金催化氧化硅的化学纳米加工
Chemical nanomachining of silicon by gold-catalyzed oxidation
摘要：
展示了一种用于从绝缘体上硅快速、可规模化生产纳米结构组件的化学纳米加工工艺。该过程是基于由Au诱导的Si的自发局部氧化，Au被选择性地蒸发到Si表面上。Au催化的氧化物形成了一种图案，该图案用作底层Si的坚固掩模，使得能够使用简单的湿化学来雕刻不同形状的纳米结构阵列，包括环、柱、线和纳米孔。这种化学纳米加工过程的显着简单性使其成为从光子学到生物技术应用的一种使能技术。
英文摘要：
A chemical nanomachining process for the rapid, scalable production of nanostructure assemblies from silicon-on-insulator is demonstrated. The process is based on the spontaneous, local oxidation of Si induced by Au, which is selectively evaporated onto the Si surface. The Au-catalyzed oxide forms a pattern that serves as a robust mask for the underlying Si, enabling the use of simple wet chemistry to sculpt arrays of nanostructures of diverse shapes including rings, pillars, wires, and nanopores. The remarkable simplicity of this chemical nanomachining process makes it widely accessible as an enabling technique for applications from photonics to biotechnology.
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