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arXiv 2410.01484cond-mat.mes-hallcond-mat.mtrl-scicond-mat.otherphysics.app-ph
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SiO2/Si衬底上不同原子层数石墨烯的湿敏特性

Humidity Sensing Properties of Different Atomic Layers of Graphene on SiO2/Si Substrate

Qiang Gao, Hongliang Ma, Chang He, Xiaojing Wang, Jie Ding, Wendong Zhang, Xuge Fan

AI总结:

该研究制备并比较SiO2/Si衬底上1至3层石墨烯湿度传感器,揭示层数和传感面积对响应度及响应/恢复时间的影响,并将双层器件用于呼吸与非接触手指监测。

摘要:

石墨烯凭借超高的比表面积和电导率,在湿度传感领域具有巨大应用潜力。然而,SiO2/Si衬底上不同原子层数石墨烯对湿度传感性能的影响迄今尚未得到研究。本文在SiO2/Si衬底上制备了三种基于1至3个原子层石墨烯的湿度传感器,其中石墨烯的传感面积分别为75 μm×72 μm和45 μm×72 μm。我们研究了石墨烯原子层数和石墨烯传感面积对所制备石墨烯基湿度传感器响应度以及响应/恢复时间的影响。研究发现,在相同的相对湿度变化下,所制备器件的相对电阻变化随石墨烯原子层数的增加而减小。此外,基于三层石墨烯的器件表现出最快的响应/恢复时间,而基于双层石墨烯的器件则表现出最慢的响应/恢复时间。最后,我们选择了具有相对较好响应度和稳定性的双层石墨烯器件,将其应用于呼吸监测和非接触式手指监测。

英文摘要:

Graphene has the great potential to be used for humidity sensing due to ultrahigh surface area and conductivity. However, the impact of different atomic layers of graphene on SiO2/Si substrate on the humidity sensing have not been studied yet. In this paper, we fabricated three types of humidity sensors on SiO2/Si substrate based on one to three atomic layers of graphene, in which the sensing areas of graphene are 75 μm * 72 μm and 45 μm * 72 μm, respectively. We studied the impact of both the number of atomic layers of graphene and the sensing areas of graphene on the responsivity and response/recovery time of the prepared graphene-based humidity sensors. We found the relative resistance change of the prepared devices decreased with the increase of number of atomic layers of graphene under the same change of relative humidity. Further, devices based on tri-layer graphene showed the fastest response/recovery time while devices based on double-layer graphene showed the slowest response/recovery time. Finally, we chose the devices based on double-layer graphene that have relatively good responsivity and stability for application in respiration monitoring and contact-free finger monitoring.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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