With compact footprint, low energy consumption, high scalability, and mass producibility, chip-scale integrated devices are an indispensable part of modern technological change and development. Recent advances in two-dimensional (2D) layered materials with their unique structures and distinctive properties have motivated their on-chip integration, yielding a variety of functional devices with superior performance and new features. To realize integrated devices incorporating 2D materials, it requires a diverse range of device fabrication techniques, which are of fundamental importance to achieve good performance and high reproducibility. This paper reviews the state-of-art fabrication techniques for the on-chip integration of 2D materials. First, an overview of the material properties and on-chip applications of 2D materials is provided. Second, different approaches used for integrating 2D materials on chips are comprehensively reviewed, which are categorized into material synthesis, on-chip transfer, film patterning, and property tuning / modification. Third, the methods for integrating 2D van der Waals heterostructures are also discussed and summarized. Finally, the current challenges and future perspectives are highlighted.
Oil wastewater and spilled oil caused serious environmental pollution and damage to public health in the last years. Therefore, considerable efforts are made to develop sorbent materials able to separate oil from water with high selectivity and sorption capacity. However most of them are low reusable, with low volume absorption capacity and poor mechanical properties. Moreover, the synthesis is time-consuming, complex and expensive limiting its practical application in case of emergency. Here we propose an innovative approach for the fabrication of porous PDMS starting from an inverse water-in…
Strained layer superlattice (SLS) material system is a dynamic and relatively new material for infrared detection. Large format, small-pitch and low-cost focal plane arrays (FPAs) with more pixels are in demand for different applications. For the current SLS based FPAs mesa etching are used to define the pixels. For those SLS based FPAs with scaled pixel size making the mesa structures can be challenging due to the need for deep etch, and then passivation process. One of the possible solutions to address this issue is to consider a planar structure and avoiding the mesa-isolation etching or co…
Careful research on different materials reveals that the material properties are mostly affected by the size of it. Material size down to nanometer scale exhibits some remarkable properties, resulting in unique physical and chemical characteristics. In todays world of nanotechnology, carbon nanotubes (CNTs) have become a high priority material because of their exclusive structure, novel characteristics with enormous potential in many technological applications. Till date chemical vapor deposition (CVD) is the preferred and widely used technique among different CNT growth methods, because of it…
A large-area thermoelectric generator (TEG) utilizing a folded thin-film concept is implemented and the performance evaluated for near room temperature applications having modest temperature gradients (< 50 K). The TEGs with the area of ~0.33 m^2 are shown capable of powering a wireless sensor node of multiple sensors suitable e.g. for monitoring environmental variables in buildings. The TEGs are based on a transparent, non-toxic and abundant thermoelectric material, i.e. aluminium-doped zinc oxide (AZO), deposited on flexible substrates. After folding, both the electrical current and heat flu…
Magnetic isotropic NdFeB powder is processed by the following additive manufacturing methods: (i) stereolithography (SLA), (ii) fused filament fabrication (FFF), and (iii) selective laser sintering (SLS). For the first time, a stereolithography based method is used to 3D print hard magnetic materials. FFF and SLA use a polymer matrix material as binder, SLS sinters the powder directly. All methods use the same hard magnetic NdFeB powder material. Complex magnets with small feature sizes in a superior surface quality can be printed with SLA. The magnetic properties for the processed samples are…
Methods to fabricate and characterize monodisperse magnetic nanoplatelets for fluid/bio-based applications based on spintronic thin-film principles are a challenge. This is due to the required top-down approach where the transfer of optimized blanket films to free particles in a fluid while preserving the magnetic properties is an uncharted field. Here, we explore the use of substrate conformal imprint lithography (SCIL) as a fast and cost-effective fabrication route. We analyze the size distribution of nominal 1.8 um and 120 nm diameter platelets and show the effect of the fabrication steps o…
In this thesis various plasmonic materials, such as hyperbolic metamaterial nanohole arrays and Au-coated free standing nanoassembly supporting nanopores, are investigated with the aim to perform optical sensing of DNA molecules with Surface-Enhanced Raman Spectroscopy in flow-through configuration.
This work proposes new chemical and mechanical materials and techniques for III-V semiconductor NW/silicone membrane formation and optoelectronic device fabrication. Molecular beam epitaxy (MBE)-synthesized n-, p- and i-GaP NWs were encapsulated by introduced G-coating method into synthesized polydimethylsiloxane-graft-polystyrene and released from the Si growth substrate. The fabricated membranes were contacted with different materials including single-walled carbon nanotubes or ferrocenyl-containing polymethylhydrosiloxane with and without multi-walled carbon nanotubes doping. The electrical…
Local laser oxidation of a thin titanium film is considered as a means of a precise adjustment of losses and effective refractive index of dielectric optical waveguides. A fine phase control of an operating point and extinction ratio enhancement up to 57 dB were demonstrated using an integrated optical Ti:LiNbO3 Mach-Zehnder modulator. This technique only slightly affects the dielectric waveguide material and is very promising for a high precision permanent trimming of photonic devices based on dielectric waveguides of different material platforms and fabrication technologies.
Growing interest in devices based on layered van der Waals (vdW) materials is motivating the development of new nanofabrication methods. Hexagonal boron nitride (hBN) is one of the most promising materials for studies of quantum photonics and polaritonics. Here, we report in detail on a promising nanofabrication processes used to fabricate several hBN photonic devices using a hybrid electron beam induced etching (EBIE) and reactive ion etching (RIE) technique. We highlight the shortcomings and benefits of RIE and EBIE and demonstrate the utility of the hybrid approach for the fabrication of su…
Grating-based X-ray phase-contrast interferometry has a high application impact in material science and medicine for imaging of weakly absorbing (low Z) materials and soft tissues. For the absorbing gratings, casting of highly x-ray absorbing metals, such as Au and Pb alloys, has proven to be a viable way to generate large area periodic high aspect ratio microstructures. In this paper, we review the grating fabrication strategy with a special focus on a novel approach of casting low temperature melting alloys (Au-Sn and Pbbased alloy) into Si grating templates using hot embossing. The process,…
We have theoretically studied how resonant spin wave modes in an elliptical nanomagnet are affected by fabrication defects, such as small local thickness variations. Our results indicate that defects of this nature, which can easily result from the fabrication process, or are sometimes deliberately introduced during the fabrication process, will significantly alter the frequencies, magnetic field dependence of the frequencies, and the power and phase profiles of the resonant spin wave modes. They can also spawn new resonant modes and quench existing ones. All this has important ramifications f…
The fabrication of terahertz (THz) optics with arbitrary shapes via poly-methacrylate-based stereolithography is very attractive as it may offer a rapid, low-cost avenue towards optimized THz imaging applications. In order to design such THz optical components appropriately, accurate knowledge of the complex dielectric function of the materials used for stereolithographic fabrication is crucial. In this paper we report on the complex dielectric functions of several polymethacrylates frequently used for stereolithographic fabrication. Spectroscopic ellipsometry data sets from the THz to mid-inf…
Face masks in general, and N95 filtering facepiece respirators (FRs) that protect against SARS-Cov-2 virion in particular, have become scarce during the ongoing COVID-19 global pandemic. This work presents practical design principles for the fabrication of electrocharged filtration layers employed in N95 FRs using commonly available materials and easily replicable methods. The input polymer is polypropylene or polystyrene, and can include discarded plastic containers of these materials, and the fabrication setup is based on the cotton candy (CC) principle. The primary parameters underlying the…
Microfluidic chips provide unparalleled control over droplets and jets, which have advanced all natural sciences. However, microfluidic applications could be vastly expanded by increasing the per-channel throughput and directly exploiting the output of chips for rapid additive manufacturing. We unlock these features with in-air microfluidics, a new chip-free platform to manipulate microscale liquid streams in the air. By controlling the composition and in-air impact of liquid microjets by surface tension-driven encapsulation, we fabricate monodisperse emulsions, particles, and fibers with diam…
Ferromagnetic materials have been utilised as recording media within data storage devices for many decades. Confinement of the material to a two dimensional plane is a significant bottleneck in achieving ultra-high recording densities and this has led to the proposition of three dimensional (3D) racetrack memories that utilise domain wall propagation along nanowires. However, the fabrication of 3D magnetic nanostructures of complex geometry is highly challenging and not easily achievable with standard lithography techniques. Here, by using a combination of two-photon lithography and electroche…
Controlled atomic scale fabrication of functional devices is one of the holy grails of nanotechnology. The most promising class of techniques that enable deterministic nanodevice fabrication are based on scanning probe patterning or surface assembly. However, this typically involves a complex process flow, stringent requirements for an ultra high vacuum environment, long fabrication times and, consequently, limited throughput and device yield. Here, a device platform is developed that overcomes these limitations by integrating scanning probe based dopant device fabrication with a CMOS-compatib…
Layered materials (LMs) such as graphene or MoS$_2$ have recently attracted a great deal of interest. These materials offer unique functionalities due to their structural anisotropy characterized by weak van der Waals bonds along the out-of-plane axis and covalent bonds in the in-plane direction. A central requirement to access the structural information of complex nanostructures built upon LMs is to control the relative orientation of each sample prior to their inspection e.g. with Transmission Electron Microscopy (TEM). However, developing sample preparation methods that result in large insp…
The transparent Er, Nd co-doped Yttria ceramics with transparency around 78 percentage (in 500 - 2000 nm range without Fresnels correction) were fabricated successfully. It involved nanoparticle synthesis by coprecipitation method and sintering of pellets under high vacuum condition. The crystalline phase, particle size and element composition were confirmed by X- ray diffraction, scanning electron microscope, energy dispersive X- ray fluorescence techniques, respectively. The upconversion luminescence mechanisms involving energy transfer and non-radiative relaxation were analyzed. It is expec…
Superconducting devices are prone to reduced performance caused by impurities and defects along the edges of their wires, which can lead to local current crowding. In this study, we explored the use of helium ion irradiation to modify the lattice structure of the superconducting material to change its intrinsic properties. The process will allow us to directly pattern devices and potentially improve the quality of the nanowires. To achieve this, we used the ion beam from a scanning helium ion microscope (HIM) to localize damage on a superconducting material to create a nanowire. Two experiment…
The epitaxial growth of two-dimensional (2D) $β-In_2Se_3$ material was obtained over 2-inches c-sapphire wafers using molecular beam epitaxy (MBE). Excellent quality of thick (90 nm) and very thin films, down to two quintuple layers (2 nm), was confirmed by x-ray diffraction (XRD), Raman spectroscopy, and aberration-corrected scanning transmission electron microscopy (ac-STEM). Wafer-scale fabrication of photodetectors based on five quintuple layers was produced using photolithography and other standard semiconductor processing methods. The photodetectors exhibit responsivity of 3 mA/W, peak s…
Nanofibre-based optical cavities are particularly useful for quantum optics application, such as the development of integrated single-photon sources, and for studying fundamental light-matter interactions in cavity quantum electrodynamics (cQED). Although several techniques have been used to produce nanofibre-based optical cavities, focussed ion beam (FIB) milling is becoming popular; it can be used for the fabrication of complex structures directly in the nanofibre. This technique uses a highly accelerated ion beam to remove atoms from the target material with high resolution. However, it is …
Graphene and graphene-based materials exhibit exceptional optical and electrical properties with great promise for novel applications in light detection. However, several challenges prevent the full exploitation of these properties in commercial devices. Such challenges include the limited linear dynamic range (LDR) of graphene-based photodetectors, the lack of efficient generation and extraction of photoexcited charges, the smearing of photoactive junctions due to hot-carriers effects, large-scale fabrication and ultimately the environmental stability of the constituent materials. In order to…
Nanodiamonds hosting colour centres are a promising material platform for various quantum technologies. The fabrication of non-aggregated and uniformly-sized nanodiamonds with systematic integration of single quantum emitters has so far been lacking. Here, we present a top-down fabrication method to produce 30.0$\pm$5.4 nm uniformly-sized single-crystal nanodiamonds by block copolymer self-assembled nanomask patterning together with directional and isotropic reactive ion etching. We show detected emission from bright single nitrogen vacancy centres hosted in the fabricated nanodiamonds. The li…
Integrating all optical components of an optical coherence tomography (OCT) device into a single chip is a non-trivial and a challenging job. The design and development of such a lab-on-a chip will be possible only via Micro-Opto-Electro-Mechanical System (MOEMS) technology. The reproducible and integrated optical device fabrication would reduce cost and size many fold as compared to bulk or fiber optic OCT system. A miniaturized OCT of size less than 5mm$^2$ area is designed, simulated and optimized. The successful fabrication of this device would help in point-of-contact devices as well as e…
Nano-electromechanical (NEM) contact switches have been extensively studied to suppress the limitations of conventional complementary metal-oxide-semiconductor (CMOS) transistors. The attributes of NEM contact switches includes reduced power consumption, reduced off-state leakage current, increased on-state current and sub-thermal switching. However, unacceptably high pull-in voltage and low contact lifetime posed a significant challenge for the use of NEM contact switches in energy efficient CMOS applications. Here, we demonstrate a graphene-based electro-statically actuated NEM contact switc…
Waveguides in nonlinear materials are a key component for photon pair sources and offer promising solutions to interface quantum memories through frequency conversion. To bring these technologies closer to every-day life, it is still necessary to guarantee a reliable and efficient fabrication of these devices. Therefore, a thorough understanding of the technological limitations of nonlinear waveguiding devices is paramount. In this paper, we study the link between fabrication errors of waveguides in nonlinear crystals and the final performance of such devices. In particular, we first derive a …
The ability to uniquely identify an object or device is important for authentication. Imperfections, locked into structures during fabrication, can be used to provide a fingerprint that is challenging to reproduce. In this paper, we propose a simple optical technique to read unique information from nanometer-scale defects in 2D materials. Flaws created during crystal growth or fabrication lead to spatial variations in the bandgap of 2D materials that can be characterized through photoluminescence measurements. We show a simple setup involving an angle-adjustable transmission filter, simple opt…
