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arXiv 2106.02763physics.plasm-phphysics.app-ph
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低气压热灯丝放电等离子体对正偏压辅助盘电极的响应

Response of the low pressure hot-filament discharge plasma to a positively biased auxiliary disk electrode

Mangilal Choudhary, P. K. Sreejith

摘要:

在稳态下,等离子体的损失率室壁平衡的电离率在热灯丝放电。这种损失率和电离率的平衡保持了体等离子体的准中性。本文研究了低压氦等离子体中存在辅助偏置金属盘时体块等离子体的性质。一个单一的朗缪尔探针和发射探针被用来表征等离子体的各种偏见(正和负)的金属盘,这是沿着放电轴内的等离子体放置。据观察,只有一个积极的偏置磁盘增加等离子体电位,电子温度和等离子体密度。此外,等离子体参数保持不变时,磁盘是负偏置。对两种不同尺寸的正金属圆盘的实验结果与已有的理论模型进行了比较,发现在给定的放电条件下,等离子体密度随圆盘偏压的变化呈现相反的规律。讨论了初级高能电子布居数在确定等离子体参数中的作用。这些实验结果定性解释的基础上产生的静电约束由于电子的损失偏置的金属盘电极。

英文摘要:

In steady-state, the plasma loss rate to the chamber wall is balanced by the ionization rate in the hot-filament discharges. This balance in the loss rate and ionization rate maintains the quasi--neutrality of the bulk plasma. In this report, we have studied the properties of bulk plasma in the presence of an auxiliary (additional) biased metal disk, which is working as a sink, in low-pressure helium plasma. A single Langmuir probe and emissive probe are used to characterize the plasma for various biases (positive and negative) to the metal disk, which was placed along the discharge axis inside the plasma. It is observed that only a positively biased disk increases the plasma potential, electron temperature, and plasma density. Moreover, the plasma parameters remain unaltered when the disk is negatively biased. The observed results for two different-sized positively metal disks are compared with an available theoretical model and found an opposite behavior of plasma density variation with the disk bias voltages at given discharge condition. The role of the primary energetic electron population in determining the plasma parameters is discussed. These experimental results are qualitatively explained on the basis of electrostatic confinement arising due to the loss of electrons to a biased metal disk electrode.

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