鞘层或体主导射频微等离子体射流中氦亚稳态的空间动力学
Spatial dynamics of helium metastables in sheath or bulk dominated rf micro-plasma jets
摘要：
利用可调谐半导体激光吸收光谱技术测量了大气压射频微等离子体射流中氦-氦亚稳原子的空间分辨浓度。推导了不同电极间距下亚稳原子在电极间体积中的空间分布。密度分布揭示了鞘层结构，并反映了等离子体激发分布，以及α模式放电的主导地位。间隙宽度的变化表明，从正常的辉光等离子体的纯鞘放电的过渡。为了分析和验证亚稳原子的实验观测轮廓，建立了二维模拟模型。应用一个适当的He/N2/O2化学模型之间的关联的亚稳配置文件和潜在的激发机制得到。
英文摘要：
Space resolved concentrations of helium He metastable atoms in an atmospheric pressure radio-frequency micro-plasma jet were measured using tunable diode laser absorption spectroscopy. The spatial profile of metastable atoms in the volume between the electrodes was deduced for various electrode gap distances. Density profiles reveal the sheath structure and reflect the plasma excitation distribution, as well as the dominance of the alpha-mode discharge. Gap width variations show the transition from a normal glow plasma to a pure sheath discharge. In order to analyze and verify the experimentally observed profiles of the metastable atoms a 2-dimensional simulation model was set up. Applying an appropriate He/N2/O2 chemistry model the correlation between the metastable profiles and the underlying excitation mechanisms was obtained.
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