arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 0904.4688cond-mat.mes-hallcond-mat.mtrl-sci
收藏

离子注入形成量子计算机测试结构的关键问题

Critical issues in the formation of quantum computer test structures by ion implantation

T. Schenkel, C. C. Lo, C. D. Weis, A. Schuh, A. Persaud, J. Bokor

摘要:

通过离子注入在硅中形成量子计算机测试结构使得能够表征具有掺杂剂原子系综的自旋读出机制和单原子器件的开发。我们简要地回顾了最近的结果,在自旋相关的传输和单离子掺杂的表征,然后讨论的扩散和分离行为的磷,锑和铋离子从低注量,低能量的二次离子质谱(SIMS)的深度剖析,其特征在于通过。发现磷和铋在活化退火过程中偏析到SiO2/Si界面,而锑扩散被发现是最小的。本文还讨论了离子电荷状态对121 Sb ~(25+)在SiO_2/Si中的射程的影响。

英文摘要:

The formation of quantum computer test structures in silicon by ion implantation enables the characterization of spin readout mechanisms with ensembles of dopant atoms and the development of single atom devices. We briefly review recent results in the characterization of spin dependent transport and single ion doping and then discuss the diffusion and segregation behaviour of phosphorus, antimony and bismuth ions from low fluence, low energy implantations as characterized through depth profiling by secondary ion mass spectrometry (SIMS). Both phosphorus and bismuth are found to segregate to the SiO2/Si interface during activation anneals, while antimony diffusion is found to be minimal. An effect of the ion charge state on the range of antimony ions, 121Sb25+, in SiO2/Si is also discussed.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

↑