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arXiv 0902.2042cond-mat.mtrl-sci
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Sb在非晶硅中的扩散研究

Investigation of Sb diffusion in amorphous silicon

A. Csik, G. A. Langer, G. Erdelyi, D. L. Beke, Z. Erdelyi, K. Vad

摘要:

非晶硅材料及其合金在大面积微电子和光电子器件中得到了广泛的应用。然而,非晶-晶转变、偏析和扩散过程仍有许多未解之谜。本文利用二次中性质谱(SNMS)研究了Sb在非晶硅膜中的扩散。采用直流磁控溅射法在室温下制备了Sb含量为5at%的非晶Si/Si 1-xSbx/Si三层结构样品。样品的退火在真空(p<10-7毫巴)和100巴高纯度(99.999%)Ar压力中在不同温度下进行。在退火过程中,观察到Sb合金化和非晶Si层之间的相当缓慢的混合。在考虑浓度无关扩散的情况下,计算得到的扩散系数在823 K时为10-21 m ~ 2·s ~(-1)。

英文摘要:

Amorphous silicon materials and its alloys become extensively used in some technical applications involving large area of the microelectronic and optoelectronic devices. However, the amorphous-crystalline transition, segregation and diffusion processes still have numerous unanswered questions. In this work we study the Sb diffusion into an amorphous Si film by means of Secondary Neutral Mass Spectrometry (SNMS). Amorphous Si/Si1-xSbx/Si tri-layer samples with 5 at% antimony concentration were prepared by DC magnetron sputtering onto Si substrate at room temperature. Annealing of the samples were performed at different temperature in vacuum (p<10-7 mbar) and 100 bar high purity (99.999%) Ar pressure. During annealing a rather slow mixing between the Sb-alloyed and the amorphous Si layers was observed. Supposing concentration independent diffusion, the evaluated diffusion coefficients are in the range of ~10-21 m2s-1 at 823 K.

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