大气等离子体诱导的基于PCB的等离子体源表面改性：介电材料与电极材料的比较研究
Surface Modifications of PCB-Based Plasma Sources Induced by Atmospheric Plasma: A Comparative Study of Dielectric and Electrode Materials
AI总结：
本研究比较了大气等离子体对FR-4、PTFE、Al$_2$O$_3$介电材料及铜、银、镀金铜电极的表面改性效应，发现Al$_2$O$_3$和银最耐受，FR-4变化最大，为等离子体源材料选择提供依据。
摘要：
本研究考察了大气等离子体对表面微放电等离子体源中使用的各种介电材料（FR-4、PTFE、Al$_2$O$_3$）和电极材料（铜、银、镀金铜）的影响。采用XPS和激光显微镜分析了等离子体暴露10小时后表面性质和化学成分的变化。Al$_2$O$_3$表现出最高的耐受性，Al/O比和氧化态均无显著变化。PTFE发生了氧化，氟被氧取代，形成羰基、羟基和醛基。FR-4表现出最显著的变化，环氧树脂基体被刻蚀，暴露出玻璃纤维。这与XPS结果一致，显示O/C比升高、环氧基团减少以及氮信号增强。银电极最具耐受性，烧结颗粒在Al$_2$O$_3$表面重新分布。铜和镀金铜电极更容易发生氧化和降解，尤其是在暴露于等离子体细丝的区域。这些结果凸显了根据抗等离子体暴露能力和应用兼容性精心选择材料的重要性。
英文摘要：
The study investigated the effects of atmospheric plasma on various dielectric materials (FR-4, PTFE, Al$_2$O$_3$) and electrode materials (copper, silver, gold-plated copper) used in surface micro-discharge plasma sources. XPS and laser microscopy were used to analyze changes in surface properties and chemical composition after 10 hours of plasma exposure. Al$_2$O$_3$ showed the highest resistance, with no significant changes in Al/O ratio or oxidation state. PTFE underwent oxidation, with fluorine substituted by oxygen, forming carbonyl, hydroxyl and aldehyde groups. FR-4 showed the most substantial changes, with etching of the epoxy matrix exposing glass fibers. This was in line with the XPS results, which show a higher O/C-ratio, less epoxy groups and higher nitrogen signals. Silver electrodes were most resilient, with sintered particles redistributed across the Al$_2$O$_3$ surface. Copper and gold-plated copper electrodes were more susceptible to oxidation and degradation, especially in areas exposed to plasma filaments. The results highlight the importance of carefully selecting materials based on resistance to plasma exposure and compatibility with the application.
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