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arXiv 1104.3786physics.plasm-ph
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atmospheric pressure微米射流等离子体源的光谱特性

Spectroscopic characterization of atmospheric pressure um-jet plasma source

Nikita Bibinov, Nikolas Knake, Hendrik Bahre, Peter Awakowicz, Volker Schulz-von der Gathen

摘要:

研究了一种使用He/O2混合气体的射频微射流等离子体源。这种微射流可以用于不同的应用,作为化学活性物质的来源,例如氧原子,分子可降解物和臭氧。利用绝对校准的发射光谱技术和数值模拟方法,确定了等离子体激活区的气体温度和等离子体参数(电子密度和电子分布函数)。使用发射和吸收光谱法测量等离子体通道中和等离子体源的流出物中的氧原子和臭氧的浓度。为了解释测量的空间分布,稳态物种的浓度计算使用确定的等离子体参数和气体温度。在此基础上,讨论了等离子体源中表面过程和气体流动状态对活性组分损失的影响。将实测的氧原子和臭氧浓度的空间分布与模拟结果进行了比较。

英文摘要:

A radio frequency um-jet plasma source is studied using He/O2 mixture. This um-jet can be used for different applications as a source of chemical active species e.g. oxygen atoms, molecular metastables and ozone. Using absolutely-calibrated optical emission spectroscopy and numerical simulation, the gas temperature in active plasma region and plasma parameters (electron density and electron distribution function) are determined. Concentrations of oxygen atoms and ozone in the plasma channel and in the effluent of the plasma source are measured using emission and absorption spectroscopy. To interpret the measured spatial distributions, the steady-state species' concentrations are calculated using determined plasma parameters and gas temperature. At that the influence of the surface processes and gas flow regime on the loss of the active species in the plasma source are discussed. The measured spatial distributions of oxygen atom and ozone densities are compared with the simulated ones.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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