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arXiv 1909.00503cond-mat.mtrl-sci
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用μ子模拟In-Ga-Zn-O半导体中间隙氢的电子结构

Electronic structure of interstitial hydrogen in In-Ga-Zn-O semiconductor simulated by muon

K. M. Kojima, M. Hiraishi, H. Okabe, A. Koda, 2 R. Kadono, K. Ide, S. Matsuishi, H. Kumomi, T. Kamiya, H. Hosono

摘要:

利用μ子自旋旋转/弛豫($μ$ SR)实验研究了In-Ga-Zn氧化物(IGZO)半导体中间隙μ子赝氢的局域电子结构.在多晶(c-)IGZO中,Mu处于抗磁状态,零外场下的$μ$ SR时间谱可以用Gaussian Kubo-Toyabe弛豫函数来描述,其中线宽$Δ$可以作为In/Ga核磁矩随机局域场的灵敏度量. $Δ$的大小与H的密度泛函理论计算相结合(模拟Mu)表明,Mu占据Zn-O键中心位置(Mu $_{\rm BC}$)类似于晶体ZnO中的情况。这意味着c-IGZO中的抗磁性状态对应于Mu $_{\rm BC}^+$,因此充当电子供体。在非晶(a-)IGZO中,沉积膜中的局部Mu结构与c-IGZO中的结构几乎相同,表明Mu $_{\rm BC}^+$为电子态。相反,在高度氢化的a-IGZO膜的抗磁信号表现出洛伦兹Kubo-Toyabe弛豫,这意味着Mu伴随着更不均匀的分布的相邻核自旋,可能涉及Mu $^-$ H $^-$ -复合状态中的氧空位。

英文摘要:

We report on the local electronic structure of interstitial muon (Mu) as pseudo-hydrogen in In-Ga-Zn oxide (IGZO) semiconductor studied by muon spin rotation/relaxation ($μ$SR) experiment. In polycrystalline (c-) IGZO, it is inferred that Mu is in a diamagnetic state, where the $μ$SR time spectra under zero external field is perfectly described by the Gaussian Kubo-Toyabe relaxation function with the linewidth $Δ$ serving as a sensitive measure for the random local fields from In/Ga nuclear magnetic moments. The magnitude of $Δ$ combined with the density functional theory calculations for H (to mimic Mu) suggests that Mu occupies Zn-O bond-center site (Mu$_{\rm BC}$) similar to the case in crystalline ZnO. This implies that the diamagnetic state in c-IGZO corresponds to Mu$_{\rm BC}^+$, thus serving as an electron donor. In amorphous (a-) IGZO, the local Mu structure in as-deposited films is nearly identical with that in c-IGZO, suggesting Mu$_{\rm BC}^+$ for the electronic state. In contrast, the diamagnetic signal in heavily hydrogenated a-IGZO films exhibits the Lorentzian Kubo-Toyabe relaxation, implying that Mu accompanies more inhomogeneous distribution of the neighboring nuclear spins that may involve Mu$^-$H$^-$-complex state in an oxygen vacancy.

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