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arXiv 1609.05947cond-mat.mes-hallphysics.data-an
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高k NMOS晶体管中零时间与随时间变化关系的研究

Investigation of Dependence between Time-zero and Time-dependent Variability in High-k NMOS Transistors

Mohammad Khaled Hassan, Kaushik Roy

摘要:

偏置温度不稳定性(BTI)是CMOS技术中的主要可靠性问题,特别是对于高介电常数(高- \k{appa} /HK)金属栅极(MG)晶体管。此外,由于器件的急剧缩小,与时间无关的工艺引起的变化也增加了。结果,在较低阈值电压分布尾部处的较快器件经历较高应力,导致BTI降级中的额外偏斜。由于NMOS器件中的时间相关的介质击穿(TDDB)和应力诱导的漏电流(SILC)与BTI相关,因此有必要同时研究时间零点变化对所有这些效应的影响。为此,我们提出了一个模拟框架来建模和分析不同的老化效应上的时间零点的可变性(特别是,随机掺杂剂波动)的影响。对于30 nm工艺的小面积器件(~1000 nm 2),我们观察到随机掺杂涨落(RDF)对BTI诱导的可变性(σΔVth)的显著影响。此外,电路分析揭示了类似的性能退化趋势。然而,TDDB和SILC都表现出对RDF的弱依赖性。我们得出结论,RDF对Vth退化的影响不能忽视的缩放技术,需要考虑的变化容限电路设计。

英文摘要:

Bias Temperature Instability (BTI) is a major reliability concern in CMOS technology, especially with High dielectric constant (High-\k{appa}/HK) metal gate (MG) transistors. In addition, the time independent process induced variation has also increased because of the aggressive scaling down of devices. As a result, the faster devices at the lower threshold voltage distribution tail experience higher stress, leading to additional skewness in the BTI degradation. Since time dependent dielectric breakdown (TDDB) and stress-induced leakage current (SILC) in NMOS devices are correlated to BTI, it is necessary to investigate the effect of time zero variability on all these effects simultaneously. To that effect, we propose a simulation framework to model and analyze the impact of time-zero variability (in particular, random dopant fluctuations) on different aging effects. For small area devices (~1000 nm2) in 30nm technology, we observe significant effect of Random Dopant Fluctuation (RDF) on BTI induced variability (σΔVth). In addition, the circuit analysis reveals similar trend on the performance degradation. However, both TDDB and SILC show weak dependence on RDF. We conclude that the effect of RDF on Vth degradation cannot be disregarded in scaled technology and needs to be considered for variation tolerant circuit design.

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