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arXiv 1109.4397cond-mat.mes-hallcond-mat.mtrl-sci
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石墨烯在SiC上生长层数的确定及其厚度依赖性

Layer Number Determination and Thickness-dependent Properties of Graphene Grown on SiC

Wenjuan Zhu, Christos Dimitrakopoulos, Marcus Freitag, Phaedon Avouris

摘要:

在碳化硅(SiC)的碳表面上生长的少层石墨烯的电子性质被发现强烈地依赖于层数。载流子迁移率在较厚的石墨烯中更大,因为在较高层中与衬底相关的散射减少。迁移率的载流子密度依赖性在薄和厚石墨烯中是定性不同的,其中转变发生在约2层处。在厚的石墨烯中,迁移率随着载流子密度而增加,类似于从天然石墨剥离的多层石墨烯,这表明尽管有报道记录了C面生长的石墨烯中的非Bernal堆叠顺序,但各个层仍然电耦合。由于态密度的增加,霍尔系数峰值在厚石墨烯中降低。因此,非常需要一种可靠且快速的层数表征工具。迄今为止,AFM高度测定和拉曼散射通常被使用,因为SiC上的石墨烯的光学对比度较弱。然而,这两种方法都具有低吞吐量的缺点。我们表明,扫描电子显微镜(SEM)的对比度可以得到类似的结果,更高的吞吐量。

英文摘要:

The electronic properties of few-layer graphene grown on the carbon-face of silicon carbide (SiC) are found to be strongly dependent on the number of layers. The carrier mobility is larger in thicker graphene because substrate-related scattering is reduced in the higher layers. The carrier density dependence of the mobility is qualitatively different in thin and thick graphene, with the transition occurring at about 2 layers. The mobility increases with carrier density in thick graphene, similar to multi-layer graphene exfoliated from natural graphite, suggesting that the individual layers are still electrically coupled in spite of reports recording non-Bernal stacking order in C-face grown graphene. The Hall coefficient peak value is reduced in thick graphene due to the increased density of states. A reliable and rapid characterization tool for the layer number is therefore highly desirable. To date, AFM height determination and Raman scattering are typically used since the optical contrast of graphene on SiC is weak. However, both methods suffer from low throughput. We show that the scanning electron microscopy (SEM) contrast can give similar results with much higher throughput.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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