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arXiv 2103.15786physics.opticsphysics.app-ph
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片上掺铒钛酸锂波导放大器

On-chip erbium-doped lithium niobate waveguide amplifiers

Qiang Luo, Chen Yang, Zhenzhong Hao, Ru Zhang, Dahuai Zheng, Fang Bo, Yongfa Kong, Guoquan Zhang, Jingjun Xu

摘要:

绝缘体上叠层锂(LNOI)作为一种新兴的、有前途的光集成平台,面临着片上有源器件(包括激光器和放大器)的不足。本文报道了基于电子束光刻和电感耦合等离子体反应离子刻蚀的片上掺铒低噪声光波导放大器的制作。在974 nm连续激光泵浦下,在通信波段获得了约30 dB/cm的净内增益。该工作为开发新型的低噪声光学有源器件提供了理论基础,将对低噪声光学集成光子学的发展起到积极的推动作用。

英文摘要:

Lithium niobate on insulator (LNOI), as an emerging and promising optical integration platform, faces shortages of on-chip active devices including lasers and amplifiers. Here, we report the fabrication on-chip erbium-doped LNOI waveguide amplifiers based on electron beam lithography and inductively coupled plasma reactive ion etching. A net internal gain of ~30 dB/cm in communication band was achieved in the fabricated waveguide amplifiers under the pump of a 974-nm continuous laser. This work develops new active devices on LNOI and will promote the development of LNOI integrated photonics.

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