arXivDaily arXiv每日学术速递 周一至周五更新
北美退伍军人节(Veterans Day),12 日无更新
arXiv 2209.09460cond-mat.mtrl-sciphysics.app-phphysics.chem-ph
收藏

衬底表面对旋涂法制备宽带隙SnO2薄膜的影响

Effect of Substrate Surface on the Wide Bandgap SnO2 Thin Films Grown by Spin Coating

Md. Nur Amin Bitu, Nazmul Islam Tanvir, Suravi Islam, Syed Farid Uddin Farhad

摘要:

以SnCl_2·2 H_2 O为前驱体,采用两种不同的工艺条件合成了SnO_2溶胶。然后通过旋涂将制备的溶胶沉积在UV-臭氧处理的石英和钠钙玻璃(SLG)基底上。将合成的膜在约100 ℃下软烘烤。C.将该过程重复五次以得到致密膜,然后在250 ℃下空气退火。C. 2小时采用紫外-可见-近红外光谱、掠入射X射线衍射(GIXRD)和场发射扫描电子显微镜(FESEM)对原始膜和退火膜进行了表征。通过测量与去离子(DI)水的接触角来研究基底表面的影响。紫外线臭氧处理的基板提供了一个更清洁的表面生长均匀的薄膜。退火薄膜的电阻率通过采用电流反转技术的四点共线探针进行,并且发现在约0.001至约0.001的范围内。2x10^3至3x10^3欧姆-厘米。发现膜厚度在约100 μ m的范围内。137-285 nm,通过触针轮廓仪测量。UV-VIs-NIR透射数据显示,所有薄膜样品在可见光范围内显示最大(82-89)%透射。估计薄膜的光学带隙约为1.5nm。3.75-4.00 eV和约3.78-4.35 eV的SLG和石英衬底上生长的薄膜分别。

英文摘要:

Tin (IV) oxide (SnO2) sols have been synthesized from SnCl2.2H2O precursor solution by applying two different processing conditions. The prepared sols were then deposited on UV-Ozone treated quartz and soda lime glass (SLG) substrates by spin coating. The as-synthesized film was soft-baked at about 100 deg. C. for 10 min. This process was repeated five times to get a compact film, followed by air-annealing at 250 deg. C. for 2 hours. The pristine and annealed films were characterized by UV-Vis-NIR spectroscopy, Grazing Incident X-Ray Diffraction (GIXRD), and Field Emission Scanning Electron Microscope (FESEM). The effect of the substrate surface was investigated by measuring the contact angles with De-Ionized (DI) water. UV-Ozone treatment of substrate provides a cleaner surface to grow a homogeneous film. The electrical resistivity of annealed thin films was carried out by a four-point-collinear probe employing the current reversal technique and found in the range of approx. 2x10^3 to 3x10^3 Ohm-cm. Film thickness was found in the range of approx. 137-285 nm, measured by a stylus profilometer. UV-VIs-NIR Transmission data revealed that all the thin film samples showed maximum (82-89) % transmission in the visible range. The optical bandgap of the thin films was estimated to be approx. 3.75-4.00 eV and approx. 3.78-4.35 eV for the films grown on SLG and quartz substrates, respectively.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

↑