Electrical post-fabrication tuning of aluminum Josephson junctions at room temperature
Chalmers University of Technology（查尔姆斯理工大学）；Department of Microtechnology and Nanoscience（微技术和纳米科学系）；Silicon Quantum Computing Pty Ltd.（硅量子计算有限公司）；UNSW Sydney（新南威尔士大学悉尼分校）
Christian Križan, Maurizio Toselli, Irshad Ahmad, Hadi Khaksaran, Marcus Rommel, Nermin Trnjanin, Janka Biznárová, Mamta Dahiya, Emil Hogedal, Halldór Jakobsson… 展开作者
Christian Križan, Maurizio Toselli, Irshad Ahmad, Hadi Khaksaran, Marcus Rommel, Nermin Trnjanin, Janka Biznárová, Mamta Dahiya, Emil Hogedal, Halldór Jakobsson, Andreas Nylander, Jonas Bylander, Per Delsing, Giovanna Tancredi
Josephson junctions are key elements of superconducting quantum technology, serving as the core building blocks of superconducting qubits. We present an experimental study on room-temperature electrical tuning of aluminum junctions, showing that voltage pulses can controllably increase their resistance and adjust the Josephson energy while maintaining qubit quality factors above 1 million. We find that the rate of resistance increase scales exponentially with pulse amplitude during manipulation. Following the manipulation, the resistance increases spontaneously through contributions proportional to both the initial resistance and the preceding manipulation. We show that this spontaneous increase halts at cryogenic temperatures, and resumes again at room temperature. Using our stepwise protocol, we achieve up to a 270% increase in junction resistance, corresponding to a reduction of nearly 2 GHz of the qubit transition frequency. These results establish the achievable range, relaxation behavior, and practical limits of electrical tuning, enabling post-fabrication mitigation of frequency crowding in quantum processors.
Nonequilibrium quasiparticles are ubiquitous in superconducting electronics. These quasiparticles can trap in the internal Andreev bound states of a phase-biased Josephson junction, providing a mechanism for studying their presence and behavior. We characterize a quasiparticle trapping detector device based on a two-junction aluminum nanobridge superconducting quantum interference device incorporated into a transmission-line resonator. When flux-biased, distinct resonant frequencies develop depending on the trapped quasiparticle number. We demonstrate continuous detection of up to 3 trapped qu…
We present the driven response at T=30mK of 6 GHz superconducting resonators constructed from capacitively-shunted three dimensional (3D) aluminum nanobridge superconducting quantum interference devices (nanoSQUIDs). We observe flux modulation of the resonant frequency in quantitative agreement with numerical calculation and characteristic of near-ideal short weak link junctions. Under strong microwave excitation, we observe stable bifurcation in devices with coupled quality factor (Q) ranging from ~30-3500. Near this bias point, parametric amplification with > 20dB gain, 40 MHz bandwidth, and…
We report on the fabrication and characterization of 50 Ohms, flux-tunable, low-loss, SQUID-based transmission lines. The fabrication process relies on the deposition of a thin dielectric layer (few tens of nanometers) via Atomic Layer Deposition (ALD) on top of a SQUID array, the whole structure is then covered by a non-superconducting metallic top ground plane. We present experimental results from five different samples. We systematically characterize their microscopic parameters by measuring the propagating phase in these structures. We also investigate losses and discriminate conductor fro…
Josephson junctions form the essential non-linearity for almost all superconducting qubits. The junction is formed when two superconducting electrodes come within $\sim$1 nm of each other. Although the capacitance of these electrodes is a small fraction of the total qubit capacitance, the nearby electric fields are more concentrated in dielectric surfaces and can contribute substantially to the total dissipation. We have developed a technique to experimentally investigate the effect of these electrodes on the quality of superconducting devices. We use $λ$/4 coplanar waveguide resonators to emu…
Hybrid superconductor-semiconductor structures attract increasing attention owing to a variety of potential applications in quantum computing devices. They can serve to the realization of topological superconducting systems, as well as gate-tunable superconducting quantum bits. Here we combine a SiGe/Ge/SiGe quantum-well heterostructure hosting high-mobility two-dimensional holes and aluminum superconducting leads to realize prototypical hybrid devices, such as Josephson field-effect transistors (JoFETs) and superconducting quantum interference devices (SQUIDs). We observe gate-controlled supe…
Intrinsic Josephson junction (IJJ) stacks of cuprate superconductors have potential to be implemented as intrinsic phase qubits working at relatively high temperatures. We report success in fabricating submicron La$_{2-x}$Sr$_{x}$CuO$_{4}$ (LSCO) IJJ stacks carved out of single crystals. We also show a new fabrication method in which argon ion etching is performed after focused ion beam etching. As a result, we obtained an LSCO IJJ stack in which resistive multi-branches appeared. It may be possible to control the number of stacked IJJs with an accuracy of a single IJJ by developing this metho…
We present the fabrication and characterization of transmon qubits formed from aluminum Josephson junctions on two different silicon-based substrates: (i) high-resistivity silicon (Si) and (ii) silicon-on-insulator (SOI). Key to the qubit fabrication process is the use of an anhydrous hydrofluoric vapor process which removes silicon surface oxides without attacking aluminum, and in the case of SOI substrates, selectively removes the lossy buried oxide underneath the qubit region. For qubits with a transition frequency of approximately $5$GHz we find qubit lifetimes and coherence times comparab…
We present an improved fabrication process for overlapping aluminum gate quantum dot devices on Si/SiGe heterostructures that incorporates low-temperature inter-gate oxidation, thermal annealing of gate oxide, on-chip electrostatic discharge (ESD) protection, and an optimized interconnect process for thermal budget considerations. This process reduces gate-to-gate leakage, damage from ESD, dewetting of aluminum, and formation of undesired alloys in device interconnects. Additionally, cross-sectional scanning transmission electron microscopy (STEM) images elucidate gate electrode morphology in …
The flux as measured by the Josephson effect in a SQUID-like configuration with a ferromagnetic core inserted into its center, is shown to be sensitive to the vector potential arising from the central ferromagnetic core, even when the core is covered with a superconducting material that prevents any magnetic field lines from ever reaching the perimeter of the SQUID-like configuration. This leads to a macroscopic, Aharonov-Bohm-like effect that is observable in an asymmetric hysteresis loop in the response of the SQUID-like configuration to an externally applied magnetic field.
In superconducting quantum devices, air bridges enable increased circuit complexity and density as well as mitigate the risk of microwave loss arising from mode mixing. We implement aluminum air bridges using a simple process based on single-step electron-beam gradient exposure. The resulting bridges have sizes ranging from $20~μm$ to $100~μm$, with a yield exceeding $99~\%$ for lengths up to $36~μm$. When used to connect ground planes in coplanar waveguide resonators, the induced loss contributed to the system is negligible, corresponding to a reduction of the quality factor exceeding $1.0\ti…
We describe fabrication and testing of composite flux qubits combining Nb- and Al-based superconducting circuit technology. This hybrid approach to making qubits allows for employing pi-phase shifters fabricated using well-established Nb-based technology of superconductor-ferromagnet-superconductor Josephson junctions. The important feature here is to obtain high interface transparency between Nb and Al layers without degrading sub-micron shadow mask. We achieve this by in-situ Ar etching using e-beam gun. Shadow-evaporated Al/AlOx/Al Josephson junctions with Nb bias pads show the expected cur…
Characterization of process-related interfacial dielectric loss in aluminum-on-silicon by resonator microwave measurements, materials analysis, and imaging
Surface Optimization of Superconducting Aluminum Resonators for Robust Quantum Device Fabrication
Fraunhofer Institut für Elektronische Mikrosysteme und Festkörpertechnologien EMFT（弗劳恩霍夫电子微系统和固态技术研究所）；Center Integrated Sensor Systems (SENS), Universität der Bundeswehr München（联邦国防大学慕尼黑集成传感器系统中心）
Conventional superconducting qubits have used Josephson junctions as an essential part to provide anharmonicity for well-separated energy-level spacings. However, because a superconducting ring without Josephson junctions has intrinsically well-separated energy-level spacings, Josephson junctions are not necessary as long as one can achieve single-qubit operations. We show that the orbital angular momentum of light can be adopted as a qubit-control means and can eliminate the need for Josephson junctions. The feasibility study reveals that the proposed qubit has many advantages over the previo…
We introduce a simplified fabrication technique for Josephson junctions and demonstrate superconducting Xmon qubits with $T_1$ relaxation times averaging above 50$~μ$s ($Q>$1.5$\times$ 10$^6$). Current shadow-evaporation techniques for aluminum-based Josephson junctions require a separate lithography step to deposit a patch that makes a galvanic, superconducting connection between the junction electrodes and the circuit wiring layer. The patch connection eliminates parasitic junctions, which otherwise contribute significantly to dielectric loss. In our patch-integrated cross-type (PICT) juncti…
Magnetic-field-resilient superconducting circuits enable sensing applications and hybrid quantum-computing architectures involving spin or topological qubits and electro-mechanical elements, as well as studying flux noise and quasiparticle loss. We investigate the effect of in-plane magnetic fields up to 1 T on the spectrum and coherence times of thin-film 3D aluminum transmons. Using a copper cavity, unaffected by strong magnetic fields, we can solely probe the magnetic-field effect on the transmons. We present data on a single-junction and a SQUID transmon, that were cooled down in the same …
The most commonly used physical realization of superconducting qubits for quantum circuits is a transmon. There are a number of superconducting quantum circuits applications, where Josephson junction critical current reproducibility over a chip is crucial. Here, we report on a robust chip scale $Al/AlO_x/Al$ junctions fabrication method due to comprehensive study of shadow evaporation and oxidation steps. We experimentally demonstrate the evidence of optimal Josephson junction electrodes thickness, deposition rate and deposition angle, which ensure minimal electrode surface and line edge rough…
Superconducting quantum information processing machines are predominantly based on microwave circuits with relatively low characteristic impedance, of about 100 Ohm, and small anharmonicity, which can limit their coherence and logic gate fidelity. A promising alternative are circuits based on so-called superinductors, with characteristic impedances exceeding the resistance quantum $R_Q = 6.4$ k$Ω$. However, previous implementations of superinductors, consisting of mesoscopic Josephson junction arrays, can introduce unintended nonlinearity or parasitic resonant modes in the qubit vicinity, degr…
Josephson junctions (JJs) with Josephson energy $E_J \lesssim 1K$ are widely employed as non-linear elements in superconducting circuits for quantum computing, operating at milli-Kelvin temperatures. Here we experimentally study incoherent phase slips (IPS) in low-$E_J$ Aluminum-based JJs at $T<0.2K$, where the IPS become the dominant source of dissipation. We observed strong suppression of the critical (switching) current and a very rapid growth of the zero-bias resistance with decreasing Josephson energy below $E_J \sim 1K$. This behavior is attributed to the IPSs whose rate exponentially in…
We present measurements of 1/f frequency noise in both linear and Josephson-junction-embedded superconducting aluminum resonators in the low power, low temperature regime - typical operating conditions for superconducting qubits. The addition of the Josephson junction does not result in additional frequency noise, thereby placing an upper limit for fractional critical current fluctuations of $10^{-8}$ (Hz$^{-1/2}$) at 1 Hz for sub-micron, shadow evaporated junctions. These values imply a minimum dephasing time for a superconducting qubit due to critical current noise of 40 -- 1400 $μ$s dependi…
We fabricate Josephson field-effect-transistors in germanium quantum wells contacted by superconducting aluminum and demonstrate supercurrents carried by holes that extend over junction lengths of several micrometers. In superconducting quantum point contacts we observe discretization of supercurrent, as well as Fabry-Perot resonances, demonstrating ballistic transport. The magnetic field dependence of the supercurrent follows a clear Fraunhofer-like pattern and Shapiro steps appear upon microwave irradiation. Multiple Andreev reflections give rise to conductance enhancement and evidence a tra…
Nanofabrication techniques for superconducting qubits rely on resist-based masks patterned by electron-beam or optical lithography. We have developed an alternative nanofabrication technique based on free-standing silicon shadow masks fabricated from silicon-on-insulator wafers. These silicon shadow masks not only eliminate organic residues associated with resist-based lithography, but also provide a pathway to better understand and control surface-dielectric losses in superconducting qubits by decoupling mask fabrication from substrate preparation. We have successfully fabricated aluminum 3D …
The structural and nanochemical properties of thin $AlO_x$ layers are decisive for the performance of advanced electronic devices. For example, they are frequently used as tunnel barriers in Josephson junction-based superconducting devices. However, systematic studies of the influence of oxidation parameters on structural and nanochemical properties are rare up to now, as most studies focus on the electrical properties of $AlO_x$ layers. This study aims to close this gap by applying transmission electron microscopy in combination with electron energy loss spectroscopy to analyze the structural…
As superconducting quantum circuits scale to larger sizes, the problem of frequency crowding proves a formidable task. Here we present a solution for this problem in fixed-frequency qubit architectures. By systematically adjusting qubit frequencies post-fabrication, we show a nearly ten-fold improvement in the precision of setting qubit frequencies. To assess scalability, we identify the types of 'frequency collisions' that will impair a transmon qubit and cross-resonance gate architecture. Using statistical modeling, we compute the probability of evading all such conditions, as a function of …
A macroscopic spintronic qubit based on spin superfluidity and spin Hall phenomena is proposed. This magnetic quantum information processing device realizes the spin-supercurrent analog of the superconducting phase qubit and allows for full electrical control and readout. We also show that an array of interacting magnetic phase qubits can realize a quantum annealer. These devices can be built through standard solid-state fabrication technology, allowing for scalability. However, the upper bound for the operational temperature can, in principle, be higher than the superconducting counterpart, a…
Superconducting electronic devices have re-emerged as contenders for both classical and quantum computing due to their fast operation speeds, low dissipation and long coherence times. An ultimate demonstration of coherence is lasing. We use one of the fundamental aspects of superconductivity, the ac Josephson effect, to demonstrate a laser made from a Josephson junction strongly coupled to a multi-mode superconducting cavity. A dc voltage bias to the junction provides a source of microwave photons, while the circuit's nonlinearity allows for efficient down-conversion of higher order Josephson …
Scalability in the fabrication and operation of quantum computers is key to move beyond the NISQ era. So far, superconducting transmon qubits based on aluminum Josephson tunnel junctions have demonstrated the most advanced results, though this technology is difficult to implement with large-scale facilities. An alternative "gatemon" qubit has recently appeared, which uses hybrid superconducting/semiconducting (S/Sm) devices as gate-tuned Josephson junctions. Current implementations of these use nanowires however, of which the large-scale fabrication has not yet matured either. A scalable gatem…
