在m面和c面蓝宝石衬底上生长的优先取向CdMgO合金
MBE grown preferentially oriented CdMgO alloy on m- and c-plane sapphire substrates
摘要：
与其它Ⅱ-Ⅵ族半导体材料不同，氧化镉透明氧化物在制备各种光电子器件方面具有巨大的应用潜力。在这项工作中，我们研究了生长CdxMg 1-xO合金的m-和c-平面蓝宝石衬底上的富镉富镁的条件下，使用等离子体辅助分子束外延方法。采用X射线衍射和原子力显微镜（AFM）技术对CdMgO无规合金的结构和形貌进行了研究，并采用能量色散X射线（EDX）光谱法进行了成分分析。利用紫外-可见光谱研究了薄膜的室温光学性质。X射线衍射分析证实了立方岩盐结构的存在，<111>CdMgO晶体取向的c-平面蓝宝石和<110>CdMgO优先取向的m-平面蓝宝石。通过AFM测量表面粗糙度。从吸收曲线，光学带隙确定使用Tauc关系，它被发现的带隙的薄膜的影响，Mg 2+离子掺入到CdO晶格。计算了m型和c型耐火材料上样品的弯曲参数。
英文摘要：
Unlike other II-VI semiconductors, CdO-based transparent oxide has great potential application for the fabrication of many optoelectronic devices. In this work, we study the growth of CdxMg1-xO alloys on m- and on c-plane sapphire substrates in Cd-rich to Mg-rich conditions using the plasma-assisted molecular beam epitaxy method. A structural and morphological study of CdMgO random alloys was carried out using X-ray diffraction and Atomic Force Microscope (AFM) techniques whereas composition analysis was done by Energy-dispersive X-ray (EDX) spectroscopy method. The optical properties of thin films were investigated by UV-Vis spectroscopy at room temperature. X-ray analysis confirmed the presence of cubic rock salt structure with <111> CdMgO crystallographic orientation on c-plane sapphire and <110> CdMgO preferential orientation on m-plane sapphire. The surface roughness was measured by the AFM. From the absorption curve, the optical bandgaps were determined using Tauc relation and it was found that the bandgap of films is influenced by the incorporation of Mg2+ ions into the CdO lattice. Bowing parameter was calculated both for samples on m- and c- sapphires.
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