杂浓度的增加而单调减小,在掺杂浓度为3×10^19 1/cm³时减少约300 m/s。了解声学声子速度可用于优化超宽禁带半导体异质结并最小化高功率器件的热边界电阻。

英文摘要:

We report the results of the study of the acoustic and optical phonons in Si-doped AlN thin films grown by metalorganic chemical vapor deposition on sapphire substrates. The Brillouin - Mandelstam and Raman light scattering spectroscopies were used to measure the acoustic and optical phonon frequencies close to the Brillouin zone center. The optical phonon frequencies reveal non-monotonic changes, reflective of the variations in the thin-film strain and dislocation densities with the addition of Si dopant atoms. The acoustic phonon velocity decreases monotonically with increasing Si dopant concentration, reducing by ~300 m/s at the doping level of 3 x 10^19 1/cm3. Knowledge of the acoustic phonon velocities can be used to optimize ultra-wide bandgap semiconductor heterostructures and minimize the thermal boundary resistance of high-power devices.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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