It is well known that additional ionization in the vicinity of a positively biased electrode immersed into a weakly ionized plasma is responsible for a hysteresis in the electrode current-voltage characteristics and the current self-oscillations rise. Here we show both experimentally and theoretically that under certain conditions these phenomena cannot be correctly interpreted once considered separately from the reference electrode current-voltage characteristics. It is shown that small electrodes can be separated into three groups according to the relation between the electrode and the reference electrode areas. Each group is characterized by its own dependence of the collected current on the bias voltage.
Biased electrodes are common components of plasma sources and diagnostics. The plasma-electrode interaction is mediated by an intervening sheath structure that influences properties of the electrons and ions contacting the electrode surface, as well as how the electrode influences properties of the bulk plasma. A rich variety of sheath structures have been observed, including ion sheaths, electron sheaths, double sheaths, double layers, anode glow, and fireballs. These represent complex self-organized responses of the plasma that depend not only on the local influence of the electrode, but als…
Dependencies of levitation position of positively charged fine-particles on plasma parameters are investigated. The charges on the particles become positive in a cross-field sheath between magnetized double plasmas with different potentials separated vertically by horizontal magnetic field, because ion current flowing from a lower high-potential plasma surpasses electron current coming across the magnetic field from an upper low-potential plasma. From measurement of the resonance frequency of the particles driven by external oscillating electric field, the charge on particle is estimated to be…
It is well known that oscillations at the electron plasma frequency may appear due to instability of the plasma sheath near a positively biased electrode immersed in plasma. This instability is caused by transit-time effects when electrons, collected by this electrode, pass through the sheath. Such oscillations appear as low-power short spikes due to additional ionization of a neutral gas in the electrode vicinity. Herein we present first results obtained when the additional ionization was eliminated. We succeeded to prolong the oscillations during the whole time a positive bias was applied to…
The form of a sheath near a small electrode, with bias changing from below to above the plasma potential is studied using 2D particle-in-cell (PIC) simulations. Five cases are studied: (A) an electrode biased more than the electron temperature ($T_e/e$) below the plasma potential, (B) an electrode biased less than $T_e/2e$ below the plasma potential, (C) an electrode biased nearly at the plasma potential, (D) an electrode biased more than $T_i/2e$ but less than $T_e/2e$ above the plasma potential, and (E) an electrode biased much greater than $T_e/2e$ above the plasma potential. In case (A), t…
Equilibrating gravitation by electric forces, microparticles can be confined in the plasma sheath above suitably biased local electrodes.Their position depends on the detailed structure of the plasma sheath and on the charge that the particles acquire in the surrounding plasma, that is by the electron and ion currents towards it. Bias switching experiments reveal how the charge and equilibrium position of the microparticle change upon altered sheath conditions. We observe similar particle behaviors also in the afterglow of the discharge for a persisting bias voltage on the electrode: damped os…
Experiments are performed in which dust particles are levitated at varying heights above the powered electrode in a RF plasma discharge by changing the discharge power. The trajectories of particles dropped from the top of the discharge chamber are used to reconstruct the vertical electric force acting on the particles. The resulting data, together with the results from a selfconsistent fluid model, are used to determine the lower levitation limit for dust particles in the discharge and the approximate height above the lower electrode where quasineutrality is attained, locating the sheath edge…
Space resolved concentrations of helium He metastable atoms in an atmospheric pressure radio-frequency micro-plasma jet were measured using tunable diode laser absorption spectroscopy. The spatial profile of metastable atoms in the volume between the electrodes was deduced for various electrode gap distances. Density profiles reveal the sheath structure and reflect the plasma excitation distribution, as well as the dominance of the alpha-mode discharge. Gap width variations show the transition from a normal glow plasma to a pure sheath discharge. In order to analyze and verify the experimental…
The benefits of thermionic emission from negatively biased electrodes for perpendicular electric field control in a magnetized plasma are examined through its combined effects on the sheath and on the plasma potential variation along magnetic field lines. By increasing the radial current flowing through the plasma thermionic emission is confirmed to improve control over the plasma potential at the sheath edge compared to the case of a cold electrode. Conversely, thermionic emission is shown to be responsible for an increase of the plasma potential drop along magnetic field lines in the quasi-n…
The inhomogeneity of the plasma pressure near a conducting electrode is a cause for introducing the surface tension associated with the plasma-electrode interface. We evaluate the dependence of the surface tension on the density of the charged dust immersed in the plasma sheath. In a wide range of parameters, the surface tension turns out to be an increasing function of the dust density.
We numerically investigate the dust charging in the sheath, by using the usual fluid approximation, it is extended to include self consistently the dust charge variation. The grain charge becomes a new self consistent dynamic variable, it is found that dust grains are first charged negatively at the sheath edge and then begin to be charged positively in the sheath. The numerical results show that the initial velocity of dust charged grains, sized grains and the density ratio of ion to electron at the sheath edge have affected the neutral point of dust charge. Moreover, the neutral point of dus…
We investigate the electron heating dynamics in electropositive argon and helium capacitively coupled RF discharges driven at 13.56 MHz by Particle in Cell simulations and by an analytical model. The model allows to calculate the electric field outside the electrode sheaths, space and time resolved within the RF period. Electrons are found to be heated by strong ambipolar electric fields outside the sheath during the phase of sheath expansion in addition to classical sheath expansion heating. By tracing individual electrons we also show that ionization is primarily caused by electrons that col…
A two-dimensional dust crystal levitated in the sheath of a modified Gaseous Electronics Conference (GEC) reference cell is manipulated by heating or cooling the lower electrode. The dust charge is obtained by measuring global characteristics of the levitated crystal obtained from top-view pictures. From the force balance, the electric field in the sheath is reconstructed. From the Bohm criterion, we conclude that the dust crystal is levitated mainly above and just below the classical Bohm point.
Electrical characterization of a nonthermal radio-frequency atmospheric-pressure microplasma in a parallel plate configuration has shown that reducing electrode gap into the submillimeter range increases current and power density at a reduced voltage as compared to similar plasmas at larger electrode gaps which have no gap dependence. Calculation of sheath thickness and electric fields in the sheath and in the bulk demonstrate a dependence on the electrode gap as it is reduced into the submillimeter regime, indicating a distinct regime of operation.
This paper proposes a model that expands Godyak's collisional sheath model to the case of hot electrodes (anode or cathode) with thermionic electron emission. In the model, the electrodes are assumed to be made from refractory metals and, consequently, the erosion of the electrodes is small and can be neglected. In the frame of two temperature thermal plasma modeling, this model allows self-consistent calculation of the sheath potential drop, the Schottky correction factor for the work function of the wall material, the thermionic electron current density, and the heat fluxes of the charged pa…
Plasma sheath is the non-neutral space charge region that isolates bulk plasma from boundary. Radio-frequency (RF) sheathes are formed when applying RF voltage to electrodes. Generally, applied bias is mainly consumed by RF sheath which shields external field. Here we report first evidence that intense boundary emission destroys normal RF sheath and establishes a novel type of RF plasma where external bias is consumed by bulk plasma instead of sheath. Ions are naturally confined while plasma electrons are unobstructed, generating strong RF current in entire plasma, combined with unique particl…
A particle-in-cell (PIC) simulation study is performed to investigate the discharge asymmetry, higher harmonic generations and electron heating mechanism in a low pressure very high frequency capacitively coupled plasma (CCP) excited by a saw-tooth like current waveform. Two current densities, 50 A/m2 and 100 A/m2 are chosen for a constant gas pressure of 5 mTorr in argon plasma. The driving frequency is varied from 13.56 MHz to 54.24 MHz. At a lower driving frequency, high frequency modulations on the instantaneous sheath edge position at the grounded electrode are observed. These high freque…
This paper, Part I of a series, describes a kinematic framework for the theory of a Dense Plasma Focus which is very similar to the GV model in spirit but which differs in its scope in four respects. First, the GV model derives most of its results from the mathematical properties of the solution of a certain partial differential equation derived from assumptions that apparently represent conservation of momentum but are not a rigorous application of the relevant physics. The present model is based on the scaling properties of the standard equations of motion, which lead to mathematical results…
The electron sheath is a particular electron-rich sheath with negative net charges where plasma potential is lower than the biased electrode. Here an improved understanding of electron sheath theory is provided using both fluid and kinetic approaches while elaborating on its implications for plasma-surface interaction. A fluid model is first proposed considering the electron presheath structure, avoiding the singularity in electron sheath Child-Langmuir law. The latter is proved to underestimate the sheath potential. Subsequently, the kinetic model of electron sheath is established, showing co…
By combining the results from a self-consistent 2D dusty plasma fluid model and a 3D N-body code, the equilibrium position and crystal structure were determined for dust particles levitated in the sheath in a modified Gaseous Electronics Conference (GEC) reference cell, in which the lower electrode was heated or cooled. The Debye length, charge and electric field were reconstructed on a sub-millimeter scale by applying a previously developed, independent method. However, this method seems to overestimate the charge, and hence underestimate the electric field. Even corrected for this fact, the …
Wakefield oscillations created by the ion wakefield existing below a dust particle within the plasma sheath generated above a powered lower electrode in a GEC rf reference cell carry information about the plasma sheath, the dust particle charge and the speed of the streaming ions. An experimental method to investigate such wakefield oscillations is discussed.
An rf coaxial capacitively coupled Ar/Cl2 plasma is applied to processing the inner wall of superconducting radio frequency cavities. A dc self-bias potential is established across the inner electrode sheath due to the surface area difference between inner and outer electrodes of the coaxial plasma. The self-bias potential measurement is used as an indication of the plasma sheath voltage asymmetry. The understanding of the asymmetry in sheath voltage distribution in coaxial plasma is important for the modification of the inner surfaces of three dimensional objects. The plasma sheath voltages w…
When electrodes are biased above the plasma potential, electrons accelerated through the associated electron sheath can dramatically increase the ionization rate of neutrals near the electrode surface. It has previously been observed that if the ionization rate is great enough, a double layer separates a luminous high-potential plasma attached to the electrode surface (called an anode spot or fireball) from the bulk plasma. Here, results of the first 2D particle-in-cell simulations of anode spot formation are presented along with a theoretical model describing the formation process. It is foun…
The potential difference between a floating emitting surface and the plasma surrounding it has been described by several sheath models, including the space-charge-limited sheath, the electron sheath with high emission current, and the inverse sheath produced by charge-exchange ion trapping. Our measurements reveal that each of these models has its own regime of validity. We determine the potential of an emissive filament relative to the plasma potential, emphasizing variations in emitted current density and neutral particle density. The potential of a filament in a diffuse plasma is first show…
The effect of changing the driving frequency on the plasma density and the electron dynamics in a capacitive radio-frequency argon plasma operated at low pressures of a few Pa is investigated by Particle in Cell/Monte Carlo Collisions simulations and analytical modeling. In contrast to previous assumptions the plasma density does not follow a quadratic dependence on the driving frequency in this non-local collisionless regime. Instead, a step-like increase at a distinct driving frequency is observed. Based on the analytical power balance model, in combination with a detailed analysis of the el…
Two in-situ experimental methods are presented in which dust particles are used to determine the extent of the sheath and gain information about the time-averaged electric force profile within a RF plasma sheath. These methods are advantageous because they are not only simple and quick to carry out, but they also can be performed using standard dusty plasma experimental equipment. In the first method, dust particles are tracked as they fall through the plasma toward the lower electrode. These trajectories are then used to determine the electric force on the particle as a function of height as …
Electron sheaths form near the surface of objects biased more positive than the plasma potential, such as in the electron saturation region of a Langmuir probe trace. Generally, the formation of electron sheaths requires that the electron-collecting area be sufficiently smaller ($\sqrt{2.3m_e/M}$ times) than the ion-collecting area. They are commonly thought to be local phenomena that collect the random thermal electron current, but do not otherwise perturb a plasma. Here, using experiments on an electrode embedded in a wall, particle-in-cell simulations and theory, it is shown that under low …
It is widely assumed that thermionic current flow through a plasma is limited by a "space-charge limited" (SCL) cathode sheath that consumes the hot cathode's negative bias and accelerates upstream ions into the cathode. Here, we formulate a fundamentally different current-limited mode. In the "inverse" mode, the potentials of both electrodes are above the plasma potential, so that the plasma ions are confined. The bias is consumed by the anode sheath. There is no potential gradient in the neutral plasma region from resistivity or presheath. The inverse cathode sheath pulls some thermoelectron…
In this work, we examine sheath formation in the presence of bias potentials in the current saturation regime for pulsed power fusion experiments. It is important to understand how the particle and heat fluxes at the wall may impact the wall material and affect electrode degradation. Simulations are performed using the 1X-1V Boltzmann-Poisson system for a proton-electron plasma in the presence of bias potentials ranging from 0 to 10 kV. The results indicate that the sheath near the high potential wall remains generally the same as that of a classical sheath without the presence of a bias poten…
A Computationally Assisted Spectroscopic Technique to measure secondary electron emission coefficients ($γ$-CAST) in capacitively-coupled radio-frequency plasmas is proposed. This non-intrusive, sensitive diagnostic is based on a combination of Phase Resolved Optical Emission Spectroscopy and particle-based kinetic simulations. In such plasmas (under most conditions in electropositive gases) the spatio-temporally resolved electron-impact excitation/ionization rate features two distinct maxima adjacent to each electrode at different times within each RF period. While one maximum is the conseque…
We address an experimental observation of shear flow of micron sized dust particles in a strongly coupled complex plasma in presence of a homogeneous magnetic field. Two concentric Aluminum rings of different size are placed on the lower electrode of a radio frequency (rf) parallel plate discharge. The modified local sheath electric field is pointing outward/inward close to the inner/outher ring, respectively. The microparticles, confined by the rings and subject to an ion wind that driven by the local sheath electric field and deflected by an externally applied magnetic field, start flowing i…
We report the existence of an enhanced operating regime for a high-frequency, low-pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic field applied parallel to the electrodes. Our PIC-MCC simulations show that the plasma density and ion flux values exhibit a sharp peak when the electron cyclotron frequency equals half of the applied RF frequency. The physical mechanism responsible for this behaviour is traced to a synchronization between the oscillatory motion of the electrode sheath edge and the motion of a set of electrons reflected by this sheath. These e…
The control of the spatial distribution of micrometer-sized dust particles in capacitively coupled radio frequency discharges is relevant for research and applications. Typically, dust particles in plasmas form a layer located at the sheath edge adjacent to the bottom electrode. Here, a method of manipulating this distribution by the application of a specific excitation waveform, i.e. two consecutive harmonics, is discussed. Tuning the phase angle θbetween the two harmonics allows to adjust the discharge symmetry via the Electrical Asymmetry Effect (EAE). An adiabatic (continuous) phase shift …
In steady-state, the plasma loss rate to the chamber wall is balanced by the ionization rate in the hot-filament discharges. This balance in the loss rate and ionization rate maintains the quasi--neutrality of the bulk plasma. In this report, we have studied the properties of bulk plasma in the presence of an auxiliary (additional) biased metal disk, which is working as a sink, in low-pressure helium plasma. A single Langmuir probe and emissive probe are used to characterize the plasma for various biases (positive and negative) to the metal disk, which was placed along the discharge axis insid…
Spherical, micrometer-sized particles within a Coulomb crystal levitated in the sheath above the powered lower electrode in a GEC reference cell are perturbed using a Zyvex S100 Nanomanipulator. Using the S100, a vertical probe is positioned within the cell at various locations with respect to the crystal formed within the sheath. As the probe is lowered toward the horizontal plane of the dust layer, a circular cavity opens in the center of the crystal and expands. To explore the minimally perturbative state, the probe is lifted to the position that closes this cavity, the probe potential is o…
A two-dimensional dust crystal levitated in the sheath of a modified Gaseous Electronics Conference (GEC) reference cell is manipulated by heating or cooling the lower electrode. The dust charge is obtained from top-view pictures of the crystal using a previously developed analytical model. By assuming a simple force balance, and measuring the radial confining force, the vertical electric field profile in the sheath is reconstructed. The dust crystal is shown to levitate on the plasma side of the Bohm point. Finally, it is shown that the ion drag plays an important role in the vertical force b…
The reduction of the asymmetry in the plasma sheath voltages of a cylindrical coaxial capacitively coupled plasma is crucial for efficient surface modification of the inner surfaces of concave three-dimensional structures, including superconducting radio frequency cavities. One critical asymmetry effect is the negative dc self-bias, formed across the inner electrode plasma sheath due to its lower surface area compared to the outer electrode. The effect on the self-bias potential with the surface enhancement by geometric modification on the inner electrode structure is studied. The shapes of th…
Dust particles often form vertical chains due to the influence of the wakefield produced by the streaming ions in the plasma sheath. These particle chains are proving useful as a unique diagnostic tool for investigating the physics behind the basic properties of the ion wakefield within the plasma sheath. In this paper, an experimental method is presented for investigating the ion wakefield which employs a new oscillation technique designed to perturb a two-particle vertical chain. Using this technique, damped free fall oscillations are generated via an external DC bias to the lower electrode.…
Two-dimensional capacitively coupled radio frequency discharge in methane is simulated by PIC-MCC method. The results were obtained in pressure range 50-300 mTorr and voltage range 40-180 V for discharge frequency 13.56 MHz. The electron energy and electron--methane reaction rates spatial distributions show existence of two regimes of discharge glow: a) with active sheaths, when electrons are hot in electrode sheaths and cold in the middle of discharge so the electron-neutral reactions strongly dominate in sheaths regions; b) with volume domination, when the electron energy is more uniform and…
The dynamics of temporally modulated plasma boundary sheaths is studied in the intermediate radio frequency regime where the applied radio frequency and the ion plasma frequency are comparable. Two kinetic simulation codes are employed and their results are compared. The first code is a realization of the well-known scheme, Particle-In-Cell with Monte Carlo collisions (PIC/MCC) and simulates the entire discharge, a planar radio frequency capacitively coupled plasma (RF-CCP) with an additional heating source. The second code is based on the recently published scheme Ensemble-in-Spacetime (EST);…
The effect of the conducting electrode on the interaction of dust grains in a an ion flow is discussed. It is shown that two grains levitating above the electrode at the same height may attract one another. This results in the instability of a dust layer in a plasma sheath.
A model is proposed to explain hysteresis observed in fireball formation and extinction as electrode bias is varied in partially ionized plasmas. Formation is predicted after a sufficiently deep potential well is established in the electron sheath of the electrode. Under the experimental conditions considered, once the fireball forms the plasma potential rapidly increases, resulting in electrons being only lost to the electrode.Previous predictions suggest that once formed the fireball double layer must maintain a potential close to the ionization potential of the neutral gas to remain in a st…
Bounded plasmas are characterized by a rapid but smooth transition from quasi-neutrality in the volume to electron depletion close to the electrodes and chamber walls. The thin non-neutral region, the boundary sheath, comprises only a small fraction of the discharge domain but controls much of its macroscopic behavior. Insights into the properties of the sheath and its relation to the plasma are of high practical and theoretical interest. The recently proposed smooth step model provides a closed analytical expression for the electric field in a planar, radio-frequency modulated sheath. It repr…
The effect of a magnetic field on the characteristics of capacitively coupled radio frequency discharges is investigated and found to be substantial. A one-dimensional particle-in-cell simulation shows that geometrically symmetric discharges can be asymmetrized by applying a spatially inhomogeneous magnetic field. This effect is similar to the recently discovered electrical asymmetry effect. Both effects act independently, they can work in the same direction or compensate each other. Also the ion energy distribution functions at the electrodes are strongly affected by the magnetic field, altho…
Collisionless Bulk Electron Heating in Resonant Low-Voltage Capacitively Coupled Plasmas
Institute for Plasma Research（等离子体研究所）；Homi Bhabha National Institute（霍米·巴巴国立研究所）；Princeton Plasma Physics Laboratory（普林斯顿等离子体物理实验室）；Department of Physics, Indian Institute of Science（印度科学学院物理系）；School of Physical Sciences, UM-DAE Centre for Excellence in Basic Sciences, University of Mumbai（孟买大学基础科学卓越中心物理科学学院）
In atmospheric pressure capacitively coupled microplasma jets, Voltage Waveform Tailoring (VWT) was demonstrated to provide ultimate control of the Electron Energy Distribution Function (EEDF), which allows to enhance and adjust the generation of selected neutral species by controlling the electron power absorption dynamics. However, at the fundamental level, the physical origin of these effects of VWT remained unclear. Therefore, in this work, the electron power absorption dynamics is investigated in a He/N$_2$ jet with a nitrogen concentration of 0.05\% driven by a valleys waveform at a base…
We performed self-consistent modeling of the atmospheric-pressure plasmas produced by arc discharges. Special numerical procedure for coupling of the plasma current, emission current, ion current, sheath voltage drop, heat fluxes at plasma-electrode interfaces was developed and implemented into the ANSYS CFX code. Validation of the simulation results is performed through comparison of simulation results with the previously available experimental data obtained by a range of various plasma diagnostics.
We investigate the energy and angular distributions of the ions reaching the electrodes in low-pressure, capacitively coupled oxygen radio-frequency discharges. These distributions, as well as the possibilities of the independent control of the ion flux and the ion energy are analysed for different types of excitation: single- and classical dual-frequency, as well as valleys- and sawtooth-type waveforms. The studies are based on kinetic, particle-based simulations that reveal the physics of these discharges in great details. The conditions cover weakly collisional to highly collisional domains…
The most fundamental response of an ionized gas to a macroscopic object is the formation of the plasma sheath. It is an electron depleted space charge region, adjacent to the object, which screens the object's negative charge arising from the accumulation of electrons from the plasma. The plasma sheath is thus the positively charged part of an electric double layer whose negatively charged part is inside the wall. In the course of the Transregional Collaborative Research Center SFB/TRR24 we investigated, from a microscopic point of view, the elementary charge transfer processes responsible for…
The influence of charge trap states in the dielectric boundary material on capacitively coupled radio frequency plasma discharge is investigated with theory and Particle in cell/Monte Carlo Collision simulation. It is found that the trap states of the wall material manipulated discharge properties mainly through the varying ion induced secondary electron emission (SEE) coefficient in response to dynamic surface charges accumulated within solid boundary. A comprehensive SEE model considering surface charging is established first, which incorporates the valence band electron distribution, electr…
The results of an analysis of the physics of levitation of negatively charged dust particles over a surface (wall) in an inverse sheath are reported. It is shown that under suitable parameter regime, the ion-drag force may balance the combined electrostatic and gravitational force on the dust particles owing to its hollow profile as one moves away from the surface. Our analysis shows that the parameter regimes in which such a situation may result is realizable in laboratory and space plasma environments, particularly the near-surface dayside lunar plasma. The lunar surface and dust grains are …
