利用atmospheric pressure脉冲等离子体源在圆管内壁沉积非晶碳膜
Amorphous carbon film deposition on inner surface of tubes using atmospheric pressure pulsed filamentary plasma source
摘要：
在内径为6 mm、外径为8 mm的石英管的内表面上沉积均匀的非晶碳膜。在含有甲烷混合物的氩气中，在管内产生长等离子体细丝（~ 140 mm）作为正放电。FTIR-ATR、XRD、SEM、LSM和XPS分析表明，沉积膜是由未氢化的sp2碳和氢化的sp3碳组成的非晶态。等离子体的特点是使用光学发射光谱，电压-电流测量，显微摄影和数值模拟。在观察到的等离子体参数的基础上，薄膜沉积过程的动力学进行了讨论。
英文摘要：
Uniform amorphous carbon film is deposited on the inner surface of quartz tube having the inner diameter of 6 mm and the outer diameter of 8 mm. A pulsed filamentary plasma source is used for the deposition. Long plasma filaments (~ 140 mm) as a positive discharge are generated inside the tube in argon with methane admixture. FTIR-ATR, XRD, SEM, LSM and XPS analyses give the conclusion that deposited film is amorphous composed of non-hydrogenated sp2 carbon and hydrogenated sp3 carbon. Plasma is characterized using optical emission spectroscopy, voltage-current measurement, microphotography and numerical simulation. On the basis of observed plasma parameters, the kinetics of the film deposition process is discussed.
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