集成光子学在现代科学和技术中发挥着核心作用，使从非线性科学到量子信息、超精密测量和传感以及数据通信和信号处理等高级应用的实验成为可能。具有良好性能的光学材料是集成光子学器件纳米制造的基础。在这里，我们描述了一种用于集成非线性光子学的材料，五氧化二钽（Ta $_2$ O $_5$，下文称为钽），其提供低本征材料应力、低光学损耗以及有效地进入克尔非线性过程。我们利用>800纳米厚的钽薄膜通过离子束溅射氧化硅晶片上沉积。氧化钽膜包含38 MPa的低残余拉伸应力，并且它们提供克尔指数$n_2$ =6.2（23）$\times10^{-19}$ m $^2$ /W，其比氮化硅高大约三倍。我们制造集成的非线性谐振器和波导，而没有化学计量氮化硅中普遍存在的开裂挑战。钽谐振器具有高达$3.8\times10^6$的光学品质因数，这使我们能够产生具有低阈值功率的超宽带克尔孤子频率梳。此外，钽波导能够从低能量超快种子脉冲产生近红外超连续谱。我们的工作介绍了一个通用的材料平台，集成，低损耗纳米光子，可以广泛应用，并实现异构集成。
英文摘要：
Integrated photonics plays a central role in modern science and technology, enabling experiments from nonlinear science to quantum information, ultraprecise measurements and sensing, and advanced applications like data communication and signal processing. Optical materials with favorable properties are essential for nanofabrication of integrated-photonics devices. Here we describe a material for integrated nonlinear photonics, tantalum pentoxide (Ta$_2$O$_5$, hereafter tantala), which offers low intrinsic material stress, low optical loss, and efficient access to Kerr-nonlinear processes. We utilize >800-nm thick tantala films deposited via ion-beam sputtering on oxidized silicon wafers. The tantala films contain a low residual tensile stress of 38 MPa, and they offer a Kerr index $n_2$=6.2(23)$\times10^{-19}$ m$^2$/W, which is approximately a factor of three higher than silicon nitride. We fabricate integrated nonlinear resonators and waveguides without the cracking challenges that are prevalent in stoichiometric silicon nitride. The tantala resonators feature an optical quality factor up to $3.8\times10^6$, which enables us to generate ultrabroad-bandwidth Kerr-soliton frequency combs with low threshold power. Moreover, tantala waveguides enable supercontinuum generation across the near-infrared from low-energy, ultrafast seed pulses. Our work introduces a versatile material platform for integrated, low-loss nanophotonics that can be broadly applied and enable heterogeneous integration.
Non-volatile integrated photonics on lithium tantalate-on-insulator
Wuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information, Huazhong University of Science and Technology（武汉光电国家实验室与华中科技大学光学与电子信息学院）；State Key Laboratory of Photonics and Communications, Department of Electronic Engineering, Shanghai Jiao Tong University（上海交通大学电子工程系光子与通信国家重点实验室）；School of Physics, Harbin Institute of Technology（哈尔滨工业大学物理学院）
Hybrid Integration of Quantum Dot Single Photon Sources with Lithium Tantalate Photonics for On Chip Routing
National University of Defense Technology（国防科技大学）；Zhejiang University（浙江大学）；Harbin Institute of Technology (Shenzhen)（哈尔滨工业大学（深圳））；Sun Yat-sen University（中山大学）
Robust and Active Visible-Light Integrated Photonics on Thin-Film Lithium Tantalate for Underwater Optical Wireless Communications
National Center for International Research on Green Optoelectronics, South China Normal University（华南师范大学绿色光电子国际联合研究中心）；Jiaxing Research Institute, Zhejiang University（浙江大学嘉兴研究院）
Low voltage and high-bandwidth thin-film lithium tantalate modulator on a silicon dioxide substrate
Institute of Physics, Swiss Federal Institute of Technology, Lausanne (EPFL)（洛桑联邦理工学院物理研究所）；Institute of Electrical and Micro Engineering (IEM), EPFL（洛桑联邦理工学院电气与微工程研究所）；Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT)（卡尔斯鲁厄理工学院光子与量子电子学研究所）
Toward scalable and bias-stable optical phased arrays on lithium tantalate
State Key Laboratory of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University（中山大学电子与信息学院光电材料与技术国家重点实验室）；State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University（清华大学精密仪器系精密测量技术与仪器国家重点实验室）；State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences（中国科学院上海微系统与信息技术研究所集成材料电路国家重点实验室）；Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences（中国科学院大学材料科学与工程中心）；University of Science and Technology of China（中国科学技术大学）
Sub-kHz linewidth integrated extended-DBR Pockels lasers using lithium tantalate
Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL)（洛桑联邦理工学院物理研究所）；Deeplight SA（Deeplight公司）；State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences（中国科学院上海微系统与信息技术研究所集成电路材料重点实验室）；Institute of Electrical and Micro engineering, Swiss Federal Institute of Technology, Lausanne (EPFL)（洛桑联邦理工学院电气与微电子工程研究所）
High-Efficiency Acousto-Optic Modulation on Non-Suspended Thin-Film Lithium Tantalate
University of Science and Technology of China（中国科学技术大学）；Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences（中国科学院上海微系统信息技术研究所）；University of Chinese Academy of Sciences（中国科学院大学）
