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arXiv 2103.03776cond-mat.mtrl-sci
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使用相干极端UV光探测硅上1D和2D受限纳米结构的热输运:一般和预测模型产生新的理解

Thermal transport from 1D- and 2D-confined nanostructures on silicon probed using coherent extreme UV light: General and predictive model yields new understanding

Albert Beardo, Joshua L. Knobloch, Lluc Sendra, Javier Bafaluy, Travis D. Frazer, Weilun Chao, Jorge N. Hernandez-Charpak, Henry C. Kapteyn, Begoña Abad, Margar… 展开作者

Albert Beardo, Joshua L. Knobloch, Lluc Sendra, Javier Bafaluy, Travis D. Frazer, Weilun Chao, Jorge N. Hernandez-Charpak, Henry C. Kapteyn, Begoña Abad, Margaret M. Murnane, F. Xavier Alvarez, Juan Camacho

摘要:

热管理在纳米器件的设计中至关重要,因为工作温度决定了它们的效率和寿命。过去探索半导体中纳米级热传输的实验和理论工作通过包括有效参数(例如尺寸依赖的热导率)来解决已知的傅立叶定律建模的偏差。然而,最近的实验定性地显示了不能以这种方式建模的新行为。在这里,我们结合先进的实验和理论表明,硅上的一维和二维受限的纳米级热点的冷却可以使用一般的流体动力学热传输模型来描述,与以前的理解相反,在体硅中的热流。我们使用一套全面的极紫外散射测量的非扩散传输从瞬态加热的纳米线和纳米点来验证和推广我们的从头算模型,不需要任何几何相关的拟合参数。这使我们能够发现两个不同的时间尺度和热传输机制的存在:一个界面电阻制度,占主导地位的短时间尺度上,和流体力学的声子输运制度,占主导地位的较长的时间尺度。此外,我们的模型可以预测纳米长度尺度和皮秒时间尺度上的任意几何形状的完整的热机械响应,提供了一个先进的实用工具,纳米技术的热管理。此外,我们推导出的运输时间尺度的解析表达式,有效的一个子集的几何形状,提供了一个优化散热的路线。

英文摘要:

Heat management is crucial in the design of nanoscale devices as the operating temperature determines their efficiency and lifetime. Past experimental and theoretical works exploring nanoscale heat transport in semiconductors addressed known deviations from Fourier's law modeling by including effective parameters, such as a size-dependent thermal conductivity. However, recent experiments have qualitatively shown new behavior that cannot be modeled in this way. Here, we combine advanced experiment and theory to show that the cooling of 1D- and 2D-confined nanoscale hot spots on silicon can be described using a general hydrodynamic heat transport model, contrary to previous understanding of heat flow in bulk silicon. We use a comprehensive set of extreme ultraviolet scatterometry measurements of non-diffusive transport from transiently heated nanolines and nanodots to validate and generalize our ab initio model, that does not need any geometry-dependent fitting parameters. This allows us to uncover the existence of two distinct timescales and heat transport mechanisms: an interface resistance regime that dominates on short time scales, and a hydrodynamic-like phonon transport regime that dominates on longer timescales. Moreover, our model can predict the full thermomechanical response on nanometer length scales and picosecond time scales for arbitrary geometries, providing an advanced practical tool for thermal management of nanoscale technologies. Furthermore, we derive analytical expressions for the transport timescales, valid for a subset of geometries, supplying a route for optimizing heat dissipation.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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