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arXiv 0907.5028cond-mat.mtrl-scicond-mat.mes-hall
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在SiC衬底上形成石墨烯

Graphene formation on SiC substrates

Brenda L. VanMil, Rachael L. Myers-Ward, Joseph L. Tedesco, Charles R. Eddy,, Glenn G. Jernigan, James C. Culbertson, Paul M. Campbell, Joseph M. McCrate, Steph… 展开作者

Brenda L. VanMil, Rachael L. Myers-Ward, Joseph L. Tedesco, Charles R. Eddy,, Glenn G. Jernigan, James C. Culbertson, Paul M. Campbell, Joseph M. McCrate, Stephen A. Kitt, D. Kurt Gaskill

摘要:

在半绝缘、同轴、4 H-和6 H-SiC衬底的C和Si面上产生石墨烯层。该工艺在高真空(<10-4毫巴)下在商业化学气相沉积SiC反应器中进行。开发了一种用于H2蚀刻轴上衬底的方法,以对于每个多型体产生在Si面上具有0.5nm的高度和在C面上具有1.0至1.5nm的高度的表面台阶。开发了在H2蚀刻之后立即在衬底上形成石墨烯的工艺,并且这些样品的拉曼光谱证实了石墨烯的形成。描述了石墨烯的形貌。对于这两个面,在石墨烯形成过程中,下面的衬底形态被显着修改;表面台阶高达15 nm高,有时会失去均匀的台阶形态。通过对大面积(16 mm见方)和小面积(2和10 μ m见方)样品的霍尔效应测量,给出了迁移率和片状载流子浓度,并与最近的报道进行了比较。

英文摘要:

Graphene layers were created on both C and Si faces of semi-insulating, on-axis, 4H- and 6H-SiC substrates. The process was performed under high vacuum (<10-4 mbar) in a commercial chemical vapor deposition SiC reactor. A method for H2 etching the on-axis sub-strates was developed to produce surface steps with heights of 0.5 nm on the Si-face and 1.0 to 1.5 nm on the C-face for each polytype. A process was developed to form graphene on the substrates immediately after H2 etching and Raman spectroscopy of these samples confirmed the formation of graphene. The morphology of the graphene is described. For both faces, the underlying substrate morphology was significantly modified during graphene formation; sur-face steps were up to 15 nm high and the uniform step morphology was sometimes lost. Mo-bilities and sheet carrier concentrations derived from Hall Effect measurements on large area (16 mm square) and small area (2 and 10 um square) samples are presented and shown to compare favorably to recent reports.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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