发表机构
NIST; University of Maryland, College Park（美国国家标准与技术研究院; 马里兰大学帕克分校）
机构由 AI 辅助整理，请以论文原文为准。AI 中文总结
本文介绍了一套结合多种等离子体诊断技术的实验装置，用于表征纳米量热计传感器，并展示了其在区分电子/离子热通量和检测脉冲放电温度瞬变方面的应用，旨在推动纳米量热测量作为等离子体加工的实时计量工具。
AI 中文摘要
最近已有报道将微加工纳米量热计应用于低压等离子体放电能量通量的实时、高灵敏度和选择性监测。本文描述了利用等离子体诊断技术对纳米量热计性能进行补充表征的实验装置。等离子体监测套件包括朗缪尔探针、阻滞场能量分析器（RFEA）、光学发射光谱（OES）、四极质谱（QMS）和基于热电偶的测温法。我们讨论了该等离子体监测套件的两个应用实例：（1）通过传感器直流（DC）偏置区分电子和离子诱导的热通量；（2）检测脉冲放电中的快速温度瞬变。本工作的主要目标是展示纳米量热测量平台作为等离子体加工和过程控制的实时计量工具。
英文摘要
The application of microfabricated nanocalorimeters for real-time, highly sensitive, and selective monitoring of the energy fluxes from low-pressure plasma discharges has been reported recently. Here, we describe the experimental setup for complementary characterization of nanocalorimeters performance using plasma diagnostics techniques. Langmuir probe, retarding field energy analyzer (RFEA), optical emission spectroscopy (OES), quadrupole mass spectrometry (QMS), and thermocouple-based thermometry constitute the plasma monitor suite. We discuss two application examples of the plasma monitor suite: (1) discrimination between electron- and ion-induced heat fluxes via sensor direct current (DC) biasing, and (2) detection of fast temperature transients in pulsed discharges. The main goal of this work is to demonstrate a nanocalorimetry platform as a real-time metrology for plasma processing and process control.
