arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2006.02594physics.app-ph
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负电容晶体管的反常亚阈值行为

Anomalous Subthreshold Behaviors in Negative Capacitance Transistors

Yu-Hung Liao, Daewoong Kwon, Suraj Cheema, Ava J. Tan, Ming-Yen Kao, Li-Chen Wang, Chenming Hu, Sayeef Salahuddin

摘要:

最近对超薄体负电容场效应晶体管的测量显示出在经典MOSFET中不期望的亚阈值行为。具体而言,亚阈值摆幅被发现在多个栅极长度下降到30 nm的测量设备的亚阈值区域中的栅极偏置的增加而减少。此外,在亚阈值摆幅相对于控制设备的改善表现出非单调依赖于栅极长度。在本文中,使用Landau-Khanatnikov铁电栅堆叠模型校准测量的电容-电压,我们表明,这两种异常行为可以定量再现与TCAD模拟。

英文摘要:

Recent measurements on ultra-thin body Negative Capacitance Field Effect Transistors have shown subthreshold behaviors that are not expected in a classical MOSFET. Specifically, subthreshold swing was found to decrease with increased gate bias in the subthreshold region for devices measured over multiple gate lengths down to 30 nm. In addition, improvement in the subthreshold swing relative to control devices showed a non-monotonic dependence on the gate length. In this paper, using a Landau-Khanatnikov ferroelectric gate stack model calibrated with measured Capacitance-Voltage, we show that both these anomalous behaviors can be quantitatively reproduced with TCAD simulations.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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