We experimentally demonstrate fabrication of tunable high contrast periodic fishnet metasurfaces with 3 um period on 200 nm thick Ge2Sb2Te5 films sputted onto glass and sapphire substrates using direct laser writing technique. We find that the use of sapphire substrate provides better accuracy of metasurface segments due to high thermal conductivity. The advantages of the demonstrated method consist in its simplicity, rapidity, robustness, and the ability of tuning of fabricated structures. This is of crucial importance for the creation of robust and tunable metasurfaces for applications in the field of telecommunications and information processing.
Laser printing with a spatial light modulator (SLM) has several advantages over conventional raster-writing and dot-matrix display (DMD) writing: multiple pixel exposure, high power endurance and existing software for computer generated holograms (CGH). We present a technique for the design and manufacturing of plasmonic metasurfaces based on ultrafast laser printing with an SLM. As a proof of principle, we have used this technique to laser print a plasmonic metalens as well as high resolution plasmonic color decorations. The high throughput holographic resonant laser printing (HRLP) approach …
High-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances have been of a great interest in a variety of applications such as imaging, sensing, photovoltaics and others, which led to the necessity of an efficient large-scale fabrication technique. To address this, here we demonstrate the use of single-pulse laser interference for direct patterning of an amorphous silicon film into an array of Mie resonators. The proposed technique is based on laser-interference-induced dewetting. A precise control of the laser pulse energy enables the fabrication of ordered dielectr…
Plasmonic metasurfaces based on the extraordinary optical transmission effect (EOT) can be designed to efficiently transmit specific spectral bands from the visible to the far-infrared regimes, offering numerous applications in im-portant technological fields such as compact multispectral imaging, biological and chemical sensing, or color displays. However, due to their subwavelength nature, EOT metasurfaces are nowadays fabricated with nano- and micro-lithographic techniques, requiring many processing steps and carried out in expensive cleanroom environments. In this work, we propose and expe…
Quill effect, one of the intriguing phenomena in ultrafast laser writing, to our knowledge, has not been studied in low-loss-waveguide (LLW) writing regime yet, probably due to its invisibility under conventional white-light microscope in that regime. In this report, with help of adaptive third harmonic generation microscopy we reveal the quill effect in LLW writing regime and study its influences on the properties of written photonic integrated components in term of polarization-related properties in fused silica and beam-splitting ratio of three-waveguide-coupler in borosilicate glass.
Graded metasurfaces exploit the local momentum imparted by an impedance gradient to transform the impinging wavefront. This approach suffers from fundamental limits on the overall conversion efficiency and it is challenged by fabrication limitations on the maximum spatial resolution. Here, we introduce the concept of meta-gratings, which enables arbitrary wavefront engineering with unitary efficiency and significantly lower demands on the fabrication precision. We employ this concept to design reflective metasurfaces for wavefront steering without limitations on efficiency. A similar approach …
A powerful fabrication strategy based on three-dimensional direct laser writing for the rapid prototyping of opto-mechanical components with critical features ranging from several hundred nm to a few mm is demonstrated here. As an example, a simple optical fiber connector with optical and mechanical guides as well as integrated micro-optical elements with nano-structured surfaces is designed and fabricated. In contrast to established three-dimensional direct laser writing, two different polymers are combined in the fabrication process in order to achieve a drastic reduction in fabrication time…
Tunable dielectric meta-surface nanostructures offer incredible performance in optical application due to their extraordinary tunability of the polarization and engineering the dispersion of light with low loss in infrared range. In this article, we designed and experimentally measured the tunability of all-dielectric subwavelength silicon nanoparticles with the help of the temperature-based refractive index of the liquid crystal in the telecom regime. The proposed structure composed of high dielectric nanodisk surrounded by nematic liquid crystal (NLC) is simulated with numerical software, as…
We demonstrate the fabrication of diffraction-limited dielectric metasurface lenses for NIR by use of standard industrial high throughput silicon processing techniques: UV Nano Imprint Lithography (UV-NIL) combined with continuous Reactive Ion Etching (RIE) and pulsed Bosch Deep Reactive Ion Etching (DRIE). As the research field of metasurfaces moves towards applications these techniques are relevant as potential replacements of commonly used cost-intensive fabrication methods utilizing Electron Beam Lithography. We show that washboard-type sidewall surface roughness arising from the Bosch DRI…
We present a cost-effective, eco-friendly and accessible method for fabricating three-dimensional, ultralight and flexible millimeter-scale metasurfaces using a household 3D printer. In particular, we fabricate conductive Spilt Ring Resonators (SRRs) in a free-standing form, employing the so-called Fused Deposition Modeling 3D printing technique. We experimentally characterize the samples through transmission measurements in standard rectangular waveguide configurations. The structures exhibit well defined resonant features dependent on the geometrical parameters and the infiltrating dielectri…
Harnessing Selective State Space Models to Enhance Semianalytical Design of Fabrication-Ready Multilayered Huygens' Metasurfaces: Part I - Field-based Semianalytical Synthesis
Andrew and Erna Viterbi Faculty of Electrical and Computer Engineering, Technion（安德鲁和埃尔纳·维特比电气与计算机工程学院，以色列理工学院）；Faculty of Electrical and Computer Engineering, Tel-Aviv University（电气与计算机工程学院，特拉维夫大学）；Reykjavik University（雷克雅未克大学）
We study, both theoretically and experimentally, tunable metasurfaces supporting sharp Fano-resonances inspired by optical bound states in the continuum. We explore the use of arsenic trisulfide (a photosensitive chalcogenide glass) having optical properties which can be finely tuned by light absorption at the post-fabrication stage. We select the resonant wavelength of the metasurface corresponding to the energy below the arsenic trisulfide bandgap, and experimentally control the resonance spectral position via exposure to the light of energies above the bandgap.
In this paper we present the theoretical considerations and the design evolution of a proof-of-concept reconfigurable metasurface, primarily used as a tunable microwave absorber, but also as a wavefront manipulation and polarization conversion device in reflection. We outline the design evolution and all considerations taken into account, from the selection of patch shape, unit cell size, and substrate, to the topology of the structure that realizes the desired tunability. The presented design conforms to fabrication restrictions and is co-designed to work with an integrated circuit chip for p…
Metasurface holography, the reconstruction of holographic images by modulating the spatial amplitude and phase of light using metasurfaces, has emerged as a next-generation display technology. However, conventional fabrication techniques used to realize metaholograms are limited by their small patterning areas, high manufacturing costs, and low throughput, which hinder their practical use. Herein, we demonstrate a high efficiency hologram using a one-step nanomanufacturing method with a titanium dioxide nanoparticle-embedded-resin, allowing for high-throughput and low-cost fabrication. At a si…
We propose single-step additive fabrication of graded-index optical elements by introducing the light exposure as the additional dimension to three-dimensional (3D) laser writing, hence (3+1)D writing. We use a commercial printer and photoresist to realize the proposed single step fabrication method that can be swiftly adopted for research and engineering. After presenting the characterization of the graded-index profiles via basic structures, we demonstrate two different optical devices: volume holograms that are superimposed using angular and peristrophic multiplexing, and optical waveguides…
Harnessing Selective State Space Models to Enhance Semianalytical Design of Fabrication-Ready Multilayered Huygens' Metasurfaces: Part II - Generative Inverse Design (MetaMamba)
Tel Aviv University（特拉维夫大学）；Technion – Israel Institute of Technology（以色列理工学院）
Symmetry-protected resonances can be made to couple with free space by introducing a small degree of geometric asymmetry, leading to controllably-sharp spectral response. Here, we experimentally demonstrate a broken-symmetry metasurface for the technologically important low millimeter wave spectrum. The proposed metasurface is fabricated on an ultrathin polyimide substrate, resulting in a low loss and flexible structure. Measurements inside an anechoic chamber experimentally verify the theoretically predicted sharp spectral features corresponding to quality factors of several hundreds. The dem…
In this study, we demonstrate first, to the best of our knowledge, robust and dynamically polarization-controlled tunable-high-Q PIT in designed nanostructures metasurface, whose sharp resonance is guaranteed by design and protected against large geometrical imperfections. By employing the explicit analysis of near-field characteristic in the reciprocal-space based on the momentum matching, and the far-field radiation features with point-scattering approach in real-space sparked from Huygens's principles, the physics of interference resonance in the spectra for plane-wave optical transmission …
Infrared optical photonic crystals fabricated using direct laser writing, which is based on the two-photon polymerization of suitable monomers, have received substantial interest since the emergence of this process. Two-photon polymerization could be a disruptive technology for the fabrication of all-dielectric photonic crystals in the infrared spectral range, as it allows the synthesis of large scale arrays of uniform structures with arbitrary geometries and arrangements. However, all-dielectric photonic crystals that provide birefringent optical responses in the infrared spectral range have …
Switchable and active metasurfaces allow for the realization of beam steering, zoomable metalenses, or dynamic holography. To achieve this goal, one has to combine high-performance metasurfaces with switchable materials that exhibit high refractive index contrast and high switching speeds. In this work, we present an electrochemically switchable metasurface for beam steering where we use the conducting polymer poly(3,4-ethylene-dioxythiophene) (PEDOT) as an active material. We show beam diffraction with angles up to 10° and change of the intensities of the diffracted and primary beams employin…
Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the fabricated systems. Therefore, we propose a complimentary post-processing technique based on ultrashort ($\leq$ 10 ps) laser pulses. The process involves thermal effects: crystallization and reshaping, while the heat is localized by a high-precision positioning of the focused laser beam. Moreover, for the first time, the resonant behavior of dielectric metasurface…
Efficient hybrid plasmonic-photonic metasurfaces that simultaneously take advantage of the potential of both pure metallic and all-dielectric nanoantennas are identified as an emerging technology in flat optics. Nevertheless, post-fabrication tunable hybrid metasurfaces are still elusive. Here, we present a reconfigurable hybrid metasurface platform by incorporating the phase-change material Ge$_{2}$Sb$_{2}$Te$_{5}$ (GST) into metal-dielectric meta-atoms for active and non-volatile tuning of properties of light. We systematically design a reduced-dimension meta-atom, which selectively controls…
Functional tunability, environmental adaptability, and easy fabrication are highly desired properties in metasurfaces. Here we provide a tunable bilayer metasurface composed of two stacked identical dielectric magnetic mirrors, which are excited by the dominant electric dipole and other magnetic multipoles, exhibiting nonlocal electric field enhancement near the interface and high reflection. Differ from the tunability through the direct superposition of two structures with different functionalities, we achieve the reversible conversion between high reflection and high transmission by manipula…
All-dielectric optical metasurfaces can locally control the amplitude and phase of light at the nanoscale, enabling arbitrary wavefront shaping. However, lack of post-fabrication tunability has limited the true potential of metasurfaces for many applications. Here, we utilize a thin liquid crystal (LC) layer as a tunable medium surrounding the metasurface to achieve a phase-only spatial light modulator (SLM) with high reflection in the visible frequency, exhibiting an active and continuous resonance tuning with associated 2pi phase control and uncoupled amplitude. Dynamic wavefront shaping is …
Two-photon photopolymerization (TPP) has recently become a popular method for the fabrication of three-dimensional (3D) micro- and nanostructures. The reproduction fidelity of the designed micro- and nanostructures is influenced by experimental writing conditions, including laser power, exposure time, etc. To determine the appropriate writing parameters, characterization of morphological features and surface roughness during the experiment is needed. Traditional characterization methods for TPP, e.g., scanning electron microscopy and atomic force microscopy, have limited speed and cannot study…
Metalenses, which exhibit superior light-modulating performance with sub-micrometer-scale thicknesses, are suitable alternatives to conventional bulky refractive lenses. However, fabrication limitations, such as a high cost, low throughput, and small patterning area, hinder their mass production. Here, we demonstrate the mass production of low-cost, high-throughput, and large-aperture visible metalenses using an argon fluoride immersion scanner and wafer-scale nanoimprint lithography. Once a 12-inch master stamp is imprinted, hundreds of centimeter-scale metalenses can be fabricated. To enhanc…
Printed circuit metasurfaces have attracted significant attention in the microwave community for their versatile wavefront manipulation capability. Despite their promising potential in telecommunications and radar applications, few transmissive metasurfaces have been reported operating at millimeter-wave frequencies. Several secondary effects including fabrication tolerances, interlayer near-field coupling and the roughness of conductors are more severe at such high frequencies and can cause significant performance degradation. Additionally, very accurate experimental techniques are required i…
Achieving an electrically tunable phased array optical antenna surface has been a principal challenge in the field of metasurfaces. In this letter, we demonstrate a device platform for achieving reconfigurable control over the resonant wavelength of a subwavelength optical antenna through free-carrier injection. We engineer and grow, using molecular beam epitaxy, a heterostructure of In1-xAlxAs/InAs/AlyGa1-ySb layers designed to achieve large amplitude and phase modulation of light by maximizing the refractive index change in regions of resonant field enhancement The p-i-n layers are grown on …
Multilayer metasurfaces (MLMs) represent a versatile type of three-dimensional optical metamaterials that could enable ultra-thin and multi-functional photonic components. Herein we demonstrate an approach to readily fabricate MLMs exploiting a thin film self-rolling technique. As opposed to standard layer-by-layer approaches, all the metasurfaces are defined within a single nanopatterning step, significantly reducing fabrication time and costs. We realize two MLMs platforms relying on widely used nanopatterning techniques, namely focused ion-beam and electron-beam lithographies. A first examp…
Fabrication of nanoscale optical Fiber Bragg Gratings (FBGs) is one of the key manufacturing processes for fiber optics, which has many important applications in data communication and distributed remote sensing at a distance up to hundreds of kms. However, the fabrication of the FBGs is challenging. To meet such need, we propose a novel method to write the FBGs using high-flux synchrotron x-ray with a nanoscale gold/Si gratings to modulate the x-ray flux and thus change the refractive index contrast of the optical fiber to form the FBGs. The nanoscale gold/Si with high aspect ratio has been f…
This work represents a particular application of waveguide fabricated by femtosecond laser micromachining technology. More specifically, we report the development of an optical modulator based on the fabrication of single-mode optical waveguide structures buried in X-cut lithium niobate crystal with the femtosecond laser direct writing method. Here, change in refractive index profile is measured using near field intensity profile measurement method at optimized writing conditions. It has been observed that the change refractive index (Δn) is in the range of 10-4. Finally, the behavior of femto…
Dielectric metasurfaces have shown prominent applications in nonlinear optics due to strong field enhancement and low dissipation losses at the nanoscale. Chalcogenide glasses are one of the promising materials for the observation of nonlinear effects due to their high intrinsic nonlinearities. Here, we demonstrate, experimentally and theoretically, that significant second harmonic generation can be obtained within amorphous chalcogenide based metasurfaces by relying on the coupling between lattice and particle resonances. We further show that the high quality factor resonance at the origin of…
Metasurfaces allow for the spatiotemporal variation of amplitude, phase, and polarization of optical wavefronts. Implementation of active tunability of metasurfaces promises compact flat optics capable of reconfigurable wavefront shaping. Phase-change materials (PCMs), such as germanium telluride or germanium antimony telluride, are a prominent material class enabling reconfigurable metasurfaces due to their large refractive index change upon structural transition. However, commonly employed laser-induced switching of PCMs limits the achievable feature sizes and thus, restricts device miniatur…
