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arXiv physics/9810027physics.plasm-phphysics.comp-ph
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低压正负电等离子体的蒙特卡罗分析

Analysis of low pressure electro-positive and electro-negative rf plasmas with Monte Carlo method

M. Ardehali

摘要:

本文采用粒子模拟/蒙特卡罗方法模拟了频率为10 MHz的低压正负电等离子体。给出了等离子体的电势、电场、电子和离子密度以及流过等离子体的电流。为了比较正电性气体和负电性气体的物理性质,将输入电压从1000伏降低到350伏。模拟结果表明,负离子的引入对电场的时空变化以及电子、离子和位移电流的行为产生了显著的影响。特别是,数值模拟预测形成的双电层在等离子体鞘层边界的电负性放电。

英文摘要:

Particle-in-cell/Monte Carlo technique is used to simulate low pressure electro-negative and electro-positive plasmas at a frequency of 10 MHz. The potential, electric field, electron and ion density, and currents flowing across the plasma are presented. To compare the physical properties of the electro-positive gas with those of an electro-negative gas, the input voltage was decreased from 1000 Volts to 350 Volts. The simulation results indicate that the introduction of negative ions induces dramatic effects on the spatial and temporal variation of the electric field and on the behavior of the electron, ion, and displacement currents. In particular, the numerical modeling predicts the formation of double-layer at the plasma-sheath boundary of electro-negative discharge.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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