A multi-functional reconfigurable metasurface: Electromagnetic design accounting for fabrication aspects
Alexandros Pitilakis, Odysseas Tsilipakos, Fu Liu, Kypros M. Kossifos, Anna C. Tasolamprou, Do-Hoon Kwon, Mohammad Sajjad Mirmoosa, Dionysios Manessis, Nikolaos… 展开作者
Alexandros Pitilakis, Odysseas Tsilipakos, Fu Liu, Kypros M. Kossifos, Anna C. Tasolamprou, Do-Hoon Kwon, Mohammad Sajjad Mirmoosa, Dionysios Manessis, Nikolaos V. Kantartzis, Christos Liaskos, Marco A. Antoniades, Julius Georgiou, Costas M. Soukoulis, Maria Kafesaki, Sergei A. Tretyakov
备注：
15 pages (incl. author bios), 16 figures. Published online at 19 August 2020 in the IEEE Transactions on Antennas and Propagation, Vol. 68 (tentative)
发表信息：
IEEE Trans. Antennas Propag., vol. 69, no. 3, pp. 1440-1454, March 2021
In this paper we present the theoretical considerations and the design evolution of a proof-of-concept reconfigurable metasurface, primarily used as a tunable microwave absorber, but also as a wavefront manipulation and polarization conversion device in reflection. We outline the design evolution and all considerations taken into account, from the selection of patch shape, unit cell size, and substrate, to the topology of the structure that realizes the desired tunability. The presented design conforms to fabrication restrictions and is co-designed to work with an integrated circuit chip for providing tunable complex loads to the metasurface, using a commercially available semiconductor process. The proposed structure can perform multiple tunable functionalities by appropriately biasing the integrated circuit: Perfect absorption for a wide range of incidence angles of both linear polarization states, accommodating a spectral range in the vicinity of 5 GHz, with potential also for wavefront control, exemplified via anomalous reflection and polarization conversion. The end vision is for such a design to be scalable and deployable as a practical HyperSurface, i.e., an intelligent multi-functional metasurface capable of concurrent reconfigurable functionalities: absorption, beam steering, polarization conversion, wavefront shaping, holography, and sensing.
In recent years, metasurfaces have shown extremely powerful abilities for manipulation of electromagnetic waves. However, the local electromagnetic response of conventional metasurfaces yields to an intrinsic performance limitation in terms of efficiency, minimizing their implementation in real-life applications. The efficiency of reconfigurable metasurfaces further decreases because of the high density of meta-atoms, reaching 74 meta-atoms per $λ^2$ area, incorporating lossy tunable elements. To address these problems, we implement strong electromagnetic non-local features in a \textit{sparse…
Electromagnetic metasurfaces can be characterized as intelligent if they are able to perform multiple tunable functions, with the desired response being controlled by a computer influencing the individual electromagnetic properties of each metasurface inclusion. In this paper, we present an example of an intelligent metasurface which operates in the reflection mode in the microwave frequency range. We numerically show that without changing the main body of the metasurface we can achieve tunable perfect absorption and tunable anomalous reflection. The tunability features can be implemented usin…
Originally introduced in the early 2010's, the idea of smart environments through reconfigurable intelligent surfaces (RIS) controlling the reflections of the electromagnetic waves has attracted much attention in recent years in preparation for the future 6G. Since reconfigurable intelligent surfaces are not based on increasing the number of sources, they could indeed pave the way to greener and potentially limitless wireless communications. In this paper, we design, model and demonstrate experimentally a millimeter wave reconfigurable intelligent surface based on an electronically tunable met…
We present computational studies on a proposed 20 by 20 elements electronically reconfigurable liquid crystal (LC) based binary phase reflectarray metasurface, operational at 108 GHz. LC was modelled after Mer's GT3-23001, and full wave simulations have shown a phase difference of 177 degrees between ON and OFF states, while reflection amplitudes were both 0.88 for ON and OFF. We present preliminary full wave simulation results on the Genetic Algorithm (GA) optimised far-fields. We also present the basic design procedures and cross-platform implementations on optimisation routines involving Ma…
In this article, we develop analytical-numerical models for reconfigurable reflecting metasurfaces formed by chessboard-patterned arrays of metallic patches. These patch arrays are loaded with varactor diodes in order to enable surface impedance and reflection phase control. Two types of analytical models are considered. The first model based on the effective medium approach is used to predict the metasurface reflectivity. The second model is the Bloch wave dispersion model for the same structure understood as a two-dimensional transmission line metamaterial. The latter model is used to study …
We propose a low-cost reconfigurable metasurface transmitter to implement generalized polarization-space modulation (GPSM) that has been proposed for next-generation wireless communications. Unlike conventional multiple-input multiple-output GPSM, our electromagnetically-compliant, reduced form-factor design using Barium-Strontium-Titanate film yields more than two polarization states. Full-wave simulations show our optimized design achieves 0.08-0.95 polarization conversion ratio with 5% bandwidth at 28 GHz and bit error rates comparable or better than conventional systems.
Active metasurfaces promise reconfigurable optics with drastically improved compactness, ruggedness, manufacturability, and functionality compared to their traditional bulk counterparts. Optical phase change materials (O-PCMs) offer an appealing material solution for active metasurface devices with their large index contrast and nonvolatile switching characteristics. Here we report what we believe to be the first electrically reconfigurable nonvolatile metasurfaces based on O-PCMs. The O-PCM alloy used in the devices, Ge2Sb2Se4Te1 (GSST), uniquely combines giant non-volatile index modulation c…
We present a cost-effective, eco-friendly and accessible method for fabricating three-dimensional, ultralight and flexible millimeter-scale metasurfaces using a household 3D printer. In particular, we fabricate conductive Spilt Ring Resonators (SRRs) in a free-standing form, employing the so-called Fused Deposition Modeling 3D printing technique. We experimentally characterize the samples through transmission measurements in standard rectangular waveguide configurations. The structures exhibit well defined resonant features dependent on the geometrical parameters and the infiltrating dielectri…
Tsinghua University（清华大学）；Beijing National Research Center for Information Science and Technology（北京信息科学与技术国家研究中心）
The past decade has witnessed the advances of artificial intelligence with various applications in engineering. Recently, artificial neural network empowered inverse design for metasurfaces has been developed that can design on-demand meta-atoms with diverse shapes and high performance, where the design process based on artificial intelligence is fast and automatic. However, once the inverse-designed static meta-atom is fabricated, the function of the metasurface is fixed. Reconfigurable metasurfaces can realize dynamic functions, while applying artificial intelligence to design practical reco…
Towards optimal spatiotemporal wavefront shaping for the cocktail party problem with inverse design of an acoustic reconfigurable metasurface in disordered media
We present a hybrid device platform for creating an electrically reconfigurable metasurface formed by the integration of plasmonic nanostructures with phase-change material germanium antimony telluride (GST). By changing the phase of GST from amorphous to crystalline through Joule heating, a large range of responses from the metasurface can be achieved. Furthermore, by using the intermediate phases of GST, the metasurface can interact with the incident light in both over-coupling and under-coupling regimes, leading to an inherently broadband response. Through a detailed investigation of the na…
Nanchang University（南昌大学）；Nanchang Institute of Science and Technology（南昌理工学院）；The Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, School of Physics and TEDA Institute of Applied Physics, Nankai University（南开大学物理学院、泰达应用物理研究院（教育部弱光非线性光子学重点实验室））；Guangdong Polytechnic Normal University（广东技术师范大学）
Dynamically reconfigurable metasurfaces promise compact and lightweight spatial light modulation for many applications, including LiDAR, AR/VR, and LiFi systems. Here, we design and computationally investigate high quality factor silicon-on-lithium niobate metasurfaces with electrically-driven, independent control of its constituent nanobars for full phase tunability with high tuning efficiency. Free-space light couples to guided modes within each nanobar via periodic perturbations, generating quality factors exceeding 30,000, while maintaining bar spacing <$λ$/1.5. We achieve nearly 2$π$ phas…
Considering the rapid progress of theory, design, fabrication and applications, metasurface (MTS) has become a new research frontier in microwave, terahertz and optical bands. Reconfigurable metasurface (R-MTS) can dynamically modulate electromagnetic (EM) wave with unparalleled flexibility, which leads to great research tide in recent years. Numerous R-MTSs with powerful capabilities and various functions are presented explosively. In light of the five dimensions of EM wave, this review proposes a unified model to describe the interactions among R-MTS, EM wave and EM information, and suggests…
Achieving an electrically tunable phased array optical antenna surface has been a principal challenge in the field of metasurfaces. In this letter, we demonstrate a device platform for achieving reconfigurable control over the resonant wavelength of a subwavelength optical antenna through free-carrier injection. We engineer and grow, using molecular beam epitaxy, a heterostructure of In1-xAlxAs/InAs/AlyGa1-ySb layers designed to achieve large amplitude and phase modulation of light by maximizing the refractive index change in regions of resonant field enhancement The p-i-n layers are grown on …
Kirigami-based Flexible Metasurface with Reconfigurable Intrinsic Chirality from Zero to Near-unity
The Hong Kong University of Science and Technology (Guangzhou)（香港科技大学（广州））；Low Altitude Systems and Economy Research Institute, The Hong Kong University of Science and Technology (Guangzhou)（香港科技大学（广州）低空经济与系统研究院）；Wuhan University of Technology（武汉理工大学）
We experimentally demonstrate fabrication of tunable high contrast periodic fishnet metasurfaces with 3 um period on 200 nm thick Ge2Sb2Te5 films sputted onto glass and sapphire substrates using direct laser writing technique. We find that the use of sapphire substrate provides better accuracy of metasurface segments due to high thermal conductivity. The advantages of the demonstrated method consist in its simplicity, rapidity, robustness, and the ability of tuning of fabricated structures. This is of crucial importance for the creation of robust and tunable metasurfaces for applications in th…
Four-channel Imaging Based on Reconfigurable Metasurfaces: Hyperchaotic Encryption under Physical Protection
School of Information Engineering, Nanchang University（南昌大学信息工程学院）；Institute for Advanced Study, Nanchang University（南昌大学高等研究院）；Jiluan Academy, Nanchang University（南昌大学极链学院）
Molding the flow of light at the nanoscale has been a grand challenge of nanophotonics for decades. It is now widely recognized that metasurfaces represent a chip-scale nanophotonics array technology capable of comprehensively controlling the wavefront of light via appropriately configuring subwavelength antenna elements. Here, we demonstrate a reconfigurable metasurface that is universal, i.e., notionally capable of providing diverse optical functions in the telecommunication wavelength regime, using a compact, lightweight, electronically-controlled array with no moving parts. By electro-opti…
Spectral imaging paves way for various fields and particular in biomedical research. However, spectral imaging mainly depending on spatial or temporal scanning, cannot achieve high temporal, spatial and spectral resolution simultaneously. In this study, we demonstrated a silicon real-time ultra-spectral imaging chip based on reconfigurable metasurfaces, comprising of 155,216 (356$\times$436) image-adaptive micro-spectrometers with ultra-high center-wavelength accuracy of 0.04 nm and spectral resolution of 0.8 nm. It is employed for imaging brain hemodynamics, and the dynamic spectral absorptio…
The conventional lens's tunability drawback always restricts their application compared to the metasurface lens (metalens). On the other side, reconfigurable metalenses offer the benefits of ultrathin thickness and capable of tunability. Therefore achieving reconfigurable functionalities in a single metasurface has attracted significant research interest for potential terahertz (THz) applications. In this paper, an adjustable metasurface is presented using Vanadium dioxide (VO2) to manipulate the electromagnetic waves and provide the full reflection phase. The phase-change metasurface is compo…
Reconfigurable intelligent surfaces (RIS) have recently received significant attention as building blocks for smart radio environments and adaptable wireless channels. By altering the space- and time-varying electromagnetic (EM) properties, the RIS transforms the inherently stochastic nature of the wireless environment into a programmable propagation channel. Conventionally, designing RIS to yield the desired EM response requires trial-and-error by iteratively investigating a large possibility of various geometries and materials through thousands of full-wave EM simulations. In this context, d…
High-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances have been of a great interest in a variety of applications such as imaging, sensing, photovoltaics and others, which led to the necessity of an efficient large-scale fabrication technique. To address this, here we demonstrate the use of single-pulse laser interference for direct patterning of an amorphous silicon film into an array of Mie resonators. The proposed technique is based on laser-interference-induced dewetting. A precise control of the laser pulse energy enables the fabrication of ordered dielectr…
The ability of phase-change materials to reversibly and rapidly switch between two stable phases has driven their use in a number of applications such as data storage and optical modulators. Incorporating such materials into metasurfaces enables new approaches to the control of optical fields. In this article we present the design of novel switchable metasurfaces that enable the control of the nonclassical two-photon quantum interference. These structures require no static power consumption, operate at room temperature, and have high switching speed. For the first adaptive metasurface presente…
While flat metasurfaces are intensively studied, theoretical modelling of conformal metasurfaces appears to be exceptionally challenging where it demands accurate analysis of the metasurface geometry. Here, it is shown how numerical calculation of Green's function can be employed to design conformal sparse metasurfaces of arbitrary geometries within the same framework and without any accommodation. Furthermore, following the presented approach, it can be sufficient to realize only electric response to perform an efficient control of wavefronts that might simplify the design and fabrication of …
Plasmonic metasurfaces based on the extraordinary optical transmission effect (EOT) can be designed to efficiently transmit specific spectral bands from the visible to the far-infrared regimes, offering numerous applications in im-portant technological fields such as compact multispectral imaging, biological and chemical sensing, or color displays. However, due to their subwavelength nature, EOT metasurfaces are nowadays fabricated with nano- and micro-lithographic techniques, requiring many processing steps and carried out in expensive cleanroom environments. In this work, we propose and expe…
In this work, we investigated a simple structured graphene terahertz (THz) metasurface (MSF) with perfect absorption, wideband, polarization insensitive, oblique incidence insensitive and frequency reconfiguration. The graphene MSF structure is composed of a two-dimensional periodic array of graphene meta-atoms deposited on the silicon substrate terminated by a metal ground plane. The performance of the proposed MSF is numerically analyzed. An equivalent circuit model of the structure and its closed-form solution is introduced. The graphene MSF thin structure at 2.5 THz provides 100% of absorp…
Metasurfaces allow for the spatiotemporal variation of amplitude, phase, and polarization of optical wavefronts. Implementation of active tunability of metasurfaces promises compact flat optics capable of reconfigurable wavefront shaping. Phase-change materials (PCMs), such as germanium telluride or germanium antimony telluride, are a prominent material class enabling reconfigurable metasurfaces due to their large refractive index change upon structural transition. However, commonly employed laser-induced switching of PCMs limits the achievable feature sizes and thus, restricts device miniatur…
Graded metasurfaces exploit the local momentum imparted by an impedance gradient to transform the impinging wavefront. This approach suffers from fundamental limits on the overall conversion efficiency and it is challenged by fabrication limitations on the maximum spatial resolution. Here, we introduce the concept of meta-gratings, which enables arbitrary wavefront engineering with unitary efficiency and significantly lower demands on the fabrication precision. We employ this concept to design reflective metasurfaces for wavefront steering without limitations on efficiency. A similar approach …
Actively tunable and reconfigurable wavefront shaping by optical metasurfaces poses a significant technical challenge often requiring unconventional materials engineering and nanofabrication. Most wavefront-shaping metasurfaces can be considered 'local' in that their operation depends on the responses of individual meta-units. In contrast, 'nonlocal' metasurfaces function based on the modes supported by many adjacent meta-units, resulting in sharp spectral features but typically no spatial control of the outgoing wavefront. Recently, nonlocal metasurfaces based on quasi-bound states in the con…
Tunable dielectric meta-surface nanostructures offer incredible performance in optical application due to their extraordinary tunability of the polarization and engineering the dispersion of light with low loss in infrared range. In this article, we designed and experimentally measured the tunability of all-dielectric subwavelength silicon nanoparticles with the help of the temperature-based refractive index of the liquid crystal in the telecom regime. The proposed structure composed of high dielectric nanodisk surrounded by nematic liquid crystal (NLC) is simulated with numerical software, as…
Dynamic polarization control of light is essential for numerous applications ranging from enhanced imaging to materials characterization and identification. We present a reconfigurable terahertz metasurface quarter-waveplate consisting of electromechanically actuated micro-cantilever arrays. Our anisotropic metasurface enables tunable polarization conversion cantilever actuation. Specifically, voltage-based actuation provides mode selective control of the resonance frequency, enabling real-time tuning of the polarization state of the transmitted light. The polarization tunable metasurface has …
We demonstrate the fabrication of diffraction-limited dielectric metasurface lenses for NIR by use of standard industrial high throughput silicon processing techniques: UV Nano Imprint Lithography (UV-NIL) combined with continuous Reactive Ion Etching (RIE) and pulsed Bosch Deep Reactive Ion Etching (DRIE). As the research field of metasurfaces moves towards applications these techniques are relevant as potential replacements of commonly used cost-intensive fabrication methods utilizing Electron Beam Lithography. We show that washboard-type sidewall surface roughness arising from the Bosch DRI…
Designing reconfigurable metasurfaces that can dynamically control scattered electromagnetic waves and work in the near-infrared (NIR) and optical regimes remains a challenging task, which is hindered by the static material property and fixed structures. Phase change materials (PCMs) can provide high contrast optical refractive indexes at high frequencies between amorphous and crystal states, therefore are promising as feasible materials for reconfigurable metasurfaces. Here, we propose a hybrid metasurface that can arbitrarily modulate the complex amplitude of incident light with uniform ampl…
In this paper, we demonstrate a radiation-strength-chirped metasurface centimeter-long grating antenna, whose beam quality is approaching the diffraction limit in its footprint with 90 percent efficiency.Instead of chirping the duty cycle to tune radiation strength, which calls for non-scalable fabrication resolution, we design a 2D fish-bone surface grating with apodized width of the bone.The meta surface is made by silicon nitride on top of silicon waveguide to weakly perturb the mode. Moreover, a Monte Carlo Markov Chain(MCMC) algorithm is implemented to design the radiation strength profil…
Harnessing Selective State Space Models to Enhance Semianalytical Design of Fabrication-Ready Multilayered Huygens' Metasurfaces: Part I - Field-based Semianalytical Synthesis
Andrew and Erna Viterbi Faculty of Electrical and Computer Engineering, Technion（安德鲁和埃尔纳·维特比电气与计算机工程学院，以色列理工学院）；Faculty of Electrical and Computer Engineering, Tel-Aviv University（电气与计算机工程学院，特拉维夫大学）；Reykjavik University（雷克雅未克大学）
