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arXiv 2103.10470astro-ph.IM
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应用于X射线光栅的纳米纤维Spectroscopy

Applied Nanofabrication for X-ray Grating Spectroscopy

Jake A. McCoy

摘要:

通过活动星系核的软X射线吸收光谱测量星系晕和星系际介质中的扩散、高度电离重子含量是山猫X射线观测站飞行任务概念的一个主要科学目标,只能用下一代光栅光谱仪来实现。使用反射光栅技术实现这样的仪器需要数千个定制闪耀光栅,每个光栅都具有高衍射效率,以制造和对准来拦截到达Wolter-I望远镜焦点的辐射。本论文的目的是实现两个最近开发的技术在纳米纤维这项任务,重点是光束线衍射效率测试表征光谱灵敏度。特别地,热激活选择性形貌平衡(TASTE)被追求为用于制造具有关键优点的主光栅的手段,其使得闪耀凹槽刻面能够在不受衬底晶体结构限制的非平行凹槽布局上在聚合物电子束抗蚀剂中被图案化。此外,衬底保形压印光刻(SCIL)的研究作为一种方法,用于大规模制造高保真度的光栅复制品在硅溶胶-凝胶抗蚀剂,同时避免了许多与大面积图案化在其他纳米压印技术相关的的acromments。对镀有金的亚微米光栅原型进行的衍射效率测试表明,TASTE能够满足Lynx对光谱灵敏度的要求,在小凹槽周期处有改进的空间,并且虽然SCIL为Lynx光栅生产提供了一个有前途的途径,但由于抗蚀剂收缩,印记会遭受小的闪耀角减少。本论文的附录概述了X射线谱线、X射线光学和衍射光栅的物理基础。

英文摘要:

Measuring the diffuse, highly-ionized baryonic content in galactic halos and the intergalactic medium through soft x-ray absorption spectroscopy of active galactic nuclei is a main scientific objective of the Lynx X-ray Observatory mission concept that can only be accomplished with a next-generation grating spectrometer. Realizing such an instrument using reflection grating technology requires thousands of custom blazed gratings that each perform with high diffraction efficiency to be manufactured and aligned to intercept radiation coming to a focus in a Wolter-I telescope. The aim of this thesis is to implement two recently-developed techniques in nanofabrication for this task, with an emphasis on beamline diffraction-efficiency testing for characterizing spectral sensitivity. In particular, thermally-activated selective topography equilibration (TASTE) is pursued as a means for fabricating a master grating with the key advantage that it enables blazed groove facets to be patterned in polymeric electron-beam resist over a non-parallel groove layout not limited by substrate crystal structure. Additionally, substrate-conformal imprint lithography (SCIL) is studied as a method for mass manufacturing high-fidelity grating replicas in a silica sol-gel resist while avoiding many of the detriments associated with large-area patterning in other nanoimprint techniques. Diffraction-efficiency testing of sub-micron grating prototypes coated with gold shows that TASTE is capable of meeting Lynx requirements for spectral sensitivity, with room for improvement at small groove periods, and that while SCIL offers a promising avenue for Lynx grating production, imprints suffer a small blaze-angle reduction due to resist shrinkage. Accompanying this dissertation are appendices that outline physics fundamentals for x-ray spectral lines, x-ray optics, and diffraction gratings.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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