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arXiv 2401.07166cond-mat.mtrl-sci
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Cr$_2$O$_3$:Mg/β-Ga$_2$O$_3$ p-n异质结二极管在600°C下的可靠运行

Reliable operation of Cr$_2$O$_3$:Mg/ $β$-Ga$_2$O$_3$ p-n heterojunction diodes at 600$^\circ$C

William A. Callahan, Kingsley Egbo, Cheng-Wei Lee, David Ginley, Ryan O'Hayre, Andriy Zakutayev

AI总结:

本文研究了Cr$_2$O$_3$:Mg/β-Ga$_2$O$_3$ p-n异质结二极管在600°C下的运行可靠性,发现其性能退化源于界面Mg和MgO积累,为超宽禁带半导体器件的高温应用设计提供了依据。

摘要:

基于β-Ga$_2$O$_3$的半导体异质结近年来在高电压和高温条件下展现出改进的性能,因此在功率电子器件和恶劣环境传感器中具有广阔的应用前景。然而,这些超宽禁带(UWBG)半导体器件的长期可靠性仍很少被关注,并且可能受到p-n异质结界面化学反应的强烈影响。在此,我们实验演示了Cr$_2$O$_3$:Mg/β-Ga$_2$O$_3$ p-n异质结二极管在600°C下长时间运行的工作情况并评估其可靠性,以及在25–550°C之间重复30次循环后的可靠性。计算得到的Ga-Cr-O材料体系的pO2-温度相稳定性图预测,Ga$_2$O$_3$和Cr$_2$O$_3$在较宽的氧压和工作温度范围内相互接触时应保持热力学稳定。所制备的Cr$_2$O$_3$:Mg/β-Ga$_2$O$_3$ p-n异质结二极管在±5V下显示出室温开/关比>10$^4$,击穿电压(V$_{Br}$)为-390V。泄漏电流随温度升高至600°C而增大,这归因于陷阱势垒高度为0.19 eV的Poole-Frenkel发射。在600°C下经过140小时的热浸泡过程中,器件的开启电压和导通电阻分别从1.08V和5.34 mΩ-cm$^2$增加到1.59V和7.1 mΩ-cm$^2$。根据TOF-SIMS分析观察到的结果,这一增加归因于Mg和MgO在Cr$_2$O$_3$/Ga$_2$O$_3$界面处的积累。这些发现为面向恶劣环境运行的UWBG半导体器件的未来设计策略提供了参考,并强调了进一步对基于β-Ga$_2$O$_3$的器件进行可靠性评估的必要性。

英文摘要:

$β$-Ga$_2$O$_3$-based semiconductor heterojunctions have recently demonstrated improved performance at high voltages and elevated temperatures and are thus promising for applications in power electronic devices and harsh-environment sensors. However, the long-term reliability of these ultra-wide band gap (UWBG) semiconductor devices remains barely addressed and may be strongly influenced by chemical reactions at the p-n heterojunction interface. Here, we experimentally demonstrate operation and evaluate the reliability of Cr$_2$O$_3$:Mg/ $β$-Ga$_2$O$_3$ p-n heterojunction diodes at during extended operation at 600$^\circ$C, as well as after 30 repeated cycles between 25-550$^\circ$C. The calculated pO2-temperature phase stability diagram of the Ga-Cr-O material system predicts that Ga$_2$O$_3$ and Cr$_2$O$_3$ should remain thermodynamically stable in contact with each other over a wide range of oxygen pressures and operating temperatures. The fabricated Cr$_2$O$_3$:Mg / $β$-Ga$_2$O$_3$ p-n heterojunction diodes show room-temperature on/off ratios >10$^4$ at $\pm$5V and a breakdown voltage (V$_{Br}$) of -390V. The leakage current increases with increasing temperature up to 600$^\circ$C, which is attributed to Poole-Frenkel emission with a trap barrier height of 0.19 eV. Over the course of a 140-hour thermal soak at 600$^\circ$C, both the device turn-on voltage and on-state resistance increase from 1.08V and 5.34 m$Ω$-cm$^2$ to 1.59V and 7.1 m$Ω$-cm$^2$ respectively. This increase is attributed to the accumulation of Mg and MgO at the Cr$_2$O$_3$/Ga$_2$O$_3$ interface as observed from TOF-SIMS analysis. These findings inform future design strategies of UWBG semiconductor devices for harsh environment operation and underscore the need for further reliability assessments for $β$-Ga$_2$O$_3$ based devices.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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