Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces via Single-Pulse Laser Interference
Jonas Berzinš, Simonas Indrišiūnas, Koen van Erve, Arvind Nagarajan, Stefan Fasold, Michael Steinert, Giampiero Gerini, Paulius Gečys, Thomas Pertsch, Stefan M.… 展开作者
Jonas Berzinš, Simonas Indrišiūnas, Koen van Erve, Arvind Nagarajan, Stefan Fasold, Michael Steinert, Giampiero Gerini, Paulius Gečys, Thomas Pertsch, Stefan M. B. Bäumer, Frank Setzpfandt
High-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances have been of a great interest in a variety of applications such as imaging, sensing, photovoltaics and others, which led to the necessity of an efficient large-scale fabrication technique. To address this, here we demonstrate the use of single-pulse laser interference for direct patterning of an amorphous silicon film into an array of Mie resonators. The proposed technique is based on laser-interference-induced dewetting. A precise control of the laser pulse energy enables the fabrication of ordered dielectric metasurfaces in areas spanning tens of micrometers and consisting of thousands of hemispherical nanoparticles with a single laser shot. The fabricated nanoparticles exhibit a wavelength-dependent optical response with a strong electric dipole signature. Variation of the pre-deposited silicon film thickness allows tailoring of the resonances in the targeted visible and infrared spectral ranges. Such direct and high-throughput fabrication paves the way towards a simple realization of spatially invariant metasurface-based devices.
Metasurfaces are ultrathin nanostructured surfaces that can allow arbitrary manipulation of light. Implementing dynamic tunability into their design could allow the optical functions of metasurfaces to be rapidly modified at will. The most pronounced and robust tunability of optical properties is provided by phase-change materials such as vanadium dioxide (VO2) and germanium antimony telluride (GST), but their implementations have been limited only to near-infrared wavelengths. Here, we demonstrate that VO2 nanoantennas with widely tunable Mie resonances can be utilized for designing tunable m…
Light trapping in planar ultrathin-film solar cells is limited due to a small number of optical modes available in the thin-film slab. A nanostructured thin-film design could surpass this limit by providing broadband increase in the local density of states in a subwavelength volume and maintaining efficient coupling of light. Here we report a broadband metasurface design, enabling efficient and broadband absorption enhancement by direct coupling of incoming light to resonant modes of subwavelength-scale Mie nanoresonators defined in the thin-film active layer. Absorption was investigated both …
Subwavelength Mie resonators have enabled new classes of optical antennas1-4, photodetectors5,6, antireflection coatings7, and magnetic mirrors8 and can act as the basic meta-atoms constituents of low-loss dielectric metasurfaces2-4,8-10. In any application, tunable Mie resonances are key to achieving dynamic and reconfigurable operation11,12. Sub-linewidth tuning has been achieved via coupling to liquid crystals13, ultrafast free-carrier injection14,15,16,17, stretchable substrates18 and with phase change materials19. Here, we demonstrate ultra-wide dynamic tuning of PbTe Mie resonators fabri…
The optical Kerr effect of material with negative refraction is estimated for the first time. This is done via three-dimensional finite-difference time-domain (FDTD) simulations of disordered bidisperse metasurfaces consisting of high index (GaP) spheres at the wavelength of 532~nm. The metasurfaces comprise spherical particles randomly arranged on plane having two sizes close to the magnetic and electric dipole Mie resonances. The real part of the effective nonlinear refractive index of the metasurfaces is computed in the vicinity of the Mie resonances where the metasurface possesses the nega…
Enhanced magneto-optical intensity effect in a helicity-preserving all-dielectric metasurface at Mie resonances and the anapole state
Russian Quantum Center（俄罗斯量子中心）；Moscow Institute of Physics and Technology (MIPT)（莫斯科物理技术学院）；Faculty of Physics, M.V. Lomonosov Moscow State University（莫斯科国立大学物理系）；National Engineering Research Center of Electromagnetic Radiation Control Materials, University of Electronic Science and Technology of China（电子科技大学电磁辐射控制材料国家工程研究中心）；State Key Laboratory of Electronic Thin-Films and Integrated Devices, University of Electronic Science and Technology of China（电子科技大学电子薄膜与集成器件国家重点实验室）
A spectral splitting, light trapping dielectric metasurface is designed, fabricated and integrated into a four-terminal perovskite/silicon hybrid tandem solar cell to increase the absorption of light close to the bandgap of the perovskite top cell, and enhance transmission of the near-infrared spectral band towards the bottom cell. The metagrating is composed of a hexagonal array of unit cells of 150-nm-tall hydrogenated amorphous silicon trimer nanostructures with dielectric Mie resonances in the 600-800 nm perovskite near-gap region, made using substrate-conformal imprint lithography. By tai…
We study the resonant enhancement of linear and nonlinear chiroptical effects in asymmetric silicon metasurfaces supporting multipolar Mie resonances and quasi-bound states in the continuum (quasi-BICs). We demonstrate theoretically and observe in experiment the pronounced linear circular dichroism at the quasi-BIC resonances. We further find that both local field enhancement and third-harmonic signal are large for Mie resonances and some quasi-BIC modes. We explain the selectivity of the nonlinear enhancement by employing the concept of critical coupling being more favorable for the modes wit…
We present all-dielectric polaritonic metasurfaces consisting of properly sculptured cylinders to sustain the dynamic anapole, i.e. a non-radiating alternating current distribution. One way for the anapole to emerge, is by combining modes based on the first and the fourth Mie resonance of a cylinder made of high permittivity LiTaO$_3$ for operation in the low THz. The circular cross-section of each cylinder varies periodically along its length in a binary way, from small to large, while its overall circular symmetry has to be broken in order to remove parasitic magnetic modes. Small cross-sect…
All-dielectric resonant nanophotonics lies at the heart of modern optics and nanotechnology due to the unique possibilities to control scattering of light from high-index dielectric nanoparticles and metasurfaces. One of the important concepts of dielectric Mie-resonant nanophotonics is associated with the Kerker effect that drives the unidirectional scattering of light from nanoantennas and Huygens' metasurfaces. Here we suggest and demonstrate experimentally a novel effect manifested in the nearly complete simultaneous suppression of both forward and backward scattered fields. This effect is…
We experimentally demonstrate fabrication of tunable high contrast periodic fishnet metasurfaces with 3 um period on 200 nm thick Ge2Sb2Te5 films sputted onto glass and sapphire substrates using direct laser writing technique. We find that the use of sapphire substrate provides better accuracy of metasurface segments due to high thermal conductivity. The advantages of the demonstrated method consist in its simplicity, rapidity, robustness, and the ability of tuning of fabricated structures. This is of crucial importance for the creation of robust and tunable metasurfaces for applications in th…
Plasmonic metasurfaces based on the extraordinary optical transmission effect (EOT) can be designed to efficiently transmit specific spectral bands from the visible to the far-infrared regimes, offering numerous applications in im-portant technological fields such as compact multispectral imaging, biological and chemical sensing, or color displays. However, due to their subwavelength nature, EOT metasurfaces are nowadays fabricated with nano- and micro-lithographic techniques, requiring many processing steps and carried out in expensive cleanroom environments. In this work, we propose and expe…
Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the fabricated systems. Therefore, we propose a complimentary post-processing technique based on ultrashort ($\leq$ 10 ps) laser pulses. The process involves thermal effects: crystallization and reshaping, while the heat is localized by a high-precision positioning of the focused laser beam. Moreover, for the first time, the resonant behavior of dielectric metasurface…
Meta-optics based on optically-resonant dielectric nanostructures is a rapidly developing research field with many potential applications. Halide perovskite metasurfaces emerged recently as a novel platform for meta-optics, and they offer unique opportunities for control of light in optoelectronic devices. Here we employ the generalized Kerker conditions to overlap electric and magnetic Mie resonances in each meta-atom of MAPbBr3 perovskite metasurface and demonstrate broadband suppression of reflection down to 4%. We reveal also that metasurface nanostructuring is also beneficial for the enha…
Fabrication of metasurfaces is ofthen time consuming and expensive, involving complex lithographic processes. The maskless fabrication of metasurfaces composed of rectangular Au bars is reported as a suitable alternative, providing cost-effective, rapid prototyping of metasurfaces. The investigated metasurfaces were fabricated using a simple three-step process which is discussed in detail. The fabrication process establishes a simple method for producing high fidelity 2D patterns suitable to synthesize metasurfaces for chemical sensing, beam steering, and perfect reflection/transmission. Compr…
Graded metasurfaces exploit the local momentum imparted by an impedance gradient to transform the impinging wavefront. This approach suffers from fundamental limits on the overall conversion efficiency and it is challenged by fabrication limitations on the maximum spatial resolution. Here, we introduce the concept of meta-gratings, which enables arbitrary wavefront engineering with unitary efficiency and significantly lower demands on the fabrication precision. We employ this concept to design reflective metasurfaces for wavefront steering without limitations on efficiency. A similar approach …
Resonant periodic nanostructures provide perfect reflection across small or large spectral bandwidths depending on the choice of materials and design parameters. This effect has been known for decades, observed theoretically and experimentally via one-dimensional and two-dimensional structures commonly known as resonant gratings, metamaterials, and metasurfaces. The physical cause of this extraordinary phenomenon is guided-mode resonance mediated by lateral Bloch modes excited by evanescent diffraction orders in the subwavelength regime. In recent years, hundreds of papers have declared Fabry-…
Tunable dielectric meta-surface nanostructures offer incredible performance in optical application due to their extraordinary tunability of the polarization and engineering the dispersion of light with low loss in infrared range. In this article, we designed and experimentally measured the tunability of all-dielectric subwavelength silicon nanoparticles with the help of the temperature-based refractive index of the liquid crystal in the telecom regime. The proposed structure composed of high dielectric nanodisk surrounded by nematic liquid crystal (NLC) is simulated with numerical software, as…
Freed from phase-matching constraints, plasmonic metasurfaces have contributed significantly to the control of the optical nonlinearity and enhancing the nonlinear generation efficiency by engineering subwavelength meta-atoms. However, the high dissipative losses and the inevitable thermal heating limit their applicability in nonlinear nanophotonics. All-dielectric metasurfaces, supporting both electric and magnetic Mie-type resonances in their nanostructures, have appeared as a promising alternative to nonlinear plasmonics. High-index dielectric nanostructures, allowing additional magnetic re…
We demonstrate the fabrication of diffraction-limited dielectric metasurface lenses for NIR by use of standard industrial high throughput silicon processing techniques: UV Nano Imprint Lithography (UV-NIL) combined with continuous Reactive Ion Etching (RIE) and pulsed Bosch Deep Reactive Ion Etching (DRIE). As the research field of metasurfaces moves towards applications these techniques are relevant as potential replacements of commonly used cost-intensive fabrication methods utilizing Electron Beam Lithography. We show that washboard-type sidewall surface roughness arising from the Bosch DRI…
Fabrication-Aware Design of a Hybrid Metasurface-Bragg Mirror for Low-Noise Precision Optics
Laboratory for Emerging Nanometrology（新兴纳米计量实验室）；Friedrich Schiller University（弗里德里希·席勒大学）；Fraunhofer Institute for Applied Optics and Precision Engineering IOF（弗劳恩霍夫应用光学和精密工程研究所IOF）；Physikalisch-Technische Bundesanstalt（德国物理技术联邦研究院）；Ernst Abbe University of Applied Sciences Jena（耶拿应用科学大学）
Harnessing Selective State Space Models to Enhance Semianalytical Design of Fabrication-Ready Multilayered Huygens' Metasurfaces: Part I - Field-based Semianalytical Synthesis
We theoretically demonstrate mechanical tuning of the spectral response of a Mie-like resonant dielectric metasurface consisting of crossed all-dielectric strip gratings. We use two array of parallel dielectric strips superimposed on each other to mechanically alter the crossing angle between them thereby changing the position of the maximum of the spectral response in a wide frequency range. The metasurface structure is considered as a doubly-periodic system in an oblique mesh. This mechanically controllable metasurface can be perspective in developing of a flexible polarization-sensitive opt…
We demonstrate an enhanced emission of high quantum yield molecules coupled to dielectric metasurfaces formed by periodic arrays of polycrystalline silicon nanoparticles. Radiative coupling of the nanoparticles, mediated by in-plane diffraction, leads to the formation of collective Mie scattering resonances or Mie surface lattice resonances (M-SLRs), with remarkable narrow line widths. These narrow line widths and the intrinsic electric and magnetic dipole moments of the individual Si nanoparticles allow to resolve electric and magnetic M-SLRs. Incidence angle- and polarization-dependent extin…
Scalable Fabrication of Thermally Reconfigurable Ge Metasurfaces Using Stencil Lithography for Mid-Infrared Molecular Sensing
Department of Biomedical Engineering, University of Wisconsin-Madison（威斯康星大学麦迪逊分校生物医学工程系）；Department of Electrical and Computer Engineering, University of Wisconsin–Madison（威斯康星大学麦迪逊分校电气与计算机工程系）；Department of Physics, Faculty of Science, Istanbul University（伊斯坦布尔大学理学院物理系）
Metasurfaces have appeared as a versatile platform for miniaturized functional nonlinear optics due to their design freedom in tailoring wavefronts. The key factor that limits its application in functional devices is the low conversion efficiency. Recently, dielectric metasurfaces governed by either high-quality factor modes (quasi-bound states in the continuum) or Mie modes, enabling strong light-matter interaction, have become a prolific route to achieve high nonlinear efficiency. Here, we demonstrate both numerically and experimentally an effective way of spatial nonlinear phase control by …
When the feature size of photonic structures becomes comparable or even smaller than the wavelength of light, the fabrication imperfections inevitably introduce disorder that may eliminate many functionalities of subwavelength photonic devices. Here we suggest a novel concept to achieve a robust bandgap which can endure disorder beyond 30 as a result of the transition from photonic crystals to Mie-resonant metamaterials. By utilizing Mie-resonant metamaterials with high refractive index, we demonstrate photonic waveguides and cavities with strong robustness to position disorder, thus providing…
Dielectric optical nanoantennas play an important role in color displays, metasurface holograms, and wavefront shaping applications. They usually exploit Mie resonances as supported on nanostructures with high refractive index, such as Si and TiO2. However, these resonances normally cannot be tuned. Although phase change materials, such as the germanium-antimony-tellurium alloys and post transition metal oxides, such as ITO, have been used to tune optical antennas in the near infrared spectrum, tunable dielectric antennae in the visible spectrum remain to be demonstrated. In this paper, we des…
Metasurfaces are promising tools towards novel designs for flat optics applications. As such their quality and tolerance to fabrication imperfections need to be evaluated with specific tools. However, most such tools rely on the geometrical optics approximation and are not straightforwardly applicable to metasurfaces. In this Letter, we introduce and evaluate, for metasurfaces, parameters such as the intercept factor and the slope error usually defined for solar concentrators in the realm of ray-optics. After proposing definitions valid in physical optics, we put forward an approach to calcula…
This work presents the design and fabrication of simple, polymeric, structure-based optical filters that simultaneously focus light. These filters represent a novel design at the boundary between diffractive optics and metasurfaces that may provide significant advantages for both digital and hyperspectral imaging. The fabrication process for the proposed filters resembles 3D printing, and is based on direct laser writing of a polymeric material using two-photon lithography. In addition, printed structures could be used to create molds for nanoimprint replication and mass production. Filters fo…
Artificial magnetism at optical frequencies can be realized in metamaterials composed of periodic arrays of subwavelength elements, also called "meta-atoms". Optically-induced magnetic moments can be arranged in both unstaggered structures, naturally associated with ferromagnetic (FM) order, or staggered structures, linked correspondingly to antiferromagnetic (AFM) order. Here we demonstrate that such magnetic dipole orders of the lattices of meta-atoms can appear in low-symmetry Mie-resonant metasurfaces where each asymmetric dielectric (non-magnetic) meta-atom supports a localized trapped mo…
High index dielectric nanoantennas excited at Mie-type resonances have exhibited enormous enhancement of optical nonlinearity. Such nanostructures have been actively studied by researchers in the last years. The present work provides the first numerical analysis study of the optical Kerr effect of nanocomposites consisting of high refractive index (GaP) spheres at the wavelength of 532~nm. This is done by means of three-dimensional finite-difference time-domain (FDTD) simulations. The effective nonlinear refractive index of $0.8$~$μ$m thick nanocomposites and metasurfaces is evaluated. It is s…
Metasurfaces control optical wavefronts via arrays of nanoscale resonators laid out across a surface. When combined with III-V semiconductors with strong optical nonlinearities, a variety of nonlinear effects such as harmonic generation and all optical modulation can be enabled and enhanced at the nanoscale. This review presents our research on engineering and boosting nonlinear effects in ultrafast and nonlinear semiconductor metasurfaces fabricated at the Center for Integrated Nanotechnologies (CINT). We cover our recent works on parametric generation of harmonic light via direct and cascade…
Metasurface holography, the reconstruction of holographic images by modulating the spatial amplitude and phase of light using metasurfaces, has emerged as a next-generation display technology. However, conventional fabrication techniques used to realize metaholograms are limited by their small patterning areas, high manufacturing costs, and low throughput, which hinder their practical use. Herein, we demonstrate a high efficiency hologram using a one-step nanomanufacturing method with a titanium dioxide nanoparticle-embedded-resin, allowing for high-throughput and low-cost fabrication. At a si…
Enhancing absorption in optically thin semiconductors is the key in the development of high-performance optical and optoelectronic devices. In this paper, we resort to the concept of degenerate critical coupling and design an ultra-thin semiconductor absorber composed of free-standing GaAs nanocylinder metasurfaces in the near infrared. The numerical results show that perfect absorption can be achieved through overlapping two Mie modes with opposite symmetry, with each mode contributing a theoretical maximum of 50% in their respective critical coupling state. The absorption also shows the pola…
The strong interaction of light with micro- and nanostructures plays a critical role in optical sensing, nonlinear optics, active optical devices, and quantum optics. However, for wavefront shaping, the required local control over light at a subwavelength scale limits this interaction, typically leading to low-quality-factor optical devices. Here, we demonstrate an avenue towards high-quality-factor wavefront shaping in two spatial dimensions based on all-dielectric Huygens metasurfaces by leveraging higher-order Mie resonances. We design and experimentally realize transmissive band stop filte…
We demonstrate that spectrally diverse multiple magnetic dipole resonances can be excited in all-dielectric structures lacking rotational symmetry, in contrast to conventionally used spheres, disks or spheroids. Such multiple magnetic resonances arise from hybrid Mie-Fabry-Pérot modes, and can constructively interfere with induced electric dipole moments, thereby leading to novel multi-frequency unidirectional scattering. Here we focus on elongated dielectric nanobars, whose magnetic resonances can be spectrally tuned by their aspect ratios. Based on our theoretical results, we suggest all-die…
An all-dielectric metasurface featuring resonant conditions of the trapped mode excitation is considered. It is composed of a lattice of subwavelength particles which are made of a high-refractive-index dielectric material structured in the form of disks. Each particle within the lattice behaves as an individual dielectric resonator supporting a set of electric and magnetic (Mie-type) modes. In order to access a trapped mode (which is the TE01 mode of the resonator), a round eccentric penetrating hole is made in the disk. In the lattice, the disks are arranged into clusters (unit super-cells) …
All-dielectric optical metasurfaces are a workhorse in nano-optics due to both their ability to manipulate light in different degrees of freedom and their excellent performance at light frequency conversion. Here, we demonstrate first-time generation of photon pairs via spontaneous parametric-down conversion in lithium niobate quantum optical metasurfaces with electric and magnetic Mie-like resonances at various wavelengths. By engineering the quantum optical metasurface, we tailor the photon-pair spectrum in a controlled way. Within a narrow bandwidth around the resonance, the rate of pair pr…
We develop a simple and reliable analytical model that allows describing the electromagnetic response of all-dielectric metasurfaces consisting of a single-layer array of high-permittivity spherical particles. By combining Mie theory with a bi-dimensional homogenization approach, we derive closed-form expressions of the electric and magnetic surface impedances exhibited by the metasurface and, thus, its reflection and transmission coefficients. The effectiveness of the proposed approach is validated through a set of full-wave simulations. The availability of the analytical model here developed…
