五氧化二钽光子学在任意衬底上的单片三维集成
Monolithic 3D integration of tantalum pentoxide photonics on arbitrary substrates
AI总结：
本文提出将五氧化二钽光子学单片三维集成到任意衬底（如薄膜铌酸锂）上，利用其低温沉积等特性，实现低损耗微谐振器、准相位匹配及多种非线性频率转换，为多功能光子学系统开辟新范式。
摘要：
光子学领域涵盖了广泛的材料平台，每种平台都针对特定功能进行了优化，然而没有任何平台能满足当前及不断发展的光子应用的所有需求。虽然组合集成光子材料能增强整体能力——例如统一非线性光学、低损耗无源器件和电光效应——但材料和工艺兼容性仍是一个重大挑战。我们介绍了将五氧化二钽（Ta$_2$O$_5$，以下简称tantala）光子学全晶圆、单片三维集成到任意衬底上的方法，此处我们在硅上的薄膜铌酸锂（LN）上进行了探索。Tantala的独特性质，重要的是室温沉积、低温退火以及针对相位匹配优化的厚膜中的低应力，使其非常适合单片三维集成，而不会损害衬底性能或兼容性。我们展示了tantala中低损耗、高品质因数的微谐振器和纳米光子学，周期性极化LN波导中的稳健准相位匹配，以及高效的三维层间路由。这使我们能够展示丰富的非线性频率转换过程，包括tantala微谐振器和光子晶体谐振器中的$χ^{(3)}$光学参量振荡（OPO）和孤子微梳生成，周期性极化LN中的$χ^{(2)}$二次谐波产生（SHG），以及它们的组合。使用tantala的单片三维集成为可扩展、多功能光子学系统开辟了新范式，使可见光、近红外和非线性操作能够进入现有光子学基础设施。
英文摘要：
The photonics landscape encompasses a wide scope of material platforms, each optimized for specific functionalities, yet no platform meets the demands of all current and evolving photonic applications. While combining integrated photonics materials enhances overall capability - such as unifying nonlinear optics, low-loss passive devices, and electro-optics - material and process compatibility remains a major challenge. We introduce full-wafer, monolithic 3D integration of tantalum pentoxide (Ta$_2$O$_5$, hereafter tantala) photonics onto arbitrary substrates, which we explore here with thin-film lithium niobate (LN) on silicon. Tantala's unique properties, importantly room-temperature deposition, low-temperature annealing, and low stress in thick films optimized for phase matching, make it well suited for monolithic 3D integration without compromising substrate performance or compatibility. We demonstrate low-loss, high-quality-factor microresonators and nanophotonics in tantala, robust quasi-phase-matching in poled LN waveguides, and efficient 3D interlayer routing. This enables us to demonstrate a rich palette of nonlinear frequency conversion processes, including $χ^{(3)}$ optical parametric oscillation (OPO) and soliton microcomb generation in tantala microresonators and photonic-crystal resonators, $χ^{(2)}$ second-harmonic generation (SHG) in periodically poled LN, and combinations thereof. Monolithic 3D integration with tantala opens a new paradigm for scalable, multifunctional photonic systems, enabling visible, near-IR, and nonlinear operation into existing photonic infrastructure.
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