Toward volume manufacturing of high-performance soft x-ray critical-angle transmission gratings
Ralf K. Heilmann, Alexander R. Bruccoleri, Jungki Song, Matthew T. Cook, James A. Gregory, Renee D. Lambert, Dimitri A. Shapiro, Douglas J. Young, Miranda Brads… 展开作者
Ralf K. Heilmann, Alexander R. Bruccoleri, Jungki Song, Matthew T. Cook, James A. Gregory, Renee D. Lambert, Dimitri A. Shapiro, Douglas J. Young, Miranda Bradshaw, Vadim Burwitz, Gisela D. Hartner, Andreas Langmeier, Randall K. Smith, Mark L. Schattenburg
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11 pages, 8 figures, submitted to Proc. SPIE 11444
High-resolution ($R = λ/Δλ> 2000$) x-ray absorption and emission line spectroscopy in the soft x-ray band is a crucial diagnostic for the exploration of the properties of ubiquitous warm and hot plasmas and their dynamics in the cosmic web, galaxy clusters, galaxy halos, intragalactic space, and star atmospheres. Soft x-ray grating spectroscopy with $R > 10{,}000$ has been demonstrated with critical-angle transmission (CAT) gratings. CAT gratings combine the relaxed alignment and temperature tolerances and low mass of transmission gratings with high diffraction efficiency blazed in high orders. They are an enabling technology for the proposed Arcus grating explorer and were selected for the Lynx design reference mission grating spectrometer instrument. Both Arcus and Lynx require the manufacture of hundreds to perhaps $\approx 2000$ large-area CAT gratings. We are developing new patterning and fabrication process sequences that are conducive to large-format volume processing on state-of-the-art 200 mm wafer tools. Recent x-ray tests on 200 nm-period gratings patterned using e-beam-written masks and 4x projection lithography in conjunction with silicon pore focusing optics demonstrated $R \approx 10^4$ at 1.49 keV. Extending the grating depth from 4 $μ$m to 6 $μ$m is predicted to lead to significant improvements in diffraction efficiency and is part of our current efforts using a combination of deep reactive-ion etching and wet etching in KOH solution. We describe our recent progress in grating fabrication and report our latest diffraction efficiency and modeling results.
Extreme Ultraviolet and Soft X-Ray Diffraction Efficiency of a Blazed Reflection Grating Fabricated by Thermally Activated Selective Topography Equilibration
Characterization of a symmetric-facet dual-ruled grating for spatial heterodyne spectroscopy
Lunar and Planetary Laboratory, University of Arizona（亚利桑那大学月球与行星实验室）；Department of Electrical and Computer Engineering, University of Arizona（亚利桑那大学电气与计算机工程系）
X-ray grating spectroscopy as a mission enhancement
MIT（麻省理工学院）；Technion, Israel（以色列理工学院）；Univ. Michigan（密歇根大学）；Center for Astrophysics — Harvard & Smithsonian（哈佛-史密松天体物理中心）；Izentis（伊赞提斯公司）；University of Michigan（密歇根大学）；SRON, The Netherlands（荷兰SRON国家研究所）；FAU Erlangen-Nuernberg（埃尔朗根-纽伦堡弗里德里希·亚历山大大学）；U. Iowa（爱荷华大学）；Penn State University（宾夕法尼亚州立大学）；Saint Mary’s University（圣玛丽大学）；NASA/GSFC（美国宇航局戈达德太空飞行中心）；WashU（华盛顿大学）；Columbia（哥伦比亚大学）；ESA（欧洲空间局）；NCAC PAS, Poland（波兰科学院国家天文中心）；NASA/ARC（美国宇航局艾姆斯研究中心）；University of Massachusetts（马萨诸塞大学）；JHU, NASA/GSFC（约翰斯·霍普金斯大学，美国宇航局戈达德太空飞行中心）
