Lithium niobate on insulator (LNOI), regarded as an important candidate platform for optical integration due to its excellent nonlinear, electro-optic and other physical properties, has become a research hotspot. Light source, as an essential component for integrated optical system, is urgently needed. In this paper, we reported the realization of 1550-nm band on-chip LNOI microlasers based on erbium-doped LNOI ring cavities with loaded quality factors higher than one million, which were fabricated by using electron beam lithography and inductively coupled plasma reactive ion etching processes. These microlasers demonstrated a low pump threshold of ~20 μW and stable performance under the pump of a 980-nm band continuous laser. Comb-like laser spectra spanning from 1510 nm to 1580 nm were observed in high pump power regime, which lays the foundation of the realization of pulsed laser and frequency combs on rare-earth ion doped LNOI platform. This work has effectively promoted the development of on-chip integrated active LNOI devices.
The lithium niobate integrated photonic platform has recently shown great promise in nonlinear optics on a chip scale. Here, we report second-harmonic generation in a high-Q lithium niobate microring resonator through modal phase matching, with a conversion efficiency of 1,500% W$^{-1}$. Our device also allows us to observe difference-frequency generation in the telecom band. Our work demonstrates the great potential of the lithium niobate integrated platform for nonlinear wavelength conversion with high efficiencies.
Erbium-doped lithium niobate high-Q microdisk cavities were fabricated in batches by UV exposure, inductively coupled plasma reactive ion etching and chemo-mechanical polishing. The stimulated emission at 1531.6 nm was observed under the pump of a narrow-band laser working at 974 nm in erbium-doped lithium niobate microdisk cavity with threshold down to 400 μW and a conversion efficiency of 3.1{\times}10^{-4} %, laying the foundation for the LNOI integrated light source research.
We demonstrate ultra-high Q factor microring resonators close to the intrinsic material absorption limit on lithium niobate on insulator. The microrings are fabricated on pristine lithium niobate (LN) thin film wafer thinned from LN bulk via chemo-mechanical etching without ion slicing and ion etching. A record-high Q factor up to times ten to the power of 8th at the wavelength of 1550 nm is achieved because of the ultra-smooth interface of the microrings and the absence of ion induced lattice damage, indicating an ultra-low waveguide propagation loss of about 0.28 dB per meter. The ultra-high…
Integrated optical amplifiers and light sources are of great significance for photonic integrated circuits (PICs) and have attracted many research interests. Doping rare-earth ions in materials as a solution to realize efficient optical amplifiers and lasing has been investigated a lot. We investigate the erbium-doped lithium niobate on insulator (LNOI). Here, spiral waveguide amplifiers were fabricated on a 1-mol\% erbium-doped LNOI by CMOS-compatible technique. We demonstrated a maximum internal net gain of 8.3 dB at 1530 nm indicating a net gain per unit length of 15.6 dB/cm with a compact …
The commercialization of lithium niobate on insulator (LNOI) wafer has sparked significant on-chip photonic integration application due to its remarkable photonic, photoacoustic, electro-optic and piezoelectric nature. A variety of on-chip LNOI-based optical devices with high performance has been realized in recent years. Here we developed 1 mol\% erbium-doped LN crystal and its LNOI wafer, and fabricated an erbium-doped LNOI microdisk with high quality ($ \sim $ 1.05$\times 10^{^5}$ ). C-band laser emission with $ \sim $1530 nm and $ \sim $1560 nm from the high-Q erbium-doped LNOI microdisk w…
We demonstrate monolithic integration of an electro-optically (EO) tunable microring laser on lithium niobate on insulator (LNOI) platform. The device is fabricated by photolithography assisted chemo-mechanical etching (PLACE), and the pump laser is evanescently coupled into the erbium (Er3+) doped LN microring laser using an undoped LN waveguide mounted above the microring. The quality factor of the LN microring resonator is measured as high as 1.54x10^5 at the wavelength of 1542 nm. Lasing action can be observed at a pump power threshold below 3.5 mW using a 980 nm continuous-wave pump laser…
Lithium niobate on insulator (LNOI) is an emerging photonic platform with great promises for future optical communications, nonlinear optics and microwave photonics. An important integrated photonic building block, active waveguide amplifiers, however, is still missing in the LNOI platform. Here we report an efficient and compact waveguide amplifier based on erbium-doped LNOI waveguides, realized by a sequence of erbium-doped crystal growth, ion slicing and lithography-based waveguide fabrication. Using a compact 5-mm-long waveguide, we demonstrate on-chip net gain of > 5 dB for 1530-nm signal…
Lithium niobate on insulator (LNOI), as an emerging and promising optical integration platform, faces shortages of on-chip active devices including lasers and amplifiers. Here, we report the fabrication on-chip erbium-doped LNOI waveguide amplifiers based on electron beam lithography and inductively coupled plasma reactive ion etching. A net internal gain of ~30 dB/cm in communication band was achieved in the fabricated waveguide amplifiers under the pump of a 974-nm continuous laser. This work develops new active devices on LNOI and will promote the development of LNOI integrated photonics.
We overcome the difficulty in realizing a monolithic waveguide-coupled microring laser integrated on erbium-doped thin film lithium niobate (Er: TFLN) using photolithography assisted chemo-mechanical etching (PLACE) technique. We demonstrate an integrated single-frequency microring laser operating around 1531 nm wavelength. The PLACE technique, enabling integrated Er: TFLN photonics with low propagation loss, can thus be used to realize low cost mass production of monolithic on-chip microlasers with applications ranging from optical communication and photonic integrated circuit (PIC) to precis…
We demonstrate on-chip light amplification with integrated optical waveguide fabricated on erbium-doped thin film lithium niobate on insulator (TFLNOI) using the photolithography assisted chemo-mechanical etching (PLACE) technique. A maximum internal net gain of 18 dB in the small-signal-gain regime is measured at the peak emission wavelength of 1530 nm for a waveguide length of 3.6 cm, indicating a differential gain per unit length of 5 dB/cm. This work paves the way to the monolithic integration of diverse active and passive photonic components on the TFLNOI platform.
Erbium-doped lithium niobate on insulator (Er:LNOI) has attracted enormous interest as it provides gain and enables integrated amplifiers and lasers on the lithium niobate on insulator (LNOI) platform. We demonstrate a highly efficient waveguide amplifier on Er:LNOI. The 2.58-cm long amplifier can achieve 27.94 dB signal enhancement, 16.0 dB internal net gain (6.20 dB/cm), -8.84 dBm saturation power, 4.59 dB/mW power conversion efficiency, and 4.49 dB noise figure at 1531.6 nm. Besides, thorough investigation on the pumping wavelength, pumping scheme, output power and noise figure have been pe…
Erbium doped integrated waveguide amplifier and laser prevail in power consumption, footprint, stability and scalability over the counterparts in bulk materials, underpinning the lightwave communication and large-scale sensing. Subject to the highly confined mode and moderate propagation loss, gain and power scaling in such integrated micro-to-nanoscale devices prove to be more challenging compared to their bulk counterparts. In this work, stimulated by the prevalent success of double-cladding optical fiber in high-gain/power operation, a Ta2O5 cladding is employed in the erbium doped lithium …
As an active material with favorable linear and nonlinear optical properties, thin-film lithium niobate has demonstrated its potential in integrated photonics. Integration with rare-earth ions, which are promising candidates for quantum memories and transducers, will enrich the system with new applications in quantum information processing. Here, we investigate the optical properties at 1.5 micron wavelengths of rare-earth ions (Er$^{3+}$) implanted in thin-film lithium niobate waveguides and micro-ring resonators. Optical quality factors near a million after post annealing show that ion impla…
We demonstrate an ultralow loss monolithic integrated lithium niobate photonic platform consisting of dry-etched subwavelength waveguides. We show microring resonators with a quality factor of 10$^7$ and waveguides with propagation loss as low as 2.7 dB/m.
Thin-film lithium niobate is an attractive integrated photonics platform due to its low optical loss and favorable optical nonlinear and electro-optic properties. However, in applications such as second harmonic generation, frequency comb generation, and microwave-to-optics conversion, the device performance is strongly impeded by the photorefractive effect inherent in thin-films. In this paper, we show that the dielectric cladding on lithium niobate microring resonator has a significant influence on the photorefractive effect. By removing the dielectric cladding layer, the photorefractive eff…
Microring resonators are critical photonic components used in filtering, sensing and nonlinear applications. To date, the development of high performance microring resonators in LNOI has been limited by the sidewall angle, roughness and etch depth of fabricated rib waveguides. We present large free spectral range microring resonators patterned via electron beam lithography in high-index contrast $Z$-cut LNOI. Our microring resonators achieve an FSR greater than 5 nm for ring radius of 30 $μ$m and a large 3 dB resonance bandwidth. We demonstrate 3 pm/V electro-optic tuning of a 70 $μ$m-radius r…
MOE Key Laboratory of Weak-Light Nonlinear Photonics, TEDA Institute of Applied Physics and School of Physics, Nankai University（南开大学弱光非线性光子学教育部重点实验室、泰达应用物理研究院和物理学院）；School of Science, Jiangsu University of Science and Technology（江苏科技大学理学院）
Optical microresonators have recently attracted a growing attention in the photonics community. Their applications range from quantum electro-dynamics to sensors and filtering devices for optical telecommunication systems, where they are likely to become an essential building block. The integration of nonlinear and electro-optical properties in the resonators represents a very stimulating challenge, as it would incorporate new and more advanced functionality. Lithium niobate is an excellent candidate material, being an established choice for electro-optic and nonlinear optical applications. He…
The erbium-doped Lithium niobate on insulator (Er:LNOI) platform has great promise in the application of telecommunication, microwave photonics, and quantum photonics due to its excellent electro-optic, piezo-electric, nonlinear nature as well as the gain characteristics in the telecommunication C-band. Here, we report a single-frequency Er:LNOI integrated laser based on dual-cavity structure. Facilitated by the Vernier effect and gain competition, the single-frequency laser can operate stably at 1531-nm wavelength with a 1484-nm pump laser. The output laser has a power of 0.31 uW, a linewidth…
The absence of the single-photon nonlinearity has been a major roadblock in developing quantum photonic circuits at optical frequencies. In this paper, we demonstrate a periodically-poled thin film lithium niobate microring resonator (PPLNMR) that reaches 5,000,000%/W second harmonic conversion efficiency---almost 20-fold enhancement over the state-of-the-art---by accessing its largest $χ^{(2)}$ tensor component $d_{33}$ via quasi-phase matching. The corresponding single photon coupling rate $g/2π$ is estimated to be 1.2 MHz, which is an important milestone as it approaches the dissipation rat…
Lithium niobate (LN), dubbed by many as the silicon of photonics, has recently risen to the forefront of chip-scale nonlinear optics research since its demonstration as an ultralow-loss integrated photonics platform. Due to its significant quadratic nonlinearity ($χ^{(2)}$), LN inspires many important applications such as second-harmonic generation (SHG), spontaneous parametric down-conversion, and optical parametric oscillation. Here, we demonstrate high-efficiency SHG in dual-resonant, periodically poled z-cut LN microrings, where quasi-phase matching is realized by field-assisted domain eng…
Erbium-doped lithium niobate on insulator (LNOI) laser plays an important role in the complete photonic integrated circuits (PICs). Here, we demonstrate an integrated tunable whisper galley single mode laser (WGSML) by making use of a pair of coupled microdisk and microring on LNOI. A 974 nm single-mode pump light can have an excellent resonance in the designed microdisk, which is beneficial to the whisper gallery mode (WGM) laser generation. The WGSML at 1560.40 nm with a maximum 31.4 dB side mode suppression ratio (SMSR) has been achieved. By regulating the temperature, WGSMLs output power i…
Simultaneous generation of Raman-assisted Soliton Microcombs and Tunable Multi-chromatic Raman Microlasers in Single Monolithic Thin-film Lithium Niobate Microrings
High complexity, dense integrated nanophotonic circuits possessing strong nonlinearities are desirable for a breadth of applications in classical and quantum optics. In this work, we study natural phase matching via modal engineering in lithium niobate (LN) waveguides and microring resonators on chip for second harmonic generation (SHG). By carefully engineering the geometry dispersion, we observe a $26\%~W^{-1}cm^{-2}$ normalized efficiency for SHG in a waveguide with submicron transverse mode confinement. With similar cross-sectional dimensions, we demonstrate phase matched SHG in a microrin…
High-efficiency integrated laser on erbium-doped lithium niobate-on-insulator
MOE Key Laboratory of Weak-Light Nonlinear Photonics, School of Physics and TEDA Institute of Applied Physics, Nankai University（南开大学物理学院与泰达应用物理研究院弱光非线性光子学教育部重点实验室）
Offset Dual Microcombs in a Single Microresonator: Kerr-Raman Interleaved Combs
East China Normal University（华东师范大学）；Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences（中国科学院上海光学精密机械研究所）；Nanjing University（南京大学）；Shanghai Research Center for Quantum Sciences（上海量子科学研究与创新中心）；Hefei National Laboratory（合肥国家实验室）；Collaborative Innovation Center of Extreme Optics, Shanxi University（山西大学极端光学协同创新中心）；Collaborative Innovation Center of Light Manipulations and Applications, Shandong Normal University（山东师范大学光调控与应用协同创新中心）
A high-resolution broad-spectral-bandwidth spectrometer on a chip would create new opportunities for gas-phase molecular fingerprinting, especially in environmental sensing. A resolution high enough to observe transitions at atmospheric pressure and the simultaneous sensitive detection of multiple atoms or molecules are the key challenges. Here, an electro-optic microring-based dual-comb interferometer, fabricated on a low-loss lithium-niobate-on-insulator nanophotonic platform, demonstrates significant progress towards such an achievement. Spectra spanning 1.6 THz (53 cm-1) at a resolution of…
Materials with strong $χ^{(2)}$ optical nonlinearity, especially lithium niobate, play a critical role in building optical parametric oscillators (OPOs). However, chip-scale integration of low-loss $χ^{(2)}$ materials remains challenging and limits the threshold power of on-chip $χ^{(2)}$ OPO. Here we report the first on-chip lithium niobate optical parametric oscillator at the telecom wavelengths using a quasi-phase matched, high-quality microring resonator, whose threshold power ($\sim$30 $μ$W) is 400 times lower than that in previous $χ^{(2)}$ integrated photonics platforms. An on-chip powe…
Modern communication networks require high performance and scalable electro-optic modulators that convert electrical signals to optical signals at high speed. Existing lithium niobate modulators have excellent performance but are bulky and prohibitively expensive to scale up. Here we demonstrate scalable and high-performance nanophotonic electro-optic modulators made of single-crystalline lithium niobate microring resonators and micro-Mach-Zehnder interferometers. We show a half-wave electro-optic modulation efficiency of 1.8V$\cdot$cm and data rates up to 40 Gbps.
Integrated photonics is a powerful platform that can improve the performance and stability of optical systems, while providing low-cost, small-footprint and scalable alternatives to implementations based on free-space optics. While great progress has been made on the development of low-loss integrated photonics platforms at telecom wavelengths, visible wavelength range has received less attention. Yet, many applications utilize visible or near-visible light, including those in optical imaging, optogenetics, and quantum science and technology. Here we demonstrate an ultra-low loss integrated vi…
Microcavity lasers based on erbium-doped lithium niobate on insulator (LNOI), which are key devices for LNOI integrated photonics, have attracted much attention recently. In this Letter, we report the realization of a C-band single-mode laser using Vernier effect in two coupled Erbium-doped LNOI microrings with different radii under the pump of a 980-nm continuous laser. The laser, operating stably over a large range of pumping power, has a pump threshold of ~200 μW and a side-mode suppression ratio exceeding 26 dB. The high-performance LNOI single-mode laser will promote the development of li…
Integrated photonics operating at visible-near-infrared (VNIR) wavelengths offer scalable platforms for advancing optical systems for addressing atomic clocks, sensors, and quantum computers. The complexity of free-space control optics causes limited addressability of atoms and ions, and this remains an impediment on scalability and cost. Networks of Mach-Zehnder interferometers can overcome challenges in addressing atoms by providing high-bandwidth electro-optic control of multiple output beams. Here, we demonstrate a VNIR Mach-Zehnder interferometer on lithium niobate on sapphire with a CMOS…
We report an on-chip single mode microlaser with low-threshold fabricated on Erbium doped lithium niobate on insulator (LNOI). The single mode laser emission at 1550.5 nm wavelength is generated in a coupled photonic molecule, which is facilitated by Vernier effect when pumping the photonic molecule at 970 nm. A threshold pump power as low as 200 uW is demonstrated thanks to the high quality factor above 10^6. Moreover, the linewidth of the microlaser reaches 4 kHz, which is the best result in LNOI microlasers. Such single mode micro-laser lithographically fabricated on chip is highly in deman…
Lithium niobate (LN) is a promising material for future complex photonic-electronic circuits, with wide applications in fields like communications, sensing, quantum optics, and computation. LN took a great stride toward compact photonic integrated circuits (PICs) with the development of partially-etched LN on insulator (LNOI) waveguides. However, integration density is still limited for future high-compact PICs due to the partial edge nature of their waveguides. Here, we demonstrate a fully-etched LN PIC platform which, for the first time, simultaneously achieves ultra-low propagation loss and…
Optical frequency combs consist of equally spaced discrete optical frequency components and are essential tools for optical communications and for precision metrology, timing and spectroscopy. To date, wide-spanning combs are most often generated by mode-locked lasers or dispersion-engineered resonators with third-order Kerr nonlinearity. An alternative comb generation method uses electro-optic (EO) phase modulation in a resonator with strong second-order nonlinearity, resulting in combs with excellent stability and controllability. Previous EO combs, however, have been limited to narrow width…
