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arXiv 1105.2687physics.plasm-ph
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通过质谱法诊断低和atmospheric pressure等离子体

Diagnostics of low and atmospheric pressure plasmas by means of mass spectrometry

Jan Benedikt, Dirk Ellerweg, Achim von Keudell

摘要:

对于理解薄膜的生长或蚀刻,诸如自由基或高能离子的活性物质到表面的绝对通量的知识是至关重要的。这些物种由于其高反应性而具有非常低的密度,因此它们的检测是一项具有挑战性的任务。质谱是一种非常灵敏的技术,它将被证明是研究等离子体化学的一个很好的选择。质谱法直接在表面测量等离子体组成,并且不受可接近的光学跃迁的存在的限制。当适当设计和仔细校准时,质谱法提供了测量物质的绝对密度。它甚至可以测量内部激发的亚稳态物质。在这里,中性物种和正离子产生的大气压等离子体射流与他,六甲基二硅氧烷和O2的测量。

英文摘要:

The knowledge of absolute fluxes of reactive species such as radicals or energetic ions to the surface is crucial for understanding the growth or etching of thin films. These species have due to their high reactivity very low densities and their detection is therefore a challenging task. Mass spectrometry is a very sensitive technique and it will be demonstrated that it is a good choice for the study of plasma chemistry. Mass spectrometry measures the plasma composition directly at the surface and is not limited by existence of accessible optical transitions. When properly designed and carefully calibrated mass spectrometry provides absolute densities of the measured species. It can even measure internally excited metastable species. Here, measurement of neutral species and positive ions generated in an atmospheric pressure plasmas jet operated with He, hexamethyldisiloxane and O2 will be presented.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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