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arXiv 1503.06573cond-mat.mtrl-sci
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氮化铝薄膜上二维原子层的点样

Spotting 2-D Atomic Layers on Aluminum Nitride Thin Films

Hareesh Chandrasekar, Krishna Bharadwaj B, Kranthi Kumar Vaidyuala, Swathi Suran, Navakanta Bhat, Manoj Varma, Srinivasan Raghavan

摘要:

大面积衬底的可用性对由层状材料制成的装置的技术和商业实现施加了重要约束。硅上的氮化铝薄膜被证明是有前途的候选材料,作为大面积的衬底,这样的设备。在此,作为在这些衬底上实现器件的必要的第一步,已经研究了AlN膜上的示例性2D层-MoS 2和石墨烯-的光学对比度。显着的对比度增强的预测和观察AlN薄膜相比,传统的SiO2薄膜。实验对比度的定量估计,使用反射光谱显示非常好的协议与预测值。

英文摘要:

The availability of large-area substrates imposes an important constraint on the technological and commercial realization of devices made of layered materials. Aluminum nitride films on silicon are shown to be promising candidate materials as large-area substrates for such devices. Herein, the optical contrast of exemplar 2D layers - MoS2and graphene - on AlN films has been investigated as a necessary first step to realize devices on these substrates. Significant contrast enhancements are predicted and observed on AlN films compared to conventional SiO2films. Quantitative estimates of experimental contrast using reflectance spectroscopy show very good agreement with predicted values.

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