Superconducting devices are prone to reduced performance caused by impurities and defects along the edges of their wires, which can lead to local current crowding. In this study, we explored the use of helium ion irradiation to modify the lattice structure of the superconducting material to change its intrinsic properties. The process will allow us to directly pattern devices and potentially improve the quality of the nanowires. To achieve this, we used the ion beam from a scanning helium ion microscope (HIM) to localize damage on a superconducting material to create a nanowire. Two experiments were performed in this study. First, a range of helium ion doses was exposed on a niobium nitride (NbN) microwire to determine the estimated dose density to suppress superconductivity. Using the results of this first experiment, nanowires were patterned onto a microwire, and the current-voltage characteristics were measured for each sample. Our results showed that helium ion irradiation is an effective resistless fabrication method for superconducting nanowires.
We use room temperature ion beam assisted sputtering (IBAS) to deposit niobium nitride thin films. Electrical and structural characterizations were performed by electric transport and magnetization measurements at variable temperatures, X-ray diffraction and atomic force microscopy. Compared to reactive sputtering of NbN, films sputtered in presence of an ion beam show remarkable increase in the superconducting critical temperature T$_{\rm{c}}$, while exhibiting lower sensitivity to nitrogen concentration during deposition. Thickness dependence of the superconducting critical temperature is co…
We report on magnetoresistance oscillations in superconducting NbNx nanowires synthesized through ammonia gas annealing of NbSe3 precursor nanostructures. Even though the transverse dimensions of the nanowires are much larger than the superconducting coherence length, the voltage-current characteristics of these nanowires at low temperatures are reminiscent of one-dimensional superconductors where quantum phase slips are associated with the origin of dissipation. We show that both the magnetoresistance oscillations and voltage-current characteristics observed in this work result from the granu…
We present a fabrication method of superconducting quantum interference devices (SQUIDs) based on direct write lithography with an Atomic Force Microscope (AFM). This technique involves maskless local anodization of Nb or NbN ultrathin films using the voltage biased tip of the AFM. The SQUIDs are of weak-link type, for which two geometries have been tested: Dayem and variable thickness nanobridges. The magnetic field dependence of the maximum supercurrent Ic(flux) in resulting SQUIDs is thoroughly measured for different weak link geometries and for both tested materials. It is found that the m…
We have fabricated ultrafast dark count-free soft X-ray single-photon detectors (X-SNSPDs) from TaN with various conduction path widths, and we compare their properties with corresponding data from a Nb X-SNSPD. The TaN X-SNSPDs offer an improved detector performance regarding device detection efficiency, latching and pulse amplitudes. Wide conduction paths allow for a certain energy-resolving capability in contrast to narrow TaN conduction paths. However, wide paths also limit the detection efficiency at low temperatures, which can be explained within a hot-spot model.
Structure and composition tunable superconductivity, band topology and elastic response of hard binary niobium nitrides Nb$_2$N, Nb$_4$N$_3$ and Nb$_4$N$_5$
We demonstrate and characterize first superconducting nanowire single-photon detectors (SNSPDs) made from atomic layer-deposited (ALD) NbN layers. To assess the suitability of these films as a detector material, transport properties of bare films and bridges of different dimensions and thicknesses are investigated. Similar ratios of the measured critical current to the depairing current are obtained for micro-bridges made from ALD and sputtered NbN films. Furthermore, we characterized the single-photon response for 5 and 10 nm-thick nanowire detectors. A 100 nm-wide straight nanowire with a le…
We have successfully fabricated micron-scale Cu-AlO$_{x} $-Al-NbN normal metal-insulator-superconductor (NIS) tunnel junction devices, using pulsed laser deposition (PLD) for NbN film growth, and electron-beam lithography and shadow evaporation for the final device fabrication. The subgap conductance of these devices exhibit a strong temperature dependence, rendering them suitable for thermometry from $\sim$ 0.1 K all the way up to the superconducting transition temperature of the NbN layer, which was here $\sim 11$ K, but could be extended up to $\sim 16$ K in our PLD chamber. Our data fits w…
The superconducting critical temperature (Tc > 15K) of niobium titanium nitride (NbTiN) thin films allows for low-loss circuits up to 1.1 THz, enabling on-chip spectroscopy and multi-pixel imaging with advanced detectors. The drive for large scale detector microchips is demanding NbTiN films with uniform properties over an increasingly larger area. This article provides an experimental comparison between two reactive d.c. sputter systems with different target sizes: a small target (100mm diameter) and a large target (127 mm x 444.5 mm). This article focuses on maximizing the Tc of the films an…
Microwave loss in niobium metallic structures used for superconducting quantum circuits is limited by a native surface oxide layer formed over a timescale of minutes when exposed to an ambient environment. In this work, we show that nitrogen plasma treatment forms a niobium nitride layer at the metal-air interface which prevents such oxidation. X-ray photoelectron spectroscopy confirms the doping of nitrogen more than 5 nm into the surface and a suppressed oxygen presence. This passivation remains stable after aging for 15 days in an ambient environment. Cryogenic microwave characterization sh…
We present an experimental study of KIDs fabricated of atomic layer deposited TiN films, and characterized at radiation frequencies of $350$~GHz. The responsivity to radiation is measured and found to increase with increasing radiation powers, opposite to what is expected from theory and observed for hybrid niobium titanium nitride / aluminium (NbTiN/Al) and all-aluminium (all-Al) KIDs. The noise is found to be independent of the level of the radiation power. The noise equivalent power (NEP) improves with higher radiation powers, also opposite to what is observed and well understood for hybrid…
A niobium titanite nitride-based superconducting nanodevice in which the Josephson critical current can be modulated by a gate voltage - a Cooper-pair transistor - has proven a remarkably long parity lifetime exceeding one minute at temperatures close to absolute zero.
We characterize inductors fabricated from ultra-thin, approximately 100 nm wide strips of niobium (Nb) and niobium nitride (NbN). These nanowires have a large kinetic inductance in the superconducting state. The kinetic inductance scales linearly with the nanowire length, with a typical value of 1 nH/um for NbN and 44 pH/um for Nb at a temperature of 2.5 K. We measure the temperature and current dependence of the kinetic inductance and compare our results to theoretical predictions. We also simulate the self-resonant frequencies of these nanowires in a compact meander geometry. These nanowire …
We report on sub-gap transport measurements of an InAs nanowire coupled to niobium nitride leads at high magnetic fields. We observe a zero-bias anomaly (ZBA) in the differential conductance of the nanowire for certain ranges of magnetic field and chemical potential. The ZBA can oscillate in width with either magnetic field or chemical potential; it can even split and reform. We discuss how our results relate to recent predictions of hybridizing Majorana fermions in semiconducting nanowires, while considering more mundane explanations.
We present high performance fiber-coupled niobium titanium nitride superconducting nanowire single photon detectors fabricated on thermally oxidized silicon substrates. The best device showed a system detection efficiency (DE) of 74%, dark count rate of 100 c/s, and full width at half maximum timing jitter of 68 ps under a bias current of 18.0 uA with a practical Gifford-McMahon cryocooler system. We also introduced six detectors into the cryocooler and confirmed that the system DE of all detectors was higher than 67% at the dark count rate of 100 c/s.
Ionic gating is a powerful technique for tuning the physical properties of a material via electric field-induced charge doping, but is prone to introduce extrinsic disorder and undesired electrochemical modifications in the gated material beyond pure electrostatics. Conversely, reversible, volatile and electrostatic modulation is pivotal in the reliable design and operation of novel device concepts enabled by the ultrahigh induced charge densities attainable via ionic gating. Here we demonstrate a simple and effective method to achieve reversible and volatile gating of surface-sensitive ultrat…
We demonstrate niobium nitride based superconducting single-photon detectors sensitive in the spectral range 452 nm - 2300 nm. The system performance was tested in a real-life experiment with correlated photons generated by means of spontaneous parametric down conversion, where one of photon was in the visible range and the other was in the infrared range. We measured a signal to noise ratio as high as $4\times 10^4$ in our detection setting. A photon detection efficiency as high as 64% at 1550 nm and 15% at 2300 nm was observed.
We have designed, fabricated and tested a frequency-tunable high-Q superconducting resonator made from a niobium titanium nitride film. The frequency tunability is achieved by injecting a DC current through a current-directing circuit into the nonlinear inductor whose kinetic inductance is current-dependent. We have demonstrated continuous tuning of the resonance frequency in a 180 MHz frequency range around 4.5 GHz while maintaining the high internal quality factor $Q_i> 180,000$. This device may serve as a tunable filter and find applications in superconducting quantum computing and measurem…
We experimentally investigate the detection mechanism in a meandered molybdenum silicide (MoSi) superconducting nanowire single-photon detector by characterising the detection probability as a function of bias current in the wavelength range of 750 to 2050 nm. Contrary to some previous observations on niobium nitride (NbN) or tungsten silicide (WSi) detectors, we find that the energy-current relation is nonlinear in this range. Furthermore, thanks to the presence of a saturated detection efficiency over the whole range of wavelengths, we precisely quantify the shape of the curves. This allows …
Superconducting nanowire single photon detectors are capable of single-photon detection across a large spectral range, with near unity detection efficiency, picosecond timing jitter, and sub-10 $μ$m position resolution at rates as high as 10$^{9}$ counts/s. In an effort to bring this technology into nuclear physics experiments, we fabricate Niobium Nitride nanowire detectors using ion beam assisted sputtering and test their performance in strong magnetic fields. We demonstrate that these devices are capable of detection of 400 nm wavelength photons with saturated internal quantum efficiency at…
We report on critical currents and voltage noise measurements in Niobium strips in the superconducting state, in the presence of a bulk vortex lattice ($B < B_{C2}$) and in the surface superconducting state ($B_{c2}< B < B_{C3}$). For homogeneous surfaces, the correlation length of the current fluctuations can be associated with the electromagnetic skin depth of vortex superficial instabilities. The modification of the surface state by means of low energy irradiation induces a strong modification of the critical current and of the noise. The appearance of a corner frequency in the spectral dom…
We establish a testbed system for the development of high-sensitivity Electron Spin Resonance (ESR) techniques for small samples at cryogenic temperatures. Our system consists of a Niobium Nitride thin-film planar superconducting microresonator designed to have a concentrated mode volume to couple to a small amount of paramagnetic material, and to be resilient to magnetic fields of up to 400 mT. At 65 mK we measure high-cooperativity coupling ($C \approx 19$) to an organic radical microcrystal containing $10^{12}$ spins in a pico-litre volume. We detect the spin-lattice decoherence rate via th…
We present a compact current sensor based on a superconducting microwave lumped-element resonator with a nanowire kinetic inductor, operating at 4.2 K. The sensor is suitable for multiplexed readout in GHz range of large-format arrays of cryogenic detectors. The device consists of a lumped-element resonant circuit, fabricated from a single 4-nm-thick superconducting layer of niobium nitride. Thus, the fabrication and operation is significantly simplified in comparison to state-of-the-art approaches. Because the resonant circuit is inductively coupled to the feed line the current to be measured…
The temporary resistance triggered by phase slip will result in the switching of superconductor nanowire to a permanent normal state, decreasing the switching current. In this letter, we propose an improved impedance matching circuit that releases the transition triggered by phase slips to the load resistor through the RF port of a bias tee. The transportation properties with different load resistors indicate that the switching current decreases due to the reflection caused by impedance mismatching, and is maximized by optimized impedance matching. Compared to the same setup without impedance …
Quantum computers can potentially achieve an exponential speedup versus classical computers on certain computational tasks, as recently demonstrated in systems of superconducting qubits. However, these qubits have large footprints due to their large capacitor electrodes needed to suppress losses by avoiding dielectric materials. This tactic hinders scaling by increasing parasitic coupling among circuit components, degrading individual qubit addressability, and limiting the spatial density of qubits. Here, we take advantage of the unique properties of the van der Waals (vdW) materials to reduce…