氮化铌钛作为纳米力学用高拉伸应力材料
Niobium Titanium Nitride as a High Tensile Stress Material for Nanomechanics
浏览论文内容
中文总结 AI 辅助
本研究将超导氮化物NbTiN用作纳米机械谐振器，制备出高应力纳米弦谐振器并表征其性能，该材料有望用于腔电机械与纳米力学领域。
中文摘要 AI 辅助
过去数十年间，高相干机械谐振器不断被推向新极限，研究人员采用耗散稀释、夹具锥形化等技术将其品质因子提升至材料本征限制之上。如今这类机械谐振器常采用氮化硅、碳化硅或铝制备，但近来人们对新型材料平台的兴趣日益增长，尤其是可集成至超导电路的材料。其中，超导氮化物因相较于单质超导体具有更高的转变温度而极具应用前景。本研究将其用作纳米机械谐振器，报道了高应力双端夹持氮化铌钛（NbTiN）纳米弦谐振器的制备与表征结果。研究采用光学干涉法测定了从室温到13K区间内的弹性质与机械品质因子，观测到高达0.81GPa的高拉伸应力，以及181GPa的杨氏模量，本征机械品质因子最高达850。凭借这些优异的力学性能，NbTiN有望成为未来腔电机械与纳米力学领域应用的理想材料平台。
英文摘要
Over the past decades, high-coherence mechanical resonators have been continuously pushed to new limits, using techniques such as dissipation dilution and clamp-tapering to enhance their quality factor beyond intrinsic material limitations. Today, these mechanical resonators are often fabricated from silicon-nitride, silicon-carbide or aluminum. Recently, however, interest in novel material platforms has grown, especially those allowing for the integration within superconducting circuits. Among these, superconducting nitrides stand out as particularly promising due to their high transition temperatures compared to elementary superconductors. Here, we introduce them as nanomechanical resonators and report on the fabrication and characterization of highly stressed, doubly clamped niobium titanium nitride (NbTiN) nanostring resonators. Using optical interferometry, we determine the elastic properties and mechanical quality factor from room temperature to 13 K. We observe high tensile stress up to 0.81 GPa along with a Young's modulus of 181 GPa and an intrinsic mechanical quality factor up to 850. With these favorable mechanical properties, NbTiN constitutes a promising material platform for future applications in cavity electro- and nanomechanics.
