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arXiv 2008.09640physics.plasm-ph
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使用与等离子体接触和不接触的供电电极的DBD等离子体射流的特性

Properties of DBD Plasma Jets using Powered Electrode With and Without Contact with the Plasma

Fellype do Nascimento, Konstantin Kostov, Munemasa Machida, Alexander Flacker

摘要:

在这项工作中的实验研究比较的等离子体射流在介质阻挡放电(DBD)的配置,使用供电电极和不使用介质阻挡,同时保持第二介质阻挡接地电极,在这项工作中报告。为此,使用两个不同的电源来产生等离子体射流,其中一个产生脉冲高压(HV)输出,另一个产生脉冲状HV输出,其由阻尼正弦HV波形组成。等离子体参数的测量进行了两种配置使用氩气和氦气作为工作气体。结果,如果使用脉冲功率源,则当从一种配置切换到另一种配置时,发现放电功率($P_{plasma}$)、旋转和振动温度(分别为$T_r$和$T_v$)存在显著差异。另一方面,当切换电极配置时,使用脉冲状HV时,仅$P_{plasma}$参数呈现显著差异。对于脉冲源,已经观察到,尽管当从双势垒配置改变为单势垒配置时,$P_{plasma}$显著增加,但是对于$T_r$和$T_v$获得的值也增加,但是与$P_{plasma}$的增加不是相同的比例,这表明等离子体射流中的温度和放电功率之间的非线性依赖性。作为在两种配置中应用等离子体的示例,进行了尝试去除沉积在氧化铝基板上的铜膜的测试,结果,仅当通电电极与等离子体接触时才有显著的材料去除。作为一般结论,如果某些应用确实需要更高的功率,则最好使用此配置。

英文摘要:

An experimental investigation comparing the properties of plasma jets in dielectric barrier discharge (DBD) configurations using a powered electrode with and without a dielectric barrier, while keeping a second dielectric barrier over the grounded electrode, is reported in this work. For this purpose, two different power sources were used to produce the plasma jets, with one of them producing a pulsed high-voltage (HV) output and the other one producing a pulse-like HV output, which consists of a damped sine HV waveform. Measurements of plasma parameters were performed for both configurations using argon and helium as working gases. As a result, if the pulsed power source is used, significant differences were found in discharge power ($P_{plasma}$), rotational and vibrational temperatures ($T_r$ and $T_v$, respectively) when switching from one configuration to the other. On the other hand, using the pulse-like HV only the $P_{plasma}$ parameter presented significant differences when switching the electrode's configuration. For the pulsed source it has been observed that despite the remarkable increase in $P_{plasma}$ when changing from the double barrier configuration to the single barrier one, the values obtained for $T_r$ and $T_v$ also increased, but not in the same proportion as the increase in $P_{plasma}$, which suggests a non-linear dependency between temperatures and discharge power in the plasma jet. As an example for application of plasmas in both configurations, tests in an attempt to remove copper films deposited on alumina substrates were performed and, as a result, there was significant material removal only when the powered electrode was in contact with the plasma. As a general conclusion, if higher power is really required for some application it is better to use this configuration.

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